Eric A. Pape

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
- Patent number 12,074,049
- Issue date Aug 27, 2024
- Lam Research Corporation
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for conditioning a plasma processing chamber
- Patent number 12,060,636
- Issue date Aug 13, 2024
- Lam Research Corporation
- Chiara Helena Catherina Giammanco MacPherson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Determining and controlling substrate temperature during substrate...
- Patent number 12,020,960
- Issue date Jun 25, 2024
- Lam Research Corporation
- Jeremy George Smith
- G05 - CONTROLLING REGULATING
Information Patent Grant
Reflectometer to monitor substrate movement
- Patent number 11,791,189
- Issue date Oct 17, 2023
- Lam Research Corporation
- Eric A. Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two-stage pin lifter for de-chuck operations
- Patent number 11,430,688
- Issue date Aug 30, 2022
- Lam Research Corporation
- Siyuan Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for conditioning a ceramic coating
- Patent number 11,384,430
- Issue date Jul 12, 2022
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic baseplate with channels having non-square corners
- Patent number 11,133,211
- Issue date Sep 28, 2021
- Lam Research Corporation
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder having integrated temperature measurement electric...
- Patent number 10,978,323
- Issue date Apr 13, 2021
- Lam Research Corporation
- Eric Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,770,363
- Issue date Sep 8, 2020
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminated heater with different heater trace materials
- Patent number 10,764,966
- Issue date Sep 1, 2020
- Lam Research Corporation
- Yuma Ohkura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Matched TCR joule heater designs for electrostatic chucks
- Patent number 10,707,110
- Issue date Jul 7, 2020
- Lam Research Corporation
- Eric A. Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-plane heater for semiconductor substrate support
- Patent number 10,690,414
- Issue date Jun 23, 2020
- Lam Research Corporation
- Keith William Gaff
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Connections between laminated heater and heater voltage inputs
- Patent number 10,667,379
- Issue date May 26, 2020
- Lam Research Corporation
- Yuma Ohkura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for substrate support feed-forward temperature co...
- Patent number 10,522,377
- Issue date Dec 31, 2019
- Lam Research Corporation
- Tao Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of determining thermal stability of a substrate support asse...
- Patent number 10,437,236
- Issue date Oct 8, 2019
- Lam Research Corporation
- Ole Waldmann
- G05 - CONTROLLING REGULATING
Information Patent Grant
Auto-correction of electrostatic chuck temperature non-uniformity
- Patent number 10,381,248
- Issue date Aug 13, 2019
- Lam Research Corporation
- Benny Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Permanent secondary erosion containment for electrostatic chuck bonds
- Patent number 10,340,171
- Issue date Jul 2, 2019
- Lam Research Corporation
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing system printed-circuit control board assembly...
- Patent number 10,306,776
- Issue date May 28, 2019
- Lam Research Corporation
- Eric Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder having integrated temperature measurement electric...
- Patent number 10,186,437
- Issue date Jan 22, 2019
- Lam Research Corporation
- Eric Pape
- G01 - MEASURING TESTING
Information Patent Grant
Reducing temperature transition in a substrate support
- Patent number 10,096,506
- Issue date Oct 9, 2018
- Lam Research Corporation
- Tao Zhang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,049,948
- Issue date Aug 14, 2018
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing temperature transition in an electrostatic chuck
- Patent number 9,922,855
- Issue date Mar 20, 2018
- Lam Research Corporation
- Tao Zhang
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for reducing temperature transition in an electro...
- Patent number 9,779,974
- Issue date Oct 3, 2017
- Lam Research Corporation
- Tao Zhang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of determining thermal stability of a substrate support asse...
- Patent number 9,716,022
- Issue date Jul 25, 2017
- Lam Research Corporation
- Ole Waldmann
- G05 - CONTROLLING REGULATING
Information Patent Grant
Auto-correction of malfunctioning thermal control element in a temp...
- Patent number 9,543,171
- Issue date Jan 10, 2017
- Lam Research Corporation
- Ole Waldmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calculating power input to an array of thermal control elements to...
- Patent number 9,435,692
- Issue date Sep 6, 2016
- Lam Research Corporation
- Ole Waldmann
- G01 - MEASURING TESTING
Information Patent Grant
Controlling CD and CD uniformity with trim time and temperature on...
- Patent number 9,012,243
- Issue date Apr 21, 2015
- Lam Research Corporation
- Yoshie Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlling CD and CD uniformity with trim time and temperature on...
- Patent number 8,852,964
- Issue date Oct 7, 2014
- Lam Research Corporation
- Yoshie Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective coating for a plasma processing chamber part and a metho...
- Patent number 8,522,716
- Issue date Sep 3, 2013
- Lam Research Corporation
- Bobby Kadkhodayan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for predictive preventive maintenance of proc...
- Patent number 8,473,089
- Issue date Jun 25, 2013
- Lam Research Corporation
- Luc Albarede
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
YTTRIUM ALUMINUM PEROVSKITE (YAP) BASED COATINGS FOR SEMICONDUCTOR...
- Publication number 20240212991
