Eugene Smargiassi

Person

Tualatin, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatuses for reducing porogen accumulation from a UV-...
- Patent number 11,177,131
- Issue date Nov 16, 2021
- Novellus Systems, Inc.
- Lisa Marie Gytri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clean resistant windows for ultraviolet thermal processing
- Patent number 10,240,236
- Issue date Mar 26, 2019
- Lam Research Corporation
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purging of porogen from UV cure chamber
- Patent number 10,121,682
- Issue date Nov 6, 2018
- Novellus Systems, Inc.
- Eugene Smargiassi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for reducing porogen accumulation from a UV-cure chamber
- Patent number 10,020,197
- Issue date Jul 10, 2018
- Novellus Systems, Inc.
- Lisa Gytri
- B08 - CLEANING
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 9,873,946
- Issue date Jan 23, 2018
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purging of porogen from UV cure chamber
- Patent number 9,384,959
- Issue date Jul 5, 2016
- Novellus Systems, Inc.
- Eugene Smargiassi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatuses for reducing porogen accumulation from a UV-...
- Patent number 9,073,100
- Issue date Jul 7, 2015
- Novellus Systems, Inc.
- Lisa Gytri
- B08 - CLEANING
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,980,769
- Issue date Mar 17, 2015
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purging of porogen from UV cure chamber
- Patent number 8,734,663
- Issue date May 27, 2014
- Novellus Systems, Inc.
- Eugene Smargiassi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,629,068
- Issue date Jan 14, 2014
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purging of porogen from UV cure chamber
- Patent number 8,518,210
- Issue date Aug 27, 2013
- Novellus Systems, Inc.
- Eugene Smargiassi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,454,750
- Issue date Jun 4, 2013
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measuring in-situ UV intensity in UV cure tool
- Patent number 8,283,644
- Issue date Oct 9, 2012
- Novellus Systems, Inc.
- Eugene Smargiassi
- G01 - MEASURING TESTING
Information Patent Grant
Purging of porogen from UV cure chamber
- Patent number 8,282,768
- Issue date Oct 9, 2012
- Novellus Systems, Inc.
- Eugene Smargiassi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring in-situ UV intensity in UV cure tool
- Patent number 7,935,940
- Issue date May 3, 2011
- Novellus Systems, Inc.
- Eugene Smargiassi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
GROUPING FEATURES OF SHOWERHEADS IN SUBSTRATE PROCESSING SYSTEMS
- Publication number 20230166371
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- Rohit ODE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...
- Publication number 20180315604
- Publication date Nov 1, 2018
- Novellus Systems, Inc.
- Lisa Marie Gytri
- B08 - CLEANING
Information Patent Application
PURGING OF POROGEN FROM UV CURE CHAMBER
- Publication number 20160284574
- Publication date Sep 29, 2016
- Novellus Systems, Inc.
- Eugene Smargiassi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING
- Publication number 20160258057
- Publication date Sep 8, 2016
- LAM RESEARCH CORPORATION
- James Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...
- Publication number 20150255285
- Publication date Sep 10, 2015
- Novellus Systems, Inc.
- Lisa Gytri
- B08 - CLEANING
Information Patent Application
MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS
- Publication number 20150114292
- Publication date Apr 30, 2015
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PURGING OF POROGEN FROM UV CURE CHAMBER
- Publication number 20140230861
- Publication date Aug 21, 2014
- Novellus Systems, Inc.
- Eugene Smargiassi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS
- Publication number 20140080324
- Publication date Mar 20, 2014
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PURGING OF POROGEN FROM UV CURE CHAMBER
- Publication number 20130298940
- Publication date Nov 14, 2013
- Eugene Smargiassi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...
- Publication number 20130284087
- Publication date Oct 31, 2013
- Lisa Gytri
- B08 - CLEANING
Information Patent Application
PURGING OF POROGEN FROM UV CURE CHAMBER
- Publication number 20130160946
- Publication date Jun 27, 2013
- Novellus Systems, Inc.
- Eugene Smargiassi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING IN-SITU UV INTENSITY IN UV CURE TOOL
- Publication number 20120161021
- Publication date Jun 28, 2012
- Eugene Smargiassi
- G01 - MEASURING TESTING

Eugene Smargiassi

Person

Patents Grantslast 30 patents

Method and apparatuses for reducing porogen accumulation from a UV-...

Clean resistant windows for ultraviolet thermal processing

Purging of porogen from UV cure chamber

Method for reducing porogen accumulation from a UV-cure chamber

Multi-station sequential curing of dielectric films

Purging of porogen from UV cure chamber

Method and apparatuses for reducing porogen accumulation from a UV-...

Multi-station sequential curing of dielectric films

Purging of porogen from UV cure chamber

Multi-station sequential curing of dielectric films

Purging of porogen from UV cure chamber

Multi-station sequential curing of dielectric films

Measuring in-situ UV intensity in UV cure tool

Purging of porogen from UV cure chamber

Measuring in-situ UV intensity in UV cure tool

Patents Applicationslast 30 patents

GROUPING FEATURES OF SHOWERHEADS IN SUBSTRATE PROCESSING SYSTEMS

METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...

PURGING OF POROGEN FROM UV CURE CHAMBER

CLEAN RESISTANT WINDOWS FOR ULTRAVIOLET THERMAL PROCESSING

METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...

MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS

PURGING OF POROGEN FROM UV CURE CHAMBER

MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS

PURGING OF POROGEN FROM UV CURE CHAMBER

METHOD AND APPARATUSES FOR REDUCING POROGEN ACCUMULATION FROM A UV-...

PURGING OF POROGEN FROM UV CURE CHAMBER

MEASURING IN-SITU UV INTENSITY IN UV CURE TOOL