Faruk Gungor

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing chamber having heated showerhead assembly
- Patent number 11,598,003
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Faruk Gungor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for gas delivery in semiconductor process cham...
- Patent number 11,380,557
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Vincent Kirchhoff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number RE48994
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
Information Patent Grant
Remote hydrogen plasma titanium deposition to enhance selectivity a...
- Patent number 10,770,300
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Takashi Kuratomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote hydrogen plasma titanium deposition to enhance selectivity a...
- Patent number 10,418,246
- Issue date Sep 17, 2019
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition chamber with thermal lid
- Patent number 10,407,771
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- Anqing Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number RE47440
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
Information Patent Grant
Apparatus for sensing a level of a processing medium in a delivery...
- Patent number 10,175,093
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Faruk Gungor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of films comprising aluminum alloys with high aluminum c...
- Patent number 9,683,287
- Issue date Jun 20, 2017
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of N-metal films comprising aluminum alloys
- Patent number 9,145,612
- Issue date Sep 29, 2015
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number 9,109,754
- Issue date Aug 18, 2015
- Applied Materials, Inc.
- Joseph Yudovsky
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number 8,955,547
- Issue date Feb 17, 2015
- Applied Materials, Inc.
- Faruk Gungor
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS

Patents Applicationslast 30 patents

Information Patent Application
Remote Hydrogen Plasma Titanium Deposition to Enhance Selectivity a...
- Publication number 20200013627
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY
- Publication number 20190078210
- Publication date Mar 14, 2019
- FARUK GUNGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR GAS DELIVERY IN SEMICONDUCTOR PROCESS CHAM...
- Publication number 20180350627
- Publication date Dec 6, 2018
- Applied Materials, Inc.
- Vincent Kirchhoff
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Remote Hydrogen Plasma Titanium Deposition to Enhance Selectivity a...
- Publication number 20180122647
- Publication date May 3, 2018
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR SENSING A LEVEL OF A PROCESSING MEDIUM IN A DELIVERY...
- Publication number 20160363478
- Publication date Dec 15, 2016
- Applied Materials, Inc.
- Faruk GUNGOR
- G01 - MEASURING TESTING
Information Patent Application
ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID
- Publication number 20160097119
- Publication date Apr 7, 2016
- Applied Materials, Inc.
- ANQING CUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Of Films Comprising Aluminum Alloys With High Aluminum C...
- Publication number 20140112824
- Publication date Apr 24, 2014
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Of N-Metal Films Comprising Aluminum Alloys
- Publication number 20140017408
- Publication date Jan 16, 2014
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method for Providing Uniform Flow of Gas
- Publication number 20130263944
- Publication date Oct 10, 2013
- Faruk Gungor
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
Apparatus and Method for Providing Uniform Flow of Gas
- Publication number 20130098477
- Publication date Apr 25, 2013
- Joseph Yudovsky
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
Apparatus and Process for Atomic Layer Deposition
- Publication number 20120135609
- Publication date May 31, 2012
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DETERMINING THE QUANTITY OF PRECURSOR IN AN AMPOULE
- Publication number 20100305884
- Publication date Dec 2, 2010
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Faruk Gungor

Person

Patents Grantslast 30 patents

Substrate processing chamber having heated showerhead assembly

Apparatus and method for gas delivery in semiconductor process cham...

Apparatus and method for providing uniform flow of gas

Remote hydrogen plasma titanium deposition to enhance selectivity a...

Remote hydrogen plasma titanium deposition to enhance selectivity a...

Atomic layer deposition chamber with thermal lid

Apparatus and method for providing uniform flow of gas

Apparatus for sensing a level of a processing medium in a delivery...

Deposition of films comprising aluminum alloys with high aluminum c...

Deposition of N-metal films comprising aluminum alloys

Apparatus and method for providing uniform flow of gas

Apparatus and method for providing uniform flow of gas

Patents Applicationslast 30 patents

Remote Hydrogen Plasma Titanium Deposition to Enhance Selectivity a...

SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY

APPARATUS AND METHOD FOR GAS DELIVERY IN SEMICONDUCTOR PROCESS CHAM...

Remote Hydrogen Plasma Titanium Deposition to Enhance Selectivity a...

APPARATUS FOR SENSING A LEVEL OF A PROCESSING MEDIUM IN A DELIVERY...

ATOMIC LAYER DEPOSITION CHAMBER WITH THERMAL LID

Deposition Of Films Comprising Aluminum Alloys With High Aluminum C...

Deposition Of N-Metal Films Comprising Aluminum Alloys

Apparatus and Method for Providing Uniform Flow of Gas

Apparatus and Method for Providing Uniform Flow of Gas

Apparatus and Process for Atomic Layer Deposition

METHODS FOR DETERMINING THE QUANTITY OF PRECURSOR IN AN AMPOULE