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Eric A. PAPE
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
REFLECTOMETER TO MONITOR SUBSTRATE MOVEMENT
- Publication number 20230420281
- Publication date Dec 28, 2023
- LAM RESEARCH CORPORATION
- Eric A. Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC COMPONENT WITH CHANNELS
- Publication number 20230411124
- Publication date Dec 21, 2023
- LAM RESEARCH CORPORATION
- John Michael KERNS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL OXIDE WITH LOW TEMPERATURE FLUORINATION
- Publication number 20230295798
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Eric A. PAPE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA SOURCE SHOWERHEAD ASSEMBLY WITH ALUMINUM FLUORIDE PLA...
- Publication number 20230282450
- Publication date Sep 7, 2023
- LAM RESEARCH CORPORATION
- Eric A. PAPE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MATCHED CHEMISTRY COMPONENT BODY AND COATING FOR SEMICONDUCTOR PROC...
- Publication number 20230223240
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Eric A. PAPE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION COATED POWDER COATING FOR PROCESSING CHAMBE...
- Publication number 20230207278
- Publication date Jun 29, 2023
- LAM RESEARCH CORPORATION
- Eric A. PAPE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER
- Publication number 20230081544
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Pylin SAROBOL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SINGLE CRYSTAL METAL OXIDE PLASMA CHAMBER COMPONENT
- Publication number 20220392753
- Publication date Dec 8, 2022
- Lin XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONDITIONING A PLASMA PROCESSING CHAMBER
- Publication number 20210340668
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Chiara Helena Catherina Giammanco MACPHERSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20210292893
- Publication date Sep 23, 2021
- LAM RESEARCH CORPORATION
- Slobodan MITROVIC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONDITIONING A CERAMIC COATING
- Publication number 20210280393
- Publication date Sep 9, 2021
- LAM RESEARCH CORPORATION
- Hong SHIH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETERMINING AND CONTROLLING SUBSTRATE TEMPERATURE DURING SUBSTRATE...
- Publication number 20210143037
- Publication date May 13, 2021
- LAM RESEARCH CORPORATION
- Jeremy George SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATCHED TCR JOULE HEATER DESIGNS FOR ELECTROSTATIC CHUCKS
- Publication number 20200335378
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Eric A. Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFLECTOMETER TO MONITOR SUBSTRATE MOVEMENT
- Publication number 20200111696
- Publication date Apr 9, 2020
- LAM RESEARCH CORPORATION
- Eric A. Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO-STAGE PIN LIFTER FOR DE-CHUCK OPERATIONS
- Publication number 20200075389
- Publication date Mar 5, 2020
- LAM RESEARCH CORPORATION
- Siyuan Tian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC BASEPLATE WITH CHANNELS HAVING NON-SQUARE CORNERS
- Publication number 20200066564
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERMANENT SECONDARY EROSION CONTAINMENT FOR ELECTROSTATIC CHUCK BONDS
- Publication number 20190311935
- Publication date Oct 10, 2019
- LAM RESEARCH CORPORATION
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM PRINTED-CIRCUIT CONTROL BOARD ASSEMBLY...
- Publication number 20190166700
- Publication date May 30, 2019
- LAM RESEARCH CORPORATION
- Eric Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Holder Having Integrated Temperature Measurement Electric...
- Publication number 20190148190
- Publication date May 16, 2019
- LAM RESEARCH CORPORATION
- Eric Pape
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS
- Publication number 20180374763
- Publication date Dec 27, 2018
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20180240649
- Publication date Aug 23, 2018
- LAM RESEARCH CORPORATION
- Jeremy SMITH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUCING TEMPERATURE TRANSITION IN A SUBSTRATE SUPPORT
- Publication number 20180174879
- Publication date Jun 21, 2018
- LAM RESEARCH CORPORATION
- Tao Zhang
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM AND METHOD FOR SUBSTRATE SUPPORT FEED-FORWARD TEMPERATURE CO...
- Publication number 20180005857
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Tao Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ESC CERAMIC SIDEWALL MODIFICATION FOR PARTICLE AND METALS PERFORMAN...
- Publication number 20180005867
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REDUCING TEMPERATURE TRANSITION IN AN ELECTROSTATIC CHUCK
- Publication number 20180005859
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Tao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERMANENT SECONDARY EROSION CONTAINMENT FOR ELECTROSTATIC CHUCK BONDS
- Publication number 20170338140
- Publication date Nov 23, 2017
- LAM RESEARCH CORPORATION
- Eric A. Pape
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATED HEATER WITH DIFFERENT HEATER TRACE MATERIALS
- Publication number 20170332480
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Yuma Ohkura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CONNECTIONS BETWEEN LAMINATED HEATER AND HEATER VOLTAGE INPUTS
- Publication number 20170332481
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Yuma Ohkura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSE...
- Publication number 20170322546
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Ole Waldmann
- H01 - BASIC ELECTRIC ELEMENTS

Eric A. Pape

Person

Patents Grantslast 30 patents

Permanent secondary erosion containment for electrostatic chuck bonds

Method for conditioning a plasma processing chamber

Determining and controlling substrate temperature during substrate...

