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Eric J. Bergman
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Kalispell, MT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for shielding features of a workpiece during el...
Patent number
11,987,897
Issue date
May 21, 2024
Applied Materials, Inc.
Eric J. Bergman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electroplating system
Patent number
11,982,008
Issue date
May 14, 2024
Applied Materials, Inc.
Paul R McHugh
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Nanotwin copper materials in semiconductor devices
Patent number
11,973,034
Issue date
Apr 30, 2024
Applied Materials, Inc.
Eric J. Bergman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Diffusion layers in metal interconnects
Patent number
11,901,225
Issue date
Feb 13, 2024
Applied Materials, Inc.
Eric J. Bergman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning components and methods in a plating system
Patent number
11,814,744
Issue date
Nov 14, 2023
Applied Materials, Inc.
Nolan Zimmerman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Fluid recovery in semiconductor processing
Patent number
11,788,200
Issue date
Oct 17, 2023
Applied Materials, Inc.
Sam Lee
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Methods of reducing or eliminating deposits after electrochemical p...
Patent number
11,697,888
Issue date
Jul 11, 2023
Applied Materials, Inc.
Eric J Bergman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Glass carrier cleaning using ozone
Patent number
11,673,830
Issue date
Jun 13, 2023
Applied Materials, Inc.
Eric J. Bergman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrochemical depositions of nanotwin copper materials
Patent number
11,634,830
Issue date
Apr 25, 2023
Applied Materials, Inc.
Jing Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrochemical depositions of ruthenium-containing materials
Patent number
11,629,423
Issue date
Apr 18, 2023
Applied Materials, Inc.
Eric J. Bergman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electroplating system
Patent number
11,578,422
Issue date
Feb 14, 2023
Applied Materials, Inc.
Paul R McHugh
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Methods of reducing or eliminating deposits after electrochemical p...
Patent number
11,371,159
Issue date
Jun 28, 2022
Applied Materials, Inc.
Eric J Bergman
B08 - CLEANING
Information
Patent Grant
Fluid recovery in semiconductor processing
Patent number
11,352,711
Issue date
Jun 7, 2022
Applied Materials, Inc.
Sam Lee
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Electroplating system
Patent number
11,268,208
Issue date
Mar 8, 2022
Applied Materials, Inc.
Paul R McHugh
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Cleaning components and methods in a plating system
Patent number
11,241,718
Issue date
Feb 8, 2022
Applied Materials, Inc.
Joseph Antony Jonathan
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Systems and methods for copper (I) suppression in electrochemical d...
Patent number
11,211,252
Issue date
Dec 28, 2021
Applied Materials, Inc.
Eric J. Bergman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drying high aspect ratio features
Patent number
10,971,354
Issue date
Apr 6, 2021
Applied Materials, Inc.
Eric J. Bergman
B08 - CLEANING
Information
Patent Grant
Controlled etch of nitride features
Patent number
10,840,104
Issue date
Nov 17, 2020
Applied Materials, Inc.
Eric J. Bergman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drying high aspect ratio features
Patent number
10,546,762
Issue date
Jan 28, 2020
Applied Materials, Inc.
Eric J. Bergman
B08 - CLEANING
Information
Patent Grant
Techniques for improved removal of sacrificial mask
Patent number
10,354,875
Issue date
Jul 16, 2019
Varian Semiconductor Equipment Associates, Inc.
Rajesh Prasad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive electric field shielding in an electroplating processor us...
Patent number
10,240,248
Issue date
Mar 26, 2019
Applied Materials, Inc.
Paul Van Valkenburg
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Removing photoresist from a wafer
Patent number
10,191,379
Issue date
Jan 29, 2019
Applied Materials, Inc.
Paul R. McHugh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods for chemical mechanical polishing (CMP) processing with ozone
Patent number
10,002,771
Issue date
Jun 19, 2018
Applied Materials, Inc.
Prayudi Lianto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer handling system
Patent number
8,028,978
Issue date
Oct 4, 2011
Semitool, Inc.
Gordon R. Nelson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process and apparatus for treating a workpiece with gases
Patent number
7,416,611
Issue date
Aug 26, 2008
Semitool, Inc.
Eric J. Bergman
B08 - CLEANING
Information
Patent Grant
Methods of thinning a silicon wafer using HF and ozone
Patent number
7,404,863
Issue date
Jul 29, 2008
Semitool, Inc.
Eric J. Bergman
B08 - CLEANING
Information
Patent Grant
System and methods for polishing a wafer
Patent number
7,378,355
Issue date
May 27, 2008
Semitool, Inc.
Eric J. Bergman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vapor phase etching MEMS devices
Patent number
7,279,431
Issue date
Oct 9, 2007
Semitool, Inc.
Eric J. Bergman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process and apparatus for treating a workpiece using ozone
Patent number
7,264,680
Issue date
Sep 4, 2007
Semitool, Inc.
Thomas Maximilia Gebhart
B08 - CLEANING
Information
Patent Grant
Processing a workpiece using water, a base, and ozone
Patent number
7,163,588
Issue date
Jan 16, 2007
Semitool, Inc.
Eric J. Bergman
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
ELECTROCHEMICAL DEPOSITIONS OF NANOTWIN COPPER MATERIALS
Publication number
20230272547
Publication date
Aug 31, 2023
Applied Materials, Inc.
Jing Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PARAMETER ADJUSTMENT MODEL FOR SEMICONDUCTOR PROCESSING CHAMBERS
Publication number
20230257900
Publication date
Aug 17, 2023
Applied Materials, Inc.
