Eugen Foca

Person

Lauchheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Automated root cause analysis for defect detection during fabricati...
- Patent number 12,045,969
- Issue date Jul 23, 2024
- Carl Zeiss SMT GmbH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for measuring a sample and microscope implementing the method
- Patent number 11,915,908
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system, method of operating a charged particl...
- Patent number 11,810,749
- Issue date Nov 7, 2023
- Carl Zeiss SMT GmbH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and devices for determining metrology sites
- Patent number 11,436,506
- Issue date Sep 6, 2022
- Carl Zeiss SMT GmbH
- Abhilash Srikantha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Vacuum system, in particular EUV lithography system, and optical el...
- Patent number 10,599,052
- Issue date Mar 24, 2020
- Carl Zeiss SMT GmbH
- Matthias Roos
- B08 - CLEANING
Information Patent Grant
Projection exposure apparatus and method for measuring a projection...
- Patent number 10,585,356
- Issue date Mar 10, 2020
- Carl Zeiss SMT GmbH
- Eugen Foca
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vacuum system, in particular EUV lithography system, and optical el...
- Patent number 10,241,421
- Issue date Mar 26, 2019
- Carl Zeiss SMT GmbH
- Matthias Roos
- B08 - CLEANING
Information Patent Grant
Vacuum linear feed-through and vacuum system having said vacuum lin...
- Patent number 9,952,519
- Issue date Apr 24, 2018
- Carl Zeiss SMT GmbH
- Matthias Roos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...
- Publication number 20240328970
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G01 - MEASURING TESTING
Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY
- Publication number 20240331179
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
- Publication number 20240311698
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Alexander Freytag
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON MICROSCOPE FOR EXAMINING A SPECIMEN
- Publication number 20240302304
- Publication date Sep 12, 2024
- Carl Zeiss SMT GMBH
- Moritz Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
- Publication number 20240281952
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...
- Publication number 20240038482
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARAMETERIZING X-RAY SCATTERING MEASUREMENT USING SLICE-AND-IMAGE T...
- Publication number 20230343619
- Publication date Oct 26, 2023
- Carl Zeiss SMT GMBH
- Hans-Michael Stiepan
- G01 - MEASURING TESTING
Information Patent Application
TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SE...
- Publication number 20230267627
- Publication date Aug 24, 2023
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
- Publication number 20230196189
- Publication date Jun 22, 2023
- Carl Zeiss SMT GMBH
- Alexander Freytag
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...
- Publication number 20230178327
- Publication date Jun 8, 2023
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD
- Publication number 20230120847
- Publication date Apr 20, 2023
- Carl Zeiss SMT GMBH
- Eugen Foca
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER
- Publication number 20220392793
- Publication date Dec 8, 2022
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTACT AREA SIZE DETERMINATION BETWEEN 3D STRUCTURES IN AN INTEGRA...
- Publication number 20220230899
- Publication date Jul 21, 2022
- Carl Zeiss SMT GMBH
- Alex Buxbaum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIB-SEM 3D Tomography for measuring shape deviations of HAR structures
- Publication number 20220223445
- Publication date Jul 14, 2022
- Carl Zeiss SMT GMBH
- Amir Avishai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION...
- Publication number 20220138973
- Publication date May 5, 2022
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ROOT CAUSE ANALYSIS FOR FABRICATION PROCESSES OF SEMICONDUCTOR STRU...
- Publication number 20210097673
- Publication date Apr 1, 2021
- Carl Zeiss SMT GMBH
- Jens Timo Neumann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICES FOR DETERMINING METROLOGY SITES
- Publication number 20200285976
- Publication date Sep 10, 2020
- Carl Zeiss SMT GMBH
- Abhilash Srikantha
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VACUUM SYSTEM, IN PARTICULAR EUV LITHOGRAPHY SYSTEM, AND OPTICAL EL...
- Publication number 20190196344
- Publication date Jun 27, 2019
- Carl Zeiss SMT GMBH
- Matthias Roos
- B08 - CLEANING
Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING A PROJECTION...
- Publication number 20180373163
- Publication date Dec 27, 2018
- Carl Zeiss SMT GMBH
- Eugen FOCA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VACUUM LINEAR FEED-THROUGH AND VACUUM SYSTEM HAVING SAID VACUUM LIN...
- Publication number 20170212428
- Publication date Jul 27, 2017
- Carl Zeiss SMT GMBH
- Matthias Roos
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Vacuum System, in Particular EUV Lithography System, and Optical E...
- Publication number 20170168402
- Publication date Jun 15, 2017
- Carl Zeiss SMT GMBH
- Matthias Roos
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Automated root cause analysis for defect detection during fabricati...

Method for measuring a sample and microscope implementing the method

Charged particle beam system, method of operating a charged particl...

Method and devices for determining metrology sites

Vacuum system, in particular EUV lithography system, and optical el...

Projection exposure apparatus and method for measuring a projection...

Vacuum system, in particular EUV lithography system, and optical el...

Vacuum linear feed-through and vacuum system having said vacuum lin...

Patents Applicationslast 30 patents

METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY

MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...

ELECTRON MICROSCOPE FOR EXAMINING A SPECIMEN

3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...

CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...

PARAMETERIZING X-RAY SCATTERING MEASUREMENT USING SLICE-AND-IMAGE T...

TRANSFERRING ALIGNMENT INFORMATION IN 3D TOMOGRAPHY FROM A FIRST SE...

MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...

CHARGED PARTICLE BEAM SYSTEM, METHOD OF OPERATING A CHARGED PARTICL...

METHOD FOR MEASURING A SAMPLE AND MICROSCOPE IMPLEMENTING THE METHOD

METHODS OF CROSS-SECTION IMAGING OF AN INSPECTION VOLUME IN A WAFER

CONTACT AREA SIZE DETERMINATION BETWEEN 3D STRUCTURES IN AN INTEGRA...

FIB-SEM 3D Tomography for measuring shape deviations of HAR structures

CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION...

ROOT CAUSE ANALYSIS FOR FABRICATION PROCESSES OF SEMICONDUCTOR STRU...

METHOD AND DEVICES FOR DETERMINING METROLOGY SITES

VACUUM SYSTEM, IN PARTICULAR EUV LITHOGRAPHY SYSTEM, AND OPTICAL EL...

PROJECTION EXPOSURE APPARATUS AND METHOD FOR MEASURING A PROJECTION...

VACUUM LINEAR FEED-THROUGH AND VACUUM SYSTEM HAVING SAID VACUUM LIN...

Vacuum System, in Particular EUV Lithography System, and Optical E...