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Farhan Ahmad
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Sunnyvale, CA, US
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last 30 patents
Information
Patent Grant
Gas baffle and distributor for semiconductor processing chamber
Patent number
7,799,704
Issue date
Sep 21, 2010
Applied Materials, Inc.
Soonam Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gas baffle and distributor for semiconductor processing chamber
Patent number
7,740,706
Issue date
Jun 22, 2010
Applied Materials, Inc.
Soonam Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Gas Baffle and Distributor for Semiconductor Processing Chamber
Publication number
20090093129
Publication date
Apr 9, 2009
Applied Materials, Inc.
Soonam Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS BAFFLE AND DISTRIBUTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
Publication number
20080121179
Publication date
May 29, 2008
Applied Materials, Inc.
SOONAM PARK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS BAFFLE AND DISTRIBUTOR FOR SEMICONDUCTOR PROCESSING CHAMBER
Publication number
20080124944
Publication date
May 29, 2008
Applied Materials, Inc.
Soonam Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
In-situ process diagnostics of in-film aluminum during plasma depos...
Publication number
20080029484
Publication date
Feb 7, 2008
Applied Materials, Inc.
Soonam Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...