Eswaranand Venkatasubramanian

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming a diamond film
- Patent number 12,037,679
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
In situ nucleation for nanocrystalline diamond film deposition
- Patent number 11,946,134
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Sze Chieh Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tribological properties of diamond films
- Patent number 11,894,230
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density carbon films for patterning applications
- Patent number 11,842,897
- Issue date Dec 12, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carbon hard masks for patterning applications and methods related t...
- Patent number 11,784,042
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High bias deposition of high quality gapfill
- Patent number 11,676,858
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Samuel E. Gottheim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multicolor approach to DRAM STI active cut patterning
- Patent number 11,638,374
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Tejinder Singh
Information Patent Grant
Doped and undoped vanadium oxides for low-k spacer applications
- Patent number 11,621,160
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulsed plasma (DC/RF) deposition of high quality C films for patter...
- Patent number 11,603,591
- Issue date Mar 14, 2023
- Applied Materials Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tribological properties of diamond films
- Patent number 11,594,416
- Issue date Feb 28, 2023
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic housing systems
- Patent number 11,587,764
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber
- Patent number 11,560,626
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Timothy Joseph Franklin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tuneable uniformity control utilizing rotational magnetic housing
- Patent number 11,557,466
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Samuel E. Gottheim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ high power implant to relieve stress of a thin film
- Patent number 11,557,478
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon hard masks for patterning applications and methods related t...
- Patent number 11,469,097
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature high-quality dielectric films
- Patent number 11,430,655
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diamond-like carbon film
- Patent number 11,332,376
- Issue date May 17, 2022
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multicolor approach to DRAM STI active cut patterning
- Patent number 11,335,690
- Issue date May 17, 2022
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulating film properties by optimizing plasma coupling materials
- Patent number 11,270,905
- Issue date Mar 8, 2022
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ high power implant to relieve stress of a thin film
- Patent number 11,158,507
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doped and undoped vanadium oxides for low-k spacer applications
- Patent number 11,094,533
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High bias deposition of high quality gapfill
- Patent number 11,062,939
- Issue date Jul 13, 2021
- Applied Materials, Inc.
- Samuel E. Gottheim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma deposition of carbon hardmask
- Patent number 11,043,375
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Yang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-density low temperature carbon films for hardmask and other pa...
- Patent number 11,043,372
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom-up gap-fill by surface poisoning treatment
- Patent number 11,028,477
- Issue date Jun 8, 2021
- Applied Materials, Inc.
- Mark Saly
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond-like carbon as mandrel
- Patent number 10,954,129
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Takehito Koshizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multicolor approach to DRAM STI active cut patterning
- Patent number 10,910,381
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature high-quality dielectric films
- Patent number 10,840,088
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diamond-like carbon film
- Patent number 10,745,282
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thick tungsten hardmask films deposition on high compressive/tensil...
- Patent number 10,504,727
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Jiarui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DIAMOND-LIKE CARBON GAP FILL
- Publication number 20250046599
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Jialiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED DIAMOND-LIKE CARBON
- Publication number 20250046610
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Jialiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NEUTRAL STRESS DIAMOND-LIKE CARBON
- Publication number 20250046611
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Jialiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
- Publication number 20240387174
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Guangyan Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
- Publication number 20240387190
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Guangyan Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE ETCHING OF SILICON-CONTAINING MATERIAL RELATIVE TO METAL-...
- Publication number 20240266185
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Han Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU NUCLEATION FOR NANOCRYSTALLINE DIAMOND FILM DEPOSITION
- Publication number 20240229231
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Sze Chieh Tan
- B82 - NANO-TECHNOLOGY
Information Patent Application
SACRIFICIAL LAYER FOR FORMING MERGED HIGH ASPECT RATIO CONTACTS IN...
- Publication number 20240090213
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Jialiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS
- Publication number 20240087894
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING THERMALLY STABLE CARBON FILM
- Publication number 20230335402
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A DIAMOND FILM
- Publication number 20230279540
- Publication date Sep 7, 2023
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO REDUCE UNCD FILM ROUGHNESS
- Publication number 20230260800
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...
- Publication number 20230220551
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR-PHASE PRECURSOR SEEDING FOR DIAMOND FILM DEPOSITION
- Publication number 20230175120
- Publication date Jun 8, 2023
- Applied Materials, Inc.
- Sze Chieh Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIBOLOGICAL PROPERTIES OF DIAMOND FILMS
- Publication number 20230170217
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC HOUSING SYSTEMS
- Publication number 20230154726
- Publication date May 18, 2023
- Applied Materials, Inc.
- Srinivas GANDIKOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING
- Publication number 20230139431
- Publication date May 4, 2023
- Applied Materials, Inc.
- Samuel E. GOTTHEIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON HARD MASKS FOR PATTERNING APPLICATIONS AND METHODS RELATED T...
- Publication number 20230021761
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multicolor Approach To DRAM STI Active Cut Patterning
- Publication number 20220238531
- Publication date Jul 28, 2022
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Depositing Low Roughness Diamond Films
- Publication number 20220127721
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIBOLOGICAL PROPERTIES OF DIAMOND FILMS
- Publication number 20220068643
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Vicknesh Sahmuganathan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU HIGH POWER IMPLANT TO RELIEVE STRESS OF A THIN FILM
- Publication number 20220037154
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PRODUCING HIGH-DENSITY DOPED-CARBON FILMS FOR HARDMASK...
- Publication number 20210407801
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CLEANING METHODS FOR PROCESSING CHAMBERS
- Publication number 20210384015
- Publication date Dec 9, 2021
- Applied Materials, Inc.
- Huiyuan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doped And Undoped Vanadium Oxides For Low-K Spacer Applications
- Publication number 20210358744
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Bias Deposition of High Quality Gapfill
- Publication number 20210327752
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Samuel E. Gottheim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multicolor Approach To DRAM STI Active Cut Patterning
- Publication number 20210134807
- Publication date May 6, 2021
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING
- Publication number 20210050189
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Samuel E. GOTTHEIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low Temperature High-Quality Dielectric Films
- Publication number 20210043450
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Eswaranand Venkatasubramanian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...
- Publication number 20210040618
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Eswaranand VENKATASUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Eswaranand Venkatasubramanian

Person

Patents Grantslast 30 patents

Method of forming a diamond film

In situ nucleation for nanocrystalline diamond film deposition

Tribological properties of diamond films

High density carbon films for patterning applications

Carbon hard masks for patterning applications and methods related t...

High bias deposition of high quality gapfill

Multicolor approach to DRAM STI active cut patterning

Doped and undoped vanadium oxides for low-k spacer applications

Pulsed plasma (DC/RF) deposition of high quality C films for patter...

Tribological properties of diamond films

Magnetic housing systems

Substrate processing chamber

Tuneable uniformity control utilizing rotational magnetic housing

In-situ high power implant to relieve stress of a thin film

Carbon hard masks for patterning applications and methods related t...

Low temperature high-quality dielectric films

Diamond-like carbon film

Multicolor approach to DRAM STI active cut patterning

Modulating film properties by optimizing plasma coupling materials

In-situ high power implant to relieve stress of a thin film

Doped and undoped vanadium oxides for low-k spacer applications

High bias deposition of high quality gapfill

Plasma deposition of carbon hardmask

High-density low temperature carbon films for hardmask and other pa...

Bottom-up gap-fill by surface poisoning treatment

Diamond-like carbon as mandrel

Multicolor approach to DRAM STI active cut patterning

Low temperature high-quality dielectric films

Diamond-like carbon film

Thick tungsten hardmask films deposition on high compressive/tensil...

Patents Applicationslast 30 patents

DIAMOND-LIKE CARBON GAP FILL

DOPED DIAMOND-LIKE CARBON

NEUTRAL STRESS DIAMOND-LIKE CARBON

FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...

FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...

SELECTIVE ETCHING OF SILICON-CONTAINING MATERIAL RELATIVE TO METAL-...

IN SITU NUCLEATION FOR NANOCRYSTALLINE DIAMOND FILM DEPOSITION

SACRIFICIAL LAYER FOR FORMING MERGED HIGH ASPECT RATIO CONTACTS IN...

HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS

METHODS OF FORMING THERMALLY STABLE CARBON FILM

METHOD OF FORMING A DIAMOND FILM

METHODS TO REDUCE UNCD FILM ROUGHNESS

PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...

VAPOR-PHASE PRECURSOR SEEDING FOR DIAMOND FILM DEPOSITION

TRIBOLOGICAL PROPERTIES OF DIAMOND FILMS

MAGNETIC HOUSING SYSTEMS

TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING

CARBON HARD MASKS FOR PATTERNING APPLICATIONS AND METHODS RELATED T...

Multicolor Approach To DRAM STI Active Cut Patterning

Depositing Low Roughness Diamond Films

TRIBOLOGICAL PROPERTIES OF DIAMOND FILMS

IN-SITU HIGH POWER IMPLANT TO RELIEVE STRESS OF A THIN FILM

METHODS FOR PRODUCING HIGH-DENSITY DOPED-CARBON FILMS FOR HARDMASK...

PLASMA CLEANING METHODS FOR PROCESSING CHAMBERS

Doped And Undoped Vanadium Oxides For Low-K Spacer Applications

High Bias Deposition of High Quality Gapfill

Multicolor Approach To DRAM STI Active Cut Patterning

TUNEABLE UNIFORMITY CONTROL UTILIZING ROTATIONAL MAGNETIC HOUSING

Low Temperature High-Quality Dielectric Films

PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...