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Fajun Yang
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Macau, MO
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Patents Grants
last 30 patents
Information
Patent Grant
Cluster tool apparatus and a method of controlling a cluster tool a...
Patent number
10,643,873
Issue date
May 5, 2020
Macau University of Science and Technology
Naiqi Wu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Multi cluster tool system and a method of controlling a multi tool...
Patent number
10,520,914
Issue date
Dec 31, 2019
Macau University of Science and Technology
Naiqi Wu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Petri net-based optimal one-wafer cyclic scheduling of treelike hyb...
Patent number
10,073,444
Issue date
Sep 11, 2018
Macau University of Science and Technology
Naiqi Wu
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for scheduling single-arm cluster tools with wafer revisitin...
Patent number
9,223,307
Issue date
Dec 29, 2015
Macau University of Science and Technology
Naiqi Wu
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Patents Applications
last 30 patents
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Patent Application
MULTI CLUSTER TOOL SYSTEM AND A METHOD OF CONTROLLING A MULTI TOOL...
Publication number
20180081336
Publication date
Mar 22, 2018
Macau University of Science and Technology
Naiqi Wu
G05 - CONTROLLING REGULATING
Information
Patent Application
Petri Net-Based Optimal One-Wafer Cyclic Scheduling of Treelike Hyb...
Publication number
20170083009
Publication date
Mar 23, 2017
Macau University of Science and Technology
Naiqi Wu
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC