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Eric A. Armour
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Pennington, NJ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Periphery purge shutter and flow control systems and methods
Patent number
10,570,510
Issue date
Feb 25, 2020
Veeco Instruments Inc.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Alkyl push flow for vertical flow rotating disk reactors
Patent number
10,364,509
Issue date
Jul 30, 2019
Veeco Instruments Inc.
Michael Murphy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer processing with carrier extension
Patent number
10,167,554
Issue date
Jan 1, 2019
Veeco Instruments Inc.
Bojan Mitrovic
C30 - CRYSTAL GROWTH
Information
Patent Grant
Wafer carrier having thermal cover for chemical vapor deposition sy...
Patent number
10,134,617
Issue date
Nov 20, 2018
Veeco Instruments Inc.
Alexander I. Gurary
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Density-matching alkyl push flow for vertical flow rotating disk re...
Patent number
9,982,362
Issue date
May 29, 2018
Veeco Instruments Inc.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of wafer processing with carrier extension
Patent number
9,938,621
Issue date
Apr 10, 2018
Veeco Instruments Inc.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for controlled dopant incorporation and activa...
Patent number
9,748,113
Issue date
Aug 29, 2017
Veeco Intruments Inc.
Eric Armour
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heated wafer carrier profiling
Patent number
9,653,340
Issue date
May 16, 2017
Veeco Instruments Inc.
Vadim Boguslavskiy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Alkyl push flow for vertical flow rotating disk reactors
Patent number
9,593,434
Issue date
Mar 14, 2017
Veeco Instruments Inc.
Michael Murphy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas injection system for chemical vapor deposition using sequenced...
Patent number
9,303,319
Issue date
Apr 5, 2016
Veeco Instruments Inc.
William E. Quinn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas treatment systems
Patent number
9,273,395
Issue date
Mar 1, 2016
Veeco Instruments Inc.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Density-matching alkyl push flow for vertical flow rotating disk re...
Patent number
8,980,000
Issue date
Mar 17, 2015
Veeco Instruments Inc.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heated wafer carrier profiling
Patent number
8,958,061
Issue date
Feb 17, 2015
Veeco Instruments Inc.
Vadim Boguslavskiy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition with energy input
Patent number
8,815,709
Issue date
Aug 26, 2014
Veeco Instruments Inc.
Joshua Mangum
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for varying wafer surface temperature via wafer-c...
Patent number
8,603,248
Issue date
Dec 10, 2013
Veeco Instruments Inc.
Alex Gurary
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for batch non-contact material characterization
Patent number
8,441,653
Issue date
May 14, 2013
Veeco Instruments Inc.
Dong Seung Lee
G01 - MEASURING TESTING
Information
Patent Grant
Gas treatment systems
Patent number
8,287,646
Issue date
Oct 16, 2012
Veeco Instruments Inc.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for batch non-contact material characterization
Patent number
8,198,605
Issue date
Jun 12, 2012
Veeco Instruments Inc.
Dong Seung Lee
G01 - MEASURING TESTING
Information
Patent Grant
Gas treatment systems
Patent number
8,152,923
Issue date
Apr 10, 2012
Veeco Instruments Inc.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Movable injectors in rotating disc gas reactors
Patent number
8,092,599
Issue date
Jan 10, 2012
Veeco Instruments Inc.
Piero Sferlazzo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for batch non-contact material characterization
Patent number
8,022,372
Issue date
Sep 20, 2011
Veeco Instruments Inc.
Dong Seung Lee
G01 - MEASURING TESTING
Information
Patent Grant
Wafer carriers for epitaxial growth processes
Patent number
6,001,183
Issue date
Dec 14, 1999
Emcore Corporation
Alexander I. Gurary
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
WAFER CARRIER ASSEMBLY WITH PEDESTAL AND COVER RESTRAINT ARRANGEMEN...
Publication number
20230060609
Publication date
Mar 2, 2023
VEECO INSTRUMENTS INC.
Sandeep Krishnan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL VAPOR DEPOSITION WAFER CARRIERS
Publication number
20200063287
Publication date
Feb 27, 2020
VEECO INSTRUMENTS INC.
Bojan Mitrovic
C30 - CRYSTAL GROWTH
Information
Patent Application
Chemical vapor deposition wafer carriers
Publication number
20200056284
Publication date
Feb 20, 2020
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER CARRIER HAVING THERMAL COVER FOR CHEMICAL VAPOR DEPOSITION SY...
Publication number
20190157125
Publication date
May 23, 2019
VEECO INSTRUMENTS INC.
Alexander I. Gurary
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ALKYL PUSH FLOW FOR VERTICAL FLOW ROTATING DISK REACTORS
Publication number
20180237943
Publication date
Aug 23, 2018
VEECO INSTRUMENTS INC.
Michael Murphy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER PROCESSING WITH CARRIER EXTENSION
Publication number
20180230596
Publication date
Aug 16, 2018
VEECO INSTRUMENTS INC.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PERIPHERY PURGE SHUTTER AND FLOW CONTROL SYSTEMS AND METHODS
Publication number
20170253967
Publication date
Sep 7, 2017
VEECO INSTRUMENTS INC.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER CARRIER HAVING THERMAL UNIFORMITY-ENHANCING FEATURES
Publication number
20170121847
Publication date
May 4, 2017
VEECO INSTRUMENTS INC.