Reflectometer to monitor substrate movement

Two-stage pin lifter for de-chuck operations

Method for conditioning a ceramic coating

Ceramic baseplate with channels having non-square corners

Substrate holder having integrated temperature measurement electric...

Power switching system for ESC with array of thermal control elements

Laminated heater with different heater trace materials

Matched TCR joule heater designs for electrostatic chucks

Multi-plane heater for semiconductor substrate support

Connections between laminated heater and heater voltage inputs

System and method for substrate support feed-forward temperature co...

Method of determining thermal stability of a substrate support asse...

Auto-correction of electrostatic chuck temperature non-uniformity

Permanent secondary erosion containment for electrostatic chuck bonds

Substrate processing system printed-circuit control board assembly...

Substrate holder having integrated temperature measurement electric...

Reducing temperature transition in a substrate support

Power switching system for ESC with array of thermal control elements

Method for reducing temperature transition in an electrostatic chuck

System and method for reducing temperature transition in an electro...

Method of determining thermal stability of a substrate support asse...

Auto-correction of malfunctioning thermal control element in a temp...

Calculating power input to an array of thermal control elements to...

Controlling CD and CD uniformity with trim time and temperature on...

Controlling CD and CD uniformity with trim time and temperature on...

Protective coating for a plasma processing chamber part and a metho...

Methods and apparatus for predictive preventive maintenance of proc...

Patents Applicationslast 30 patents

YTTRIUM ALUMINUM PEROVSKITE (YAP) BASED COATINGS FOR SEMICONDUCTOR...

REFLECTOMETER TO MONITOR SUBSTRATE MOVEMENT

CERAMIC COMPONENT WITH CHANNELS

METAL OXIDE WITH LOW TEMPERATURE FLUORINATION

REMOTE PLASMA SOURCE SHOWERHEAD ASSEMBLY WITH ALUMINUM FLUORIDE PLA...

MATCHED CHEMISTRY COMPONENT BODY AND COATING FOR SEMICONDUCTOR PROC...

ATOMIC LAYER DEPOSITION COATED POWDER COATING FOR PROCESSING CHAMBE...

COMPONENT WITH PROTECTIVE SURFACE FOR PROCESSING CHAMBER

SINGLE CRYSTAL METAL OXIDE PLASMA CHAMBER COMPONENT

METHOD FOR CONDITIONING A PLASMA PROCESSING CHAMBER

SURFACE COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

METHOD FOR CONDITIONING A CERAMIC COATING

DETERMINING AND CONTROLLING SUBSTRATE TEMPERATURE DURING SUBSTRATE...

MATCHED TCR JOULE HEATER DESIGNS FOR ELECTROSTATIC CHUCKS

REFLECTOMETER TO MONITOR SUBSTRATE MOVEMENT

TWO-STAGE PIN LIFTER FOR DE-CHUCK OPERATIONS

CERAMIC BASEPLATE WITH CHANNELS HAVING NON-SQUARE CORNERS

PERMANENT SECONDARY EROSION CONTAINMENT FOR ELECTROSTATIC CHUCK BONDS

SUBSTRATE PROCESSING SYSTEM PRINTED-CIRCUIT CONTROL BOARD ASSEMBLY...

Substrate Holder Having Integrated Temperature Measurement Electric...

POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS

SURFACE COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

REDUCING TEMPERATURE TRANSITION IN A SUBSTRATE SUPPORT

SYSTEM AND METHOD FOR SUBSTRATE SUPPORT FEED-FORWARD TEMPERATURE CO...

ESC CERAMIC SIDEWALL MODIFICATION FOR PARTICLE AND METALS PERFORMAN...

METHOD FOR REDUCING TEMPERATURE TRANSITION IN AN ELECTROSTATIC CHUCK

PERMANENT SECONDARY EROSION CONTAINMENT FOR ELECTROSTATIC CHUCK BONDS

LAMINATED HEATER WITH DIFFERENT HEATER TRACE MATERIALS

CONNECTIONS BETWEEN LAMINATED HEATER AND HEATER VOLTAGE INPUTS

METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSE...