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Esther Jeng

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  • Los Altos, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Feature fill with nucleation inhibition
    • Patent number 11,901,227
    • Issue date Feb 13, 2024
    • Lam Research Corporation
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Tungsten feature fill with nucleation inhibition
    • Patent number 11,410,883
    • Issue date Aug 9, 2022
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Tungsten feature fill
    • Patent number 11,075,115
    • Issue date Jul 27, 2021
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Feature fill with nucleation inhibition
    • Patent number 10,580,695
    • Issue date Mar 3, 2020
    • Lam Research Corporation
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Tungsten feature fill with nucleation inhibition
    • Patent number 10,256,142
    • Issue date Apr 9, 2019
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Tungsten feature fill
    • Patent number 10,103,058
    • Issue date Oct 16, 2018
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Feature fill with nucleation inhibition
    • Patent number 9,997,405
    • Issue date Jun 12, 2018
    • Lam Research Corporation
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Tungsten feature fill
    • Patent number 9,653,353
    • Issue date May 16, 2017
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Tungsten feature fill
    • Patent number 9,240,347
    • Issue date Jan 19, 2016
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Systems and methods for controlling etch selectivity of various mat...
    • Patent number 8,883,637
    • Issue date Nov 11, 2014
    • Novellus Systems, Inc.
    • Esther Jeng
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    LARGE GRAIN TUNGSTEN GROWTH IN FEATURES
    • Publication number 20250051908
    • Publication date Feb 13, 2025
    • LAM RESEARCH CORPORATION
    • Kevin Qiwen CHEN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20230041794
    • Publication date Feb 9, 2023
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20220102208
    • Publication date Mar 31, 2022
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20210327754
    • Publication date Oct 21, 2021
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20200185273
    • Publication date Jun 11, 2020
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20190206731
    • Publication date Jul 4, 2019
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20190019725
    • Publication date Jan 17, 2019
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20180277431
    • Publication date Sep 27, 2018
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20170278749
    • Publication date Sep 28, 2017
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20160190008
    • Publication date Jun 30, 2016
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20160093528
    • Publication date Mar 31, 2016
    • LAM RESEARCH CORPORATION
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20160071764
    • Publication date Mar 10, 2016
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20150056803
    • Publication date Feb 26, 2015
    • Novellus Systems, Inc.
    • Anand Chandrashekar
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FEATURE FILL
    • Publication number 20130302980
    • Publication date Nov 14, 2013
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
    • Publication number 20130171822
    • Publication date Jul 4, 2013
    • Anand Chandrashekar
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEMS AND METHODS FOR CONTROLLING ETCH SELECTIVITY OF VARIOUS MAT...
    • Publication number 20130005140
    • Publication date Jan 3, 2013
    • Novellus Systems, Inc.
    • Esther Jeng
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...