Erich Merz

Person

Essingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Positioning method for an optical arrangement of a projection illum...
- Patent number 8,810,934
- Issue date Aug 19, 2014
- Carl Zeiss SMT GmbH
- Karl-Eugen Aubele
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 8,514,371
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,961,294
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical assembly, projection exposure apparatus and projection obje...
- Patent number 7,768,721
- Issue date Aug 3, 2010
- Carl Zeiss SMT AG
- Jochen Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,710,542
- Issue date May 4, 2010
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging device
- Patent number 7,548,387
- Issue date Jun 16, 2009
- Carl Zeiss SMT AG
- Thorsten Rassel
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,304,717
- Issue date Dec 4, 2007
- Carl Zelss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system, especially a projection light facility for microlit...
- Patent number 6,388,823
- Issue date May 14, 2002
- Carl-Zeiss-Stiftung trading as Carl Zeiss
- Erwin Gaber
- G02 - OPTICS
Information Patent Grant
Optical system, in particular projection-illumination unit used in...
- Patent number 6,307,688
- Issue date Oct 23, 2001
- Carl-Zeiss-Stiftung
- Erich Merz
- G02 - OPTICS
Information Patent Grant
Optical imaging device, particularly an objective, with at least on...
- Patent number 6,191,898
- Issue date Feb 20, 2001
- Carl-Zeiss-Stiftung
- Michael Trunz
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
POSITIONING METHOD FOR AN OPTICAL ARRANGEMENT OF A PROJECTION ILLUM...
- Publication number 20110235005
- Publication date Sep 29, 2011
- Carl Zeiss SMT GMBH
- Karl-Eugen Aubele
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20110199597
- Publication date Aug 18, 2011
- Carl Zeiss SMT GMBH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20090040487
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND PROJECTION OBJE...
- Publication number 20080316621
- Publication date Dec 25, 2008
- Jochen Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE
- Publication number 20080174757
- Publication date Jul 24, 2008
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL IMAGING DEVICE
- Publication number 20060230413
- Publication date Oct 12, 2006
- Thorsten Rassel
- G02 - OPTICS
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure facility
- Publication number 20040263812
- Publication date Dec 30, 2004
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Positioning method for an optical arrangement of a projection illum...

Imaging device in a projection exposure facility

Imaging device in a projection exposure facility

Optical assembly, projection exposure apparatus and projection obje...

Imaging device in a projection exposure machine

Optical imaging device

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

Optical system, especially a projection light facility for microlit...

Optical system, in particular projection-illumination unit used in...

Optical imaging device, particularly an objective, with at least on...

Patents Applicationslast 30 patents

POSITIONING METHOD FOR AN OPTICAL ARRANGEMENT OF A PROJECTION ILLUM...

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

Imaging Device in a Projection Exposure Machine

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND PROJECTION OBJE...

IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE

OPTICAL IMAGING DEVICE

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility