1. Field of the Invention
The invention relates to an optical imaging device having at least one optical element which is provided with an outer frame, an inner ring in which the optical element is mounted, and a manipulator instrument having at least one actuator. The invention furthermore relates to a projection objective for microlithography.
2. Description of the Related Art
DE 199 01 295 A1 discloses an optical imaging device having an optical element, the optical element, e.g. a lens, being mounted in an inner ring which is connected to an outer frame by leaf springs and setting levers. A manipulator instrument for displacing the optical element is designed so that the articulations employed serve as a manipulator instrument with adjusting components between the inner ring and the outer frame. Adjusting screws engage on the adjusting components as actuators for displacing the optical element. Adjustment of the adjusting screws leads to a displacement of the inner ring relative to the outer frame.
DE 100 51 706 A1 furthermore discloses a device for mounting an optical element, the device being provided with an inner frame and an outer frame. The inner frame is connected to the outer frame by three solid-state articulations arranged distributed over the circumference, with actuators which can displace the inner frame engaging on the solid-state articulations.
These documents disclose that it is possible to induce forces and moments in the inner ring by direct linkage of the outer frame to the inner ring, although these can cause a deformation of the inner ring and therefore a deformation of the lens. Parasitic effects can therefore act on the lens, such as tilting, astigmatism and other higher-order deformations.
It is therefore an object of the present invention to improve an optical imaging device of the type mentioned in the introduction, so as to minimize deformations and parasitic effects such as tilting movements on an optical element to be manipulated.
The object is achieved according to the invention in that contactless linkage of the inner ring to the outer frame is provided in at least one degree of freedom by means of a support arranged between the inner ring and the outer frame, the manipulator instrument having at least one actuator, the setting forces and/or bearing forces of which act contactlessly on the inner ring, for mounting and/or positioning and/or manipulating the inner ring relative to the outer frame.
According to the invention there is no solid linkage of the inner ring to the outer frame in the at least one degree of freedom, but instead the inner ring is connected to the outer frame by “contactless” bearing. In the case of contactless linkage in six degrees of freedom, this achieves total decoupling of parasitic effects, for example tilting movements, with respect to deformations of the inner ring and tensions in the linkages. The inner ring is positioned contactlessly by at least one, and preferably two actuators. In this way, the movement of the inner ring can take place linearly in the intended direction without link mechanisms and without support.
In general, the aforementioned decoupling takes place along that degree of freedom or those degrees of freedom along which there is no solid linkage. The remaining degrees of freedom may be implemented by means of mechanical bearing devices, for example connecting the inner ring and the outer frame.
In a preferred refinement, the outer frame may be provided with mechanical end stops, so that the path of the inner ring can be limited.
Such an optical imaging device according to the invention may preferably be employed in the field of microlithography, in which case can optical imaging device according to the invention may be used for optical elements, for example lenses or mirrors, in projection exposure apparatus.
Further refinements of the invention are specified in the dependent claims.
Exemplary embodiments of the invention will be explained in principle below in more detail with the aid of drawings.
Two mechanical end stops 6, which delimit the possible displacement path of the inner ring 4, are fitted on the outer frame 1.
For contactless mounting of the inner ring 4 in the exemplary embodiment according to
The inner ring 4 is positioned contactlessly by actuators 8 applied radially on the outer frame 1, or by at least one actuator. The actuators or setting elements 8 may comprise magnets and/or electromagnets and/or air nozzles or be embodied as such. They are embodied as electromagnets according to the exemplary embodiment in
When air nozzles are used as actuators 8, air exit openings of the air nozzles being directed toward the inner ring 4, the inner ring 4 can be moved and positioned by setting up different gas or air pressures at the air exit openings.
Actuators which are based on the principle of electrostatics may furthermore be used.
