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Emily M. Hwang
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Hopewell Junction, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Factory level and tool level advanced process control systems integ...
Patent number
7,899,566
Issue date
Mar 1, 2011
International Business Machines Corporation
Gary W. Behm
G05 - CONTROLLING REGULATING
Information
Patent Grant
Providing a dynamic sampling plan for integrated metrology
Patent number
7,577,537
Issue date
Aug 18, 2009
International Business Machines Corporation
Gary W. Behm
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Factory level and tool level advanced process control systems integ...
Patent number
7,489,980
Issue date
Feb 10, 2009
International Business Machines Corporation
Gary W. Behm
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method and system of providing a dynamic sampling plan for integrat...
Patent number
7,398,172
Issue date
Jul 8, 2008
International Business Machines Corporation
Gary W. Behm
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Integration of factory level and tool level advanced process contro...
Patent number
7,113,845
Issue date
Sep 26, 2006
International Business Machines Corporation
Gary W. Behm
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Patents Applications
last 30 patents
Information
Patent Application
FACTORY LEVEL AND TOOL LEVEL ADVANCED PROCESS CONTROL SYSTEMS INTEG...
Publication number
20090118851
Publication date
May 7, 2009
Gary W. Behm
G05 - CONTROLLING REGULATING
Information
Patent Application
PROVIDING A DYNAMIC SAMPLING PLAN FOR INTEGRATED METROLOGY
Publication number
20080167830
Publication date
Jul 10, 2008
International Business Machines Corporation
Gary W. Behm
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD AND SYSTEM OF PROVIDING A DYNAMIC SAMPLING PLAN FOR INTEGRAT...
Publication number
20070282549
Publication date
Dec 6, 2007
International Business Machines Corporation
Gary W. Behm
G05 - CONTROLLING REGULATING
Information
Patent Application
FACTORY LEVEL AND TOOL LEVEL ADVANCED PROCESS CONTROL SYSTEMS INTEG...
Publication number
20070038326
Publication date
Feb 15, 2007
International Business Machines Corporation
Gary W Behm
G05 - CONTROLLING REGULATING