Eric Armour
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD AND APPARATUS FOR CONTROLLED DOPANT INCORPORATION AND ACTIVA...
Publication number
20170032974
Publication date
Feb 2, 2017
VEECO INSTRUMENTS, INC.
Eric Armour
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER PROCESSING WITH CARRIER EXTENSION
Publication number
20160251758
Publication date
Sep 1, 2016
VEECO INSTRUMENTS INC.
Bojan Mitrovic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas Injection System For Chemical Vapor Deposition Using Sequenced...
Publication number
20160168710
Publication date
Jun 16, 2016
VEECO INSTRUMENTS, INC.
William E. Quinn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Linear Cluster Deposition System
Publication number
20160160387
Publication date
Jun 9, 2016
VEECO INSTRUMENTS INC.
William E. Quinn
C30 - CRYSTAL GROWTH
Information
Patent Application
ENHANCED ENCLOSURES FOR ACOUSTICAL GAS CONCENTRATION SENSING AND FL...
Publication number
20160041126
Publication date
Feb 11, 2016
VEECO INSTRUMENTS, INC.
Ray Logue
G01 - MEASURING TESTING
Information
Patent Application
DENSITY-MATCHING ALKYL PUSH FLOW FOR VERTICAL FLOW ROTATING DISK RE...
Publication number
20150225875
Publication date
Aug 13, 2015
VEECO INSTRUMENTS INC.
Bojan Mitrovic
C30 - CRYSTAL GROWTH
Information
Patent Application
Water Carrier Having Thermal Cover for Chemical Vapor Deposition Sy...
Publication number
20150187620
Publication date
Jul 2, 2015
VEECO INSTRUMENTS INC.
Alexander I. Gurary
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER CARRIER HAVING THERMAL UNIFORMITY-ENHANCING FEATURES
Publication number
20140360430
Publication date
Dec 11, 2014
Eric Armour
C30 - CRYSTAL GROWTH
Information
Patent Application
CHEMICAL VAPOR DEPOSITION WITH ENERGY INPUT
Publication number
20140318453
Publication date
Oct 30, 2014
Joshua Mangum
C30 - CRYSTAL GROWTH
Information
Patent Application
ALKYL PUSH FLOW FOR VERTICAL FLOW ROTATING DISK REACTORS
Publication number
20140224178
Publication date
Aug 14, 2014
VEECO INSTRUMENTS INC.
Michael Murphy
C30 - CRYSTAL GROWTH
Information
Patent Application
WAFER CARRIER WITH THERMAL FEATURES
Publication number
20130065403
Publication date
Mar 14, 2013
Ajit Paranjpe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEATED WAFER CARRIER PROFILING
Publication number
20120307233
Publication date
Dec 6, 2012
VEECO INSTRUMENTS INC.
Vadim Boguslavskiy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEATED WAFER CARRIER PROFILING
Publication number
20120304926
Publication date
Dec 6, 2012
VEECO INSTRUMENTS INC.
Vadim Boguslavskiy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and Method for Batch Non-Contact Material Characterization
Publication number
20120248336
Publication date
Oct 4, 2012
VEECO INSTRUMENTS INC.
Dong Seung Lee
G01 - MEASURING TESTING
Information
Patent Application
WAFER PROCESSING WITH CARRIER EXTENSION
Publication number
20120171870
Publication date
Jul 5, 2012
VEECO INSTRUMENTS INC.
Bojan Mitrovic
C30 - CRYSTAL GROWTH
Information
Patent Application
Gas Injection System for Chemical Vapor Deposition Using Sequenced...
Publication number
20120156363
Publication date
Jun 21, 2012
VEECO INSTRUMENTS INC.
William E. Quinn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEATER WITH LIQUID HEATING ELEMENT
Publication number
20120073502
Publication date
Mar 29, 2012
VEECO INSTRUMENTS INC.
Boris Volf
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MOVABLE INJECTORS IN ROTATING DISC GAS REACTORS
Publication number
20120070916
Publication date
Mar 22, 2012
VEECO INSTRUMENTS INC.
Piero Sferlazzo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Linear Cluster Deposition System
Publication number
20120058630
Publication date
Mar 8, 2012
VEECO INSTRUMENTS INC.
William E. Quinn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR BATCH NON-CONTACT MATERIAL CHARACTERIZATION
Publication number
20110300645
Publication date
Dec 8, 2011
VEECO INSTRUMENTS INC.
Dong Seung Lee
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS AND METHOD FOR BATCH NON-CONTACT MATERIAL CHARACTERIZATION
Publication number
20110297076
Publication date
Dec 8, 2011
VEECO INSTRUMENTS INC.
Dong Seung Lee
G01 - MEASURING TESTING
Information
Patent Application
Multi-Chamber CVD Processing System
Publication number
20110290175
Publication date
Dec 1, 2011
VEECO INSTRUMENTS, INC.
Ajit Paranjpe
C30 - CRYSTAL GROWTH