Eric A. Englhardt

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer systems and methods of use thereof
- Patent number 11,784,074
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Alex Berger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer systems and methods of use thereof
- Patent number 11,527,424
- Issue date Dec 13, 2022
- Applied Materials, Inc.
- Alex Berger
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer chambers with an increased number of sides, semiconductor...
- Patent number 11,087,998
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer chambers with an increased number of sides, semiconductor...
- Patent number 10,971,381
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle reduction via throttle gate valve purge
- Patent number 10,010,912
- Issue date Jul 3, 2018
- Applied Materials, Inc.
- Jared Ahmad Lee
- B08 - CLEANING
Information Patent Grant
Processing systems and apparatus adapted to process substrates in e...
- Patent number 9,524,889
- Issue date Dec 20, 2016
- Applied Materials, Inc.
- Steve S. Hongkham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer chamber gas purge apparatus, electronic device processing...
- Patent number 9,441,792
- Issue date Sep 13, 2016
- Applied Materials, Inc.
- Edward Ng
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Degassing apparatus adapted to process substrates in multiple tiers...
- Patent number 9,177,842
- Issue date Nov 3, 2015
- Applied Materials, Inc.
- Eric A. Englhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linked vacuum processing tools and methods of using the same
- Patent number 9,147,592
- Issue date Sep 29, 2015
- Applied Materials, Inc.
- Eric A. Englhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing sequence in a cartesian robot cluster tool
- Patent number 8,911,193
- Issue date Dec 16, 2014
- Applied Materials, Inc.
- Mike Rice
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods and loadport for purging a substrate carrier
- Patent number 8,689,812
- Issue date Apr 8, 2014
- Applied Materials, Inc.
- Vinay K. Shah
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods and loadport apparatus for purging a substrate carrier
- Patent number 8,601,975
- Issue date Dec 10, 2013
- Applied Materials, Inc.
- Vinay K. Shah
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System, methods and apparatus for substrate carrier content verific...
- Patent number 8,379,082
- Issue date Feb 19, 2013
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated integrated solar cell production line composed of a plura...
- Patent number 8,225,496
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Robert Z. Bachrach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for enhanced operation of substrate carrier h...
- Patent number 8,204,617
- Issue date Jun 19, 2012
- Applied Materials, Inc.
- Michael Teferra
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods and apparatus for purging a substrate carrier
- Patent number 8,074,597
- Issue date Dec 13, 2011
- Applied Materials, Inc.
- Vinay K. Shah
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing sequence in a Cartesian robot cluster tool
- Patent number 8,066,466
- Issue date Nov 29, 2011
- Applied Materials, Inc.
- Mike Rice
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Break-away positioning conveyor mount for accommodating conveyor be...
- Patent number 8,020,689
- Issue date Sep 20, 2011
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scheduling method for processing equipment
- Patent number 8,019,467
- Issue date Sep 13, 2011
- Applied Materials, Inc.
- Steve S. Hongkham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for moving a substrate carrier
- Patent number 7,984,543
- Issue date Jul 26, 2011
- Applied Materials, Inc.
- Martin R. Elliott
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods and apparatus for loading and unloading substrate carriers...
- Patent number 7,930,061
- Issue date Apr 19, 2011
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of high speed loader to substrate transport system
- Patent number 7,912,576
- Issue date Mar 22, 2011
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for sensing substrates in carriers
- Patent number 7,894,923
- Issue date Feb 22, 2011
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for supplying substrates to a processing tool
- Patent number 7,857,570
- Issue date Dec 28, 2010
- Applied Materials, Inc.
- Martin R. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cartesian cluster tool configuration for lithography type processes
- Patent number 7,819,079
- Issue date Oct 26, 2010
- Applied Materials, Inc.
- Eric A. Englhardt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing sequence in a cartesian robot cluster tool
- Patent number 7,798,764
- Issue date Sep 21, 2010
- Applied Materials, Inc.
- Mike Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stabilizing substrate carriers during overhead transport
- Patent number 7,798,309
- Issue date Sep 21, 2010
- Applied Materials, Inc.
- Michael R. Rice
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate carrier handler that unloads substrate carriers directly...
- Patent number 7,792,608
- Issue date Sep 7, 2010
- Applied Materials, Inc.
- Michael Robert Rice
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Small lot size lithography bays
- Patent number 7,778,721
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Eric Andrew Englhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for enhanced operation of substrate carrier h...
- Patent number 7,720,557
- Issue date May 18, 2010
- Applied Materials, Inc.
