Eric Georgelis

Person

Canton, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Inductively-coupled toroidal plasma source
- Patent number 7,541,558
- Issue date Jun 2, 2009
- MKS Instruments, Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inductively-coupled torodial plasma source
- Patent number 7,166,816
- Issue date Jan 23, 2007
- MKS Instruments, Inc.
- Xing Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Toroidal low-field reactive gas source
- Patent number 7,161,112
- Issue date Jan 9, 2007
- MKS Instruments, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inductively-coupled toroidal plasma source
- Patent number 6,815,633
- Issue date Nov 9, 2004
- Applied Science and Technology, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal low-field reactive gas source
- Patent number 6,664,497
- Issue date Dec 16, 2003
- Applied Science and Technology, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal low-field reactive gas source
- Patent number 6,559,408
- Issue date May 6, 2003
- Applied Science and Technology, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal low-field reactive gas source
- Patent number 6,552,296
- Issue date Apr 22, 2003
- Applied Science and Technology, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal low-field reactive gas source
- Patent number 6,486,431
- Issue date Nov 26, 2002
- Applied Science and Technology, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal low-field reactive gas source
- Patent number 6,388,226
- Issue date May 14, 2002
- Applied Science and Technology, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Toroidal low-field reactive gas source
- Patent number 6,150,628
- Issue date Nov 21, 2000
- Applied Science and Technology, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma applicator with a helical fluid cooling channel su...
- Patent number 5,625,259
- Issue date Apr 29, 1997
- Applied Science & Technology, Inc.
- William M. Holber
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fluid-cooled dielectric window for a plasma system
- Patent number 5,568,015
- Issue date Oct 22, 1996
- Applied Science & Technology, Inc.
- William M. Holber
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Inductively-coupled toroidal plasma source
- Publication number 20070145018
- Publication date Jun 28, 2007
- MKS Instruments, Inc.
- Donald K. Smith
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Toroidal low-field reactive gas source
- Publication number 20040079287
- Publication date Apr 29, 2004
- Applied Science & Technology, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal low-field reactive gas source
- Publication number 20020125225
- Publication date Sep 12, 2002
- Applied Science & Technology, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal low-field reactive gas source
- Publication number 20020125226
- Publication date Sep 12, 2002
- Applied Science & Technology, Inc.
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal low-field reactive gas source
- Publication number 20020046991
- Publication date Apr 25, 2002
- Donald K. Smith
- H01 - BASIC ELECTRIC ELEMENTS

Eric Georgelis

Person

Patents Grantslast 30 patents

Inductively-coupled toroidal plasma source

Inductively-coupled torodial plasma source

Toroidal low-field reactive gas source

Inductively-coupled toroidal plasma source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source

Microwave plasma applicator with a helical fluid cooling channel su...

Fluid-cooled dielectric window for a plasma system

Patents Applicationslast 30 patents

Inductively-coupled toroidal plasma source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source

Toroidal low-field reactive gas source