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Etsurou Morita
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer surface measuring apparatus
Patent number
8,284,395
Issue date
Oct 9, 2012
Sumco Corporation
Eiji Kamiyama
G01 - MEASURING TESTING
Information
Patent Grant
Method of manufacturing semiconductor wafer by forming a strain rel...
Patent number
8,110,486
Issue date
Feb 7, 2012
Sumco Corporation
Koji Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing bonded wafer
Patent number
8,048,769
Issue date
Nov 1, 2011
Sumco Corporation
Nobuyuki Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of controlling film thinning of semiconductor wafer for soli...
Patent number
7,960,225
Issue date
Jun 14, 2011
Sumco Corporation
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer and method of producing the same
Patent number
7,951,716
Issue date
May 31, 2011
Sumco Corporation
Etsurou Morita
B24 - GRINDING POLISHING
Information
Patent Grant
Method for manufacturing direct bonded SOI wafer and direct bonded...
Patent number
7,855,129
Issue date
Dec 21, 2010
Sumco Corporation
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for regeneration of a layer transferred wafer and regenerat...
Patent number
7,829,436
Issue date
Nov 9, 2010
Sumco Corporation
Etsurou Morita
B24 - GRINDING POLISHING
Information
Patent Grant
Method for manufacturing direct bonded SOI wafer and direct bonded...
Patent number
7,781,309
Issue date
Aug 24, 2010
Sumco Corporation
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon-on insulator substrate and method for manufacturing the same
Patent number
7,736,998
Issue date
Jun 15, 2010
Sumco Corporation
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonded wafer and method of producing the same
Patent number
7,718,507
Issue date
May 18, 2010
Sumco Corporation
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing SOI substrate
Patent number
7,416,960
Issue date
Aug 26, 2008
Sumco Corporation
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing SOI substrate
Patent number
7,364,984
Issue date
Apr 29, 2008
Sumco Corporation
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing SOI substrate
Patent number
7,354,844
Issue date
Apr 8, 2008
Sumco Corporation
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF CONTROLLING FILM THINNING OF SEMICONDUCTOR WAFER FOR SOLI...
Publication number
20110136267
Publication date
Jun 9, 2011
SUMCO CORPORATION
Etsurou MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING DIRECT BONDED SOI WAFER AND DIRECT BONDED...
Publication number
20100219500
Publication date
Sep 2, 2010
SUMCO CORPORATION
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER SURFACE MEASURING APPARATUS
Publication number
20100201976
Publication date
Aug 12, 2010
SUMCO CORPORATION
Eiji KAMIYAMA
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR PRODUCING BONDED WAFER
Publication number
20100015779
Publication date
Jan 21, 2010
SUMCO CORPORATION
Nobuyuki Morimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Silicon-on Insulator Substrate and Method for manufacturing the Same
Publication number
20080063840
Publication date
Mar 13, 2008
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing SOI Substrate
Publication number
20080014716
Publication date
Jan 17, 2008
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing SOI Substrate
Publication number
20080014717
Publication date
Jan 17, 2008
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Bonded wafer and method of producing the same
Publication number
20070243694
Publication date
Oct 18, 2007
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wafer and method of producing the same
Publication number
20070197035
Publication date
Aug 23, 2007
SUMCO CORPORATION
Etsurou Morita
B24 - GRINDING POLISHING
Information
Patent Application
Method of producing semiconductor wafer
Publication number
20070166929
Publication date
Jul 19, 2007
SUMCO CORPORATION
Koji Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Manufacturing Direct Bonded SOI Wafer and Direct Bonded...
Publication number
20070148912
Publication date
Jun 28, 2007
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for Regeneration of a Layer Transferred Wafer and Regenerat...
Publication number
20070148914
Publication date
Jun 28, 2007
Etsurou Morita
B24 - GRINDING POLISHING
Information
Patent Application
Process for Regeneration of a Layer Transferred Wafer and Regenerat...
Publication number
20070148917
Publication date
Jun 28, 2007
SUMCO CORPORATION
Etsurou Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for manufacturing SOI substrate
Publication number
20060177993
Publication date
Aug 10, 2006
Akihiko Endo
H01 - BASIC ELECTRIC ELEMENTS