- Michael Teferra
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF
- Publication number 20240071796
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Alex Berger
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF
- Publication number 20210358788
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Alex Berger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF
- Publication number 20210296150
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Alex Berger
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
TRANSFER CHAMBERS WITH AN INCREASED NUMBER OF SIDES, SEMICONDUCTOR...
- Publication number 20210143034
- Publication date May 13, 2021
- Applied Materials, Inc.
- Michael Robert RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CHAMBERS WITH AN INCREASED NUMBER OF SIDES, SEMICONDUCTOR...
- Publication number 20190214284
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- Michael Robert RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAL RINGS IN ELECTROCHEMICAL PROCESSORS
- Publication number 20170145582
- Publication date May 25, 2017
- Applied Materials, Inc.
- Nolan L. Zimmerman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
TRANSFER CHAMBERS WITH AN INCREASED NUMBER OF SIDES, SEMICONDUCTOR...
- Publication number 20160225646
- Publication date Aug 4, 2016
- Applied Materials, Inc.
- Michael Robert RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL
- Publication number 20150098773
- Publication date Apr 9, 2015
- Applied Materials, Inc.
- Mike RICE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TRANSFER CHAMBER GAS PURGE APPARATUS, ELECTRONIC DEVICE PROCESSING...
- Publication number 20150090341
- Publication date Apr 2, 2015
- Applied Materials, Inc.
- Edward Ng
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
PARTICLE REDUCTION VIA THROTTLE GATE VALVE PURGE
- Publication number 20140366953
- Publication date Dec 18, 2014
- Applied Materials, Inc.
- JARED AHMAD LEE
- B08 - CLEANING
Information Patent Application
PROCESSING SYSTEMS, APPARATUS, AND METHODS ADAPTED TO PROCESS SUBST...
- Publication number 20140263165
- Publication date Sep 18, 2014
- Steve S. Hongkham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINKED VACUUM PROCESSING TOOLS AND METHODS OF USING THE SAME
- Publication number 20140044503
- Publication date Feb 13, 2014
- Eric A. Englhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEAL RINGS IN ELECTROCHEMICAL PROCESSORS
- Publication number 20130306465
- Publication date Nov 21, 2013
- Applied Materials, Inc.
- Nolan L. Zimmerman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ROBOT SYSTEMS, APPARATUS, AND METHODS ADAPTED TO PROCESS SUBSTRATES...
- Publication number 20130039734
- Publication date Feb 14, 2013
- Applied Materials, Inc.
- Eric A. Englhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER
- Publication number 20120325328
- Publication date Dec 27, 2012
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL
- Publication number 20120141237
- Publication date Jun 7, 2012
- Mike Rice
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
METHODS AND LOADPORT APPARATUS FOR PURGING A SUBSTRATE CARRIER
- Publication number 20120060971
- Publication date Mar 15, 2012
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL
- Publication number 20100280654
- Publication date Nov 4, 2010
- Mike Rice
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
LOAD PORT CONFIGURATIONS FOR SMALL LOT SIZE SUBSTRATE CARRIERS
- Publication number 20090308030
- Publication date Dec 17, 2009
- Applied Materials, Inc.
- Martin R. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM, METHODS AND APPARATUS FOR SUBSTRATE CARRIER CONTENT VERIFIC...
- Publication number 20090225160
- Publication date Sep 10, 2009
- Applied Materials, Inc.
- Vinay K. Shah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BREAK-AWAY POSITIONING CONVEYOR MOUNT FOR ACCOMMODATING CONVEYOR BE...
- Publication number 20090205930
- Publication date Aug 20, 2009
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR MOVING A SUBSTRATE CARRIER
- Publication number 20090188103
- Publication date Jul 30, 2009
- Applied Materials, Inc.
- Martin R. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRODUCTION LINE MODULE FOR FORMING MULTIPLE SIZED PHOTOVOLTAIC DEVICES
- Publication number 20090077804
- Publication date Mar 26, 2009
- APPLIED MATERIALS, INC.
- Robert Z. Bachrach
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PHOTOVOLTAIC PRODUCTION LINE
- Publication number 20090077805
- Publication date Mar 26, 2009
- APPLIED MATERIALS, INC.
- Robert Z. BACHRACH
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM
- Publication number 20090030547
- Publication date Jan 29, 2009
- APPLIED MATERIALS, INC.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF LOGICAL LOTS IN SEMICONDUCTOR SUBSTRATE PROCESSING
- Publication number 20080294282
- Publication date Nov 27, 2008
- Applied Materials, Inc.
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR TRANSPORTING SUBSTRATE CARRIERS
- Publication number 20080289932
- Publication date Nov 27, 2008
- APPLIED MATERIALS, INC.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SUPPLYING SUBSTRATES TO A PROCESSING TOOL
- Publication number 20080187414
- Publication date Aug 7, 2008
- Applied Materials, Inc.
- Martin R. Elliott
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM
- Publication number 20080187419
- Publication date Aug 7, 2008
- APPLIED MATERIALS, INC.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR SENSING SUBSTRATES IN CARRIERS
- Publication number 20080156689
- Publication date Jul 3, 2008
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS

Eric A. Englhardt

Person

Patents Grantslast 30 patents

Substrate transfer systems and methods of use thereof

Substrate transfer systems and methods of use thereof

Transfer chambers with an increased number of sides, semiconductor...

Transfer chambers with an increased number of sides, semiconductor...

Particle reduction via throttle gate valve purge

Processing systems and apparatus adapted to process substrates in e...

Transfer chamber gas purge apparatus, electronic device processing...

Degassing apparatus adapted to process substrates in multiple tiers...

Linked vacuum processing tools and methods of using the same

Substrate processing sequence in a cartesian robot cluster tool

Methods and loadport for purging a substrate carrier

Methods and loadport apparatus for purging a substrate carrier

System, methods and apparatus for substrate carrier content verific...

Automated integrated solar cell production line composed of a plura...

Methods and apparatus for enhanced operation of substrate carrier h...

Methods and apparatus for purging a substrate carrier

Substrate processing sequence in a Cartesian robot cluster tool

Break-away positioning conveyor mount for accommodating conveyor be...

Scheduling method for processing equipment

Methods for moving a substrate carrier

Methods and apparatus for loading and unloading substrate carriers...

Calibration of high speed loader to substrate transport system

Methods and apparatus for sensing substrates in carriers

Method and apparatus for supplying substrates to a processing tool

Cartesian cluster tool configuration for lithography type processes

Substrate processing sequence in a cartesian robot cluster tool

Stabilizing substrate carriers during overhead transport

Substrate carrier handler that unloads substrate carriers directly...

Small lot size lithography bays

Methods and apparatus for enhanced operation of substrate carrier h...

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

TRANSFER CHAMBERS WITH AN INCREASED NUMBER OF SIDES, SEMICONDUCTOR...

TRANSFER CHAMBERS WITH AN INCREASED NUMBER OF SIDES, SEMICONDUCTOR...

SEAL RINGS IN ELECTROCHEMICAL PROCESSORS

TRANSFER CHAMBERS WITH AN INCREASED NUMBER OF SIDES, SEMICONDUCTOR...

SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL

TRANSFER CHAMBER GAS PURGE APPARATUS, ELECTRONIC DEVICE PROCESSING...

PARTICLE REDUCTION VIA THROTTLE GATE VALVE PURGE

PROCESSING SYSTEMS, APPARATUS, AND METHODS ADAPTED TO PROCESS SUBST...

LINKED VACUUM PROCESSING TOOLS AND METHODS OF USING THE SAME

SEAL RINGS IN ELECTROCHEMICAL PROCESSORS

ROBOT SYSTEMS, APPARATUS, AND METHODS ADAPTED TO PROCESS SUBSTRATES...

METHODS AND LOADPORT FOR PURGING A SUBSTRATE CARRIER

SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL

METHODS AND LOADPORT APPARATUS FOR PURGING A SUBSTRATE CARRIER

SUBSTRATE PROCESSING SEQUENCE IN A CARTESIAN ROBOT CLUSTER TOOL

LOAD PORT CONFIGURATIONS FOR SMALL LOT SIZE SUBSTRATE CARRIERS

SYSTEM, METHODS AND APPARATUS FOR SUBSTRATE CARRIER CONTENT VERIFIC...

BREAK-AWAY POSITIONING CONVEYOR MOUNT FOR ACCOMMODATING CONVEYOR BE...

METHODS AND APPARATUS FOR MOVING A SUBSTRATE CARRIER

PRODUCTION LINE MODULE FOR FORMING MULTIPLE SIZED PHOTOVOLTAIC DEVICES

PHOTOVOLTAIC PRODUCTION LINE

CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM

USE OF LOGICAL LOTS IN SEMICONDUCTOR SUBSTRATE PROCESSING

SYSTEM FOR TRANSPORTING SUBSTRATE CARRIERS

METHOD AND APPARATUS FOR SUPPLYING SUBSTRATES TO A PROCESSING TOOL

CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM

METHODS AND APPARATUS FOR SENSING SUBSTRATES IN CARRIERS