Errol Antonio C. SANCHEZ

Person

Tracy, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature profile measurement and synchronized control on substra...
- Patent number 12,196,617
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Zuoming Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for cleaning high aspect ratio structures
- Patent number 12,170,196
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Schubert S. Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing monitoring
- Patent number 12,165,934
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Zuoming Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Method for epitaxially depositing a material on a substrate by flow...
- Patent number 12,091,749
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injector for epitaxy and CVD chamber
- Patent number 12,018,372
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure and material engineering methods for optoelectronic devic...
- Patent number 12,015,042
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Papo Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicide film nucleation
- Patent number 11,901,182
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Xuebin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for foreline deposition diagnostics and control
- Patent number 11,860,973
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Ala Moradian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 11,821,088
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods, systems, and apparatus for conducting a calibration operat...
- Patent number 11,733,081
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Bindusagar Marath Sankarathodi
- G01 - MEASURING TESTING
Information Patent Grant
Method for forming silicon-phosphorous materials
- Patent number 11,649,560
- Issue date May 16, 2023
- Applied Materials, Inc.
- Errol Antonio C Sanchez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for semiconductor processing
- Patent number 11,482,432
- Issue date Oct 25, 2022
- Applied Materials, Inc.
- Errol Antonio C. Sanchez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stacked pixel structure formed using epitaxy
- Patent number 11,411,039
- Issue date Aug 9, 2022
- Applied Materials, Inc.
- Papo Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three color light sources integrated on a single wafer
- Patent number 11,322,649
- Issue date May 3, 2022
- Applied Materials, Inc.
- Michael Chudzik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diode laser for wafer heating for EPI processes
- Patent number 11,171,023
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Schubert S. Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 11,164,737
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Horizontal gate all around and FinFET device isolation
- Patent number 11,145,761
- Issue date Oct 12, 2021
- Applied Materials, Inc.
- Shiyu Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicide film nucleation
- Patent number 11,081,358
- Issue date Aug 3, 2021
- Applied Materials, Inc.
- Xuebin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Epitaxy system integrated with high selectivity oxide removal and h...
- Patent number 11,049,719
- Issue date Jun 29, 2021
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
In-situ integrated chambers
- Patent number 11,037,838
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Xuebin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of growing doped group IV materials
- Patent number 11,031,241
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Yi-Chiau Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone spot heating in epi
- Patent number 11,021,795
- Issue date Jun 1, 2021
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Susceptor support
- Patent number 10,837,121
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Richard O. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EPI thickness tuning by pulse or profile spot heating
- Patent number 10,770,319
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Shu-Kwan Danny Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Light pipe window structure for low pressure thermal processes
- Patent number 10,727,093
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Paul Brillhart
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Susceptor design to eliminate deposition valleys in the wafer
- Patent number 10,519,547
- Issue date Dec 31, 2019
- Applied Materials, Inc.
- Karthik Ramanathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Horizontal gate all around and FinFET device isolation
- Patent number 10,490,666
- Issue date Nov 26, 2019
- Applied Materials, Inc.
- Shiyu Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Upper dome with injection assembly
- Patent number 10,458,040
- Issue date Oct 29, 2019
- Applied Materials, Inc.
- Paul Brillhart
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...
- Publication number 20250118576
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Chen-Ying WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MONITORING
- Publication number 20250096045
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...
- Publication number 20250087485
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Chen-Ying WU
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20250066918
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER GAS FLOW IMPROVEMENT
- Publication number 20250018415
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Errol Antonio C. SANCHEZ
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
GAS INJECTOR FOR EPITAXY AND CVD CHAMBER
- Publication number 20240337020
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...
- Publication number 20240254655
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...
- Publication number 20240141498
- Publication date May 2, 2024
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20240044004
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240021444
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Manjunath SUBBANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...
- Publication number 20240018688
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Errol Antonio C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERAT...
- Publication number 20230366715
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Bindusagar MARATH SANKARATHODI
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR FORMING SILICON-PHOSPHOROUS MATERIALS
- Publication number 20230243068
- Publication date Aug 3, 2023
- Applied Materials, Inc.
- Errol Antonio C Sanchez
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS AND SYSTEMS FOR CLEANING HIGH ASPECT RATIO STRUCTURES
- Publication number 20230170228
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE LAMP HEATING AND TEMPERATURE MONITORING IN EPITAXY PROCE...
- Publication number 20220367216
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PORT EXHAUST SYSTEM FOR EPITAXIAL DEPOSITION CHAMBER
- Publication number 20220364229
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR FOR EPITAXY AND CVD CHAMBER
- Publication number 20220364231
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERAT...
- Publication number 20220326061
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Bindusagar MARATH SANKARATHODI
- G01 - MEASURING TESTING
Information Patent Application
METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY
- Publication number 20220283029
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20220155148
- Publication date May 19, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE COLOR LIGHT SOURCES INTEGRATED ON A SINGLE WAFER
- Publication number 20220085238
- Publication date Mar 17, 2022
- Applied Materials, Inc.
- Michael Chudzik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20220059342
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICIDE FILM NUCLEATION
- Publication number 20220033970
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Xuebi LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STACKED PIXEL STRUCTURE FORMED USING EPITAXY
- Publication number 20210366976
- Publication date Nov 25, 2021
- Applied Materials, Inc.
- Papo CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20210285105
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
STRUCTURE & MATERIAL ENGINEERING METHODS FOR OPTOELECTRONIC DEVICES...
- Publication number 20210265416
- Publication date Aug 26, 2021
- Applied Materials, Inc.
- Papo CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MONITORING
- Publication number 20210028075
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING
- Publication number 20210005478
- Publication date Jan 7, 2021
- Applied Materials, Inc.
- Errol Antonio C. Sanchez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SILICON-PHOSPHOROUS MATERIALS
- Publication number 20200399784
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Errol Antonio C Sanchez
- C30 - CRYSTAL GROWTH

