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Emmanuel Guidotti
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Gilbert, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-tray film precursor evaporation system and thin film depositi...
Patent number
7,638,002
Issue date
Dec 29, 2009
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for preparing solid precursor tray for use in solid precurso...
Patent number
7,488,512
Issue date
Feb 10, 2009
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Replaceable precursor tray for use in a multi-tray solid precursor...
Patent number
7,484,315
Issue date
Feb 3, 2009
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for thin film deposition using multi-tray film precursor eva...
Patent number
7,459,396
Issue date
Dec 2, 2008
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for increasing deposition rates of metal layers from metal-c...
Patent number
7,270,848
Issue date
Sep 18, 2007
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for removing material from chamber and wafer s...
Patent number
6,992,011
Issue date
Jan 31, 2006
Tokyo Electron Limited
Takenao Nemoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR THIN FILM DEPOSITION USING MULTI-TRAY FILM PRECURSOR EVA...
Publication number
20070032079
Publication date
Feb 8, 2007
TOKYO ELECTRON LIMITED
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Film precursor evaporation system and method of using
Publication number
20060185597
Publication date
Aug 24, 2006
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and system for improved delivery of a precursor vapor to a p...
Publication number
20060182886
Publication date
Aug 17, 2006
Emmanuel P. Guidotti
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-tray film precursor evaporation system and thin film depositi...
Publication number
20060112882
Publication date
Jun 1, 2006
TOKYO ELECTRON LIMITED
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Replaceable precursor tray for use in a multi-tray solid precursor...
Publication number
20060112883
Publication date
Jun 1, 2006
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for preparing solid precursor tray for use in solid precurso...
Publication number
20060115593
Publication date
Jun 1, 2006
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for increasing deposition rates of metal layers from metal-c...
Publication number
20060110530
Publication date
May 25, 2006
TOKYO ELECTRON LIMITED
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Low-pressure deposition of ruthenium and rhenium metal layers from...
Publication number
20060068588
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND PROCESSING SYSTEM FOR CONTROLLING A CHAMBER CLEANING PRO...
Publication number
20050279384
Publication date
Dec 22, 2005
Emmanuel P. Guidotti
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for removing material from chamber and wafer s...
Publication number
20040137750
Publication date
Jul 15, 2004
TOKYO ELECTRON LIMITED
Takenao Nemoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...