Evgenia KURGANOVA

Person

Nijmegen, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Pellicle and pellicle assembly
- Patent number 12,117,726
- Issue date Oct 15, 2024
- ASML Netherlands B.V.
- David Ferdinand Vles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a membrane assembly
- Patent number 12,072,620
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Pieter-Jan Van Zwol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metal-silicide-nitridation for stress reduction
- Patent number 11,971,654
- Issue date Apr 30, 2024
- ASML Netherlands B.V.
- Pieter-Jan Van Zwol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Simultaneous double-side coating of multilayer graphene pellicle by...
- Patent number 11,947,256
- Issue date Apr 2, 2024
- ASML Netherlands B.V.
- Evgenia Kurganova
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Pellicle and pellicle assembly
- Patent number 11,754,918
- Issue date Sep 12, 2023
- ASML Netherlands B.V.
- David Ferdinand Vles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metal-silicide-nitridation for stress reduction
- Patent number 11,686,997
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Pieter-Jan Van Zwol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Graphene pellicle lithographic apparatus
- Patent number 11,467,486
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Evgenia Kurganova
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metal-silicide-nitridation for stress reduction
- Patent number 11,287,737
- Issue date Mar 29, 2022
- ASML Netherlands B.V.
- Pieter-Jan Van Zwol
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pellicle and pellicle assembly
- Patent number 11,231,646
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- David Ferdinand Vles
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY
- Publication number 20240369920
- Publication date Nov 7, 2024
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION
- Publication number 20240302734
- Publication date Sep 12, 2024
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE AND PELLICLE ASSEMBLY
- Publication number 20240027893
- Publication date Jan 25, 2024
- ASML NETHERLANDS B.V.
- David Ferdinand VLES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
- Publication number 20230350301
- Publication date Nov 2, 2023
- ASML NETHERLANDS B.V.
- Evgenia KURGANOVA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION
- Publication number 20230324786
- Publication date Oct 12, 2023
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PERFORMING METROLOGY, METHOD OF TRAINING A MACHINE LEARNI...
- Publication number 20230280662
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Evgenia KURGANOVA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
- Publication number 20220213593
- Publication date Jul 7, 2022
- ASML NETHERLANDS B.V.
- Tamara DRUZHININA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION
- Publication number 20220187701
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PELLICLE AND PELLICLE ASSEMBLY
- Publication number 20220121111
- Publication date Apr 21, 2022
- ASML NETHERLANDS B.V.
- David Ferdinand VLES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY
- Publication number 20220035239
- Publication date Feb 3, 2022
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION
- Publication number 20210181618
- Publication date Jun 17, 2021
- ASML NETHERLANDS B.V.
- Pieter-Jan VAN ZWOL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
- Publication number 20210079519
- Publication date Mar 18, 2021
- ASML NETHERLANDS B.V.
- Pieter Willem Herman DE JAGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GRAPHENE PELLICLE LITHOGRAPHIC APPARATUS
- Publication number 20200406244
- Publication date Dec 31, 2020
- ASML NETHERLANDS B.V.
- Evgenia KURGANOVA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PELLICLE AND PELLICLE ASSEMBLY
- Publication number 20200209736
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- David Ferdinand VLES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SIMULTANEOUS DOUBLE-SIDE COATING OF MULTILAYER GRAPHENE PELLICLE BY...
- Publication number 20200159107
- Publication date May 21, 2020
- ASML NETHERLANDS B.V.
- Evgenia KURGANOVA
- B82 - NANO-TECHNOLOGY

Evgenia KURGANOVA

Person

Patents Grantslast 30 patents

Pellicle and pellicle assembly

Method of manufacturing a membrane assembly

Metal-silicide-nitridation for stress reduction

Simultaneous double-side coating of multilayer graphene pellicle by...

Pellicle and pellicle assembly

Metal-silicide-nitridation for stress reduction

Graphene pellicle lithographic apparatus

Metal-silicide-nitridation for stress reduction

Pellicle and pellicle assembly

Patents Applicationslast 30 patents

METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY

METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION

PELLICLE AND PELLICLE ASSEMBLY

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION

METHOD OF PERFORMING METROLOGY, METHOD OF TRAINING A MACHINE LEARNI...

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION

PELLICLE AND PELLICLE ASSEMBLY

METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY

METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

GRAPHENE PELLICLE LITHOGRAPHIC APPARATUS

PELLICLE AND PELLICLE ASSEMBLY

SIMULTANEOUS DOUBLE-SIDE COATING OF MULTILAYER GRAPHENE PELLICLE BY...