The mounting by the bearing 5, preferably a gas bearing and/or magnetic bearing, may nevertheless be intended to introduce deformations into the optical element 2, in which case a corresponding deformation can be induced depending on the number of actuators 8. By anti-phase driving of respectively opposite actuators 8, for example, it is possible to introduce an intended astigmatism or even higher-order deformation into the optical element 2. A third-order deformation can be produced by using at least three actuators 8, for example, and an astigmatism can be produced by using at least four actuators 8.
Induction of a tilt of the optical element 2 may also be provided by such mounting, in which case the bearing 5 should be divided into two or more bearing segments arranged at the circumferential region between the inner ring 4 and the outer frame 1, which likewise should also have gas feed and gas discharge lines in the case of a gas bearing. By providing different pressures in the gas feed and gas discharge lines, and depending on the number of bearing segments, it is then possible to tilt the optical element 2 about one or more axes. Corresponding embodiments are possible by means of electromagnetic bearings, which will then be driven differently in order to tilt the optical element 2. The same applies to the other mounting options mentioned.
There are furthermore at least two sensors 10 on the manipulation instrument, which are fitted to the actuators 8 and measure the movement of the actuators 8 when positioning the inner ring 4 in the setting direction. The sensors 10 are designed as optical path length measurement systems. In
If so desired, the z position (optical axis) of the optical element 2 or the inner ring 4, represented by the arrow in
A particular advantage of mounting the inner ring 4 via a bearing 5 corresponding to the present invention, for example a gas bearing relative to the outer frame 1, is that all the components can be integrated into the manipulator instrument and it is therefore possible to achieve exact control of the movement of the optical element 2. With this optical imaging device 1a, it is furthermore possible to control the position of the inner ring 4 actively, which substantially increases the quality of the optical imaging device 1a.
The manipulator instrument for the optical element 2 makes it possible to obtain a very high-performance system and therefore extremely accurate positioning of the optical element 2. A preferred field of use of such an instrument relates to the manipulation of optical elements, such as lenses or mirrors, in microlithography.
Further embodiments of the invention can also be obtained by interchanging and/or combining features of individual embodiments, as described above or as found in the dependent claims.
Number | Date | Country | Kind |
---|---|---|---|
10 2005 015 627 | Apr 2005 | DE | national |
Number | Name | Date | Kind |
---|---|---|---|
4289403 | Allington | Sep 1981 | A |
4638471 | van Rosmalen | Jan 1987 | A |
5177640 | Grassens | Jan 1993 | A |
6031812 | Liou | Feb 2000 | A |
6552774 | Hase et al. | Apr 2003 | B2 |
6580570 | Becker et al. | Jun 2003 | B2 |
6825932 | Suzuki et al. | Nov 2004 | B2 |
7172918 | Arno | Feb 2007 | B2 |
7259836 | Ohishi | Aug 2007 | B2 |
20050002008 | De Weerdt et al. | Jan 2005 | A1 |
20050008269 | Akutsu et al. | Jan 2005 | A1 |
20060209278 | Kiuchi et al. | Sep 2006 | A1 |
Number | Date | Country |
---|---|---|
199 01 295 | Jul 2000 | DE |
100 51 706 | May 2002 | DE |
102 18 989 | Nov 2003 | DE |
2 713 292 | Jun 1995 | FR |
1-84636 | Jul 1989 | JP |
20000339715 | Dec 2000 | JP |
2001134967 | May 2001 | JP |
2001160224 | Jun 2001 | JP |
2001184684 | Jul 2001 | JP |
2002250341 | Sep 2002 | JP |
2003272614 | Jul 2003 | JP |
2003-272614 | Sep 2003 | JP |
2004-044801 | Feb 2004 | JP |
2004044801 | Feb 2004 | JP |
2004080877 | Mar 2004 | JP |
2004177885 | Jun 2004 | JP |
03092256 | Nov 2003 | WO |
2005006417 | Jan 2005 | WO |
Number | Date | Country | |
---|---|---|---|
20060230413 A1 | Oct 2006 | US |