Eric J. Bergman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
WATER VAPOR PLASMA TO ENHANCE SURFACE HYDROPHILICITY
Publication number
20230100863
Publication date
Mar 30, 2023
Prayudi LIANTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIFFUSION LAYERS IN METAL INTERCONNECTS
Publication number
20230077737
Publication date
Mar 16, 2023
Applied Materials, Inc.
Eric J. Bergman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROCHEMICAL DEPOSITIONS OF NANOTWIN COPPER MATERIALS
Publication number
20230068074
Publication date
Mar 2, 2023
Applied Materials, Inc.
Jing Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ELECTROCHEMICAL DEPOSITIONS OF RUTHENIUM-CONTAINING MATERIALS
Publication number
20230066404
Publication date
Mar 2, 2023
Applied Materials, Inc.
Eric J. Bergman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NANOTWIN COPPER MATERIALS IN SEMICONDUCTOR DEVICES
Publication number
20230065426
Publication date
Mar 2, 2023
Applied Materials, Inc.
Eric J. Bergman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHODS OF REDUCING OR ELIMINATING DEPOSITS AFTER ELECTROCHEMICAL P...
Publication number
20220282394
Publication date
Sep 8, 2022
Applied Materials, Inc.
Eric J. Bergman
B08 - CLEANING
Information
Patent Application
FLUID RECOVERY IN SEMICONDUCTOR PROCESSING
Publication number
20220259756
Publication date
Aug 18, 2022
Applied Materials, Inc.
Sam Lee
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ELECTROPLATING SYSTEM
Publication number
20220145489
Publication date
May 12, 2022
Applied Materials, Inc.
Paul R McHugh
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
GLASS CARRIER CLEANING USING OZONE
Publication number
20220144699
Publication date
May 12, 2022
Applied Materials, Inc.
Eric J. Bergman
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Application
ELECTROPLATING SYSTEM
Publication number
20210348296
Publication date
Nov 11, 2021
Applied Materials, Inc.
Paul R McHugh
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
FLUID RECOVERY IN SEMICONDUCTOR PROCESSING
Publication number
20210017665
Publication date
Jan 21, 2021
Applied Materials, Inc.
Sam Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF REDUCING OR ELIMINATING DEPOSITS AFTER ELECTROCHEMICAL P...
Publication number
20200399779
Publication date
Dec 24, 2020
Applied Materials, Inc.
Eric J. Bergman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
CLEANING COMPONENTS AND METHODS IN A PLATING SYSTEM
Publication number
20190321861
Publication date
Oct 24, 2019
Applied Materials, Inc.
Joseph A. Jonathan
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING COMPONENTS AND METHODS IN A PLATING SYSTEM
Publication number
20190301049
Publication date
Oct 3, 2019
Applied Materials, Inc.
Nolan Zimmerman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SYSTEMS AND METHODS FOR COPPER (I) SUPPRESSION IN ELECTROCHEMICAL D...
Publication number
20190237335
Publication date
Aug 1, 2019
Applied Materials, Inc.
Eric J. Bergman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
TECHNIQUES FOR IMPROVED REMOVAL OF SACRIFICIAL MASK
Publication number
20190214255
Publication date
Jul 11, 2019
Varian Semiconductor Equipment Associates, Inc.
Rajesh Prasad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROLLED ETCH OF NITRIDE FEATURES
Publication number
20190019688
Publication date
Jan 17, 2019
Applied Materials, Inc.
Eric J. Bergman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRYING HIGH ASPECT RATIO FEATURES
Publication number
20180144954
Publication date
May 24, 2018
Applied Materials, Inc.
Eric J. Bergman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRYING HIGH ASPECT RATIO FEATURES
Publication number
20180019119
Publication date
Jan 18, 2018
Applied Materials Inc,
Eric J. Bergman
B08 - CLEANING
Information
Patent Application
REMOVING PHOTORESIST FROM A WAFER
Publication number
20170357158
Publication date
Dec 14, 2017
Applied Materials, Inc.
Paul R. McHugh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEMS AND METHODS FOR SHIELDING FEATURES OF A WORKPIECE DURING EL...
Publication number
20170191180
Publication date
Jul 6, 2017
Applied Materials, Inc.
Eric J. Bergman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ADAPTIVE ELECTRIC FIELD SHIELDING IN AN ELECTROPLATING PROCESSOR US...
Publication number
20170051423
Publication date
Feb 23, 2017
Applied Materials, Inc.
Paul Van Valkenburg
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHODS FOR INCREASING THE RATE OF ELECTROCHEMICAL DEPOSITION
Publication number
20160333492
Publication date
Nov 17, 2016
Applied Materials, Inc.
Eric J. Bergman
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
SELECTIVE SILICON NITRIDE ETCH
Publication number
20120289056
Publication date
Nov 15, 2012
Applied Materials, Inc.
Eric J. Bergman
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SYSTEMS AND METHODS FOR ETCHING SILICON NITRIDE
Publication number
20120015523
Publication date
Jan 19, 2012
Jerry Dustin LEONHARD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST REMOVING PROCESSOR AND METHODS
Publication number
20110217848
Publication date
Sep 8, 2011
Eric J. Bergman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR REMOVING PHOTORESIST
Publication number
20070227556
Publication date
Oct 4, 2007
Eric J. Bergman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR FORMING THIN OXIDE LAYERS ON SEMICONDUCTOR WAFERS
Publication number
20060177987
Publication date
Aug 10, 2006
Eric J. Bergman
B81 - MICRO-STRUCTURAL TECHNOLOGY