Errol Antonio C. SANCHEZ

Person

Patents Grantslast 30 patents

Temperature profile measurement and synchronized control on substra...

Methods and systems for cleaning high aspect ratio structures

Multi zone spot heating in EPI

Substrate processing monitoring

Integrated epitaxy and preclean system

Method for epitaxially depositing a material on a substrate by flow...

Gas injector for epitaxy and CVD chamber

Structure and material engineering methods for optoelectronic devic...

Silicide film nucleation

Method and system for foreline deposition diagnostics and control

Multi zone spot heating in EPI

Methods, systems, and apparatus for conducting a calibration operat...

Method for forming silicon-phosphorous materials

Method and apparatus for semiconductor processing

Stacked pixel structure formed using epitaxy

Three color light sources integrated on a single wafer

Diode laser for wafer heating for EPI processes

Integrated epitaxy and preclean system

Horizontal gate all around and FinFET device isolation

Silicide film nucleation

Epitaxy system integrated with high selectivity oxide removal and h...

In-situ integrated chambers

Method of growing doped group IV materials

Multi zone spot heating in epi

Susceptor support

EPI thickness tuning by pulse or profile spot heating

Light pipe window structure for low pressure thermal processes

Susceptor design to eliminate deposition valleys in the wafer

Horizontal gate all around and FinFET device isolation

Upper dome with injection assembly

Patents Applicationslast 30 patents

CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...

SUBSTRATE PROCESSING MONITORING

APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...

MULTI ZONE SPOT HEATING IN EPI

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

PROCESS CHAMBER GAS FLOW IMPROVEMENT

GAS INJECTOR FOR EPITAXY AND CVD CHAMBER

EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...

METHODS OF CORRELATING ZONES OF PROCESSING CHAMBERS, AND RELATED SY...

MULTI ZONE SPOT HEATING IN EPI

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

BATCH PROCESSING APPARATUS, SYSTEMS, AND RELATED METHODS AND STRUCT...

METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERAT...

METHOD FOR FORMING SILICON-PHOSPHOROUS MATERIALS

METHODS AND SYSTEMS FOR CLEANING HIGH ASPECT RATIO STRUCTURES

MULTI-ZONE LAMP HEATING AND TEMPERATURE MONITORING IN EPITAXY PROCE...

MULTI-PORT EXHAUST SYSTEM FOR EPITAXIAL DEPOSITION CHAMBER

GAS INJECTOR FOR EPITAXY AND CVD CHAMBER

METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A CALIBRATION OPERAT...

METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

THREE COLOR LIGHT SOURCES INTEGRATED ON A SINGLE WAFER

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

SILICIDE FILM NUCLEATION

STACKED PIXEL STRUCTURE FORMED USING EPITAXY

MULTI ZONE SPOT HEATING IN EPI

STRUCTURE & MATERIAL ENGINEERING METHODS FOR OPTOELECTRONIC DEVICES...

SUBSTRATE PROCESSING MONITORING

METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING

METHOD FOR FORMING SILICON-PHOSPHOROUS MATERIALS