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Eui Kyoon Kim
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Campbell, CA, US
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last 30 patents
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Patent Grant
Systems for plasma enhanced chemical vapor deposition and bevel edg...
Patent number
8,197,636
Issue date
Jun 12, 2012
Applied Materials, Inc.
Ashish Shah
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SYSTEMS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AND BEVEL EDG...
Publication number
20120211164
Publication date
Aug 23, 2012
Applied Materials, Inc.
Ashish Shah
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE EDGE REGION
Publication number
20090017635
Publication date
Jan 15, 2009
APPLIED MATERIALS, INC.
Ashish Shah
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AND BEVEL EDG...
Publication number
20090014127
Publication date
Jan 15, 2009
APPLIED MATERIALS, INC.
Ashish Shah
H01 - BASIC ELECTRIC ELEMENTS