Felix Beyeler

Person

Regensdorf, CH

People

Patents Grantslast 30 patents

Information Patent Grant
MEMS-based nanoindentation force sensor with electro-thermal tip he...
- Patent number 11,435,378
- Issue date Sep 6, 2022
- Femto Tools AG
- Felix Beyeler
- G01 - MEASURING TESTING
Information Patent Grant
MEMS nanoindenter chip with indenter probe and reference probe
- Patent number 11,307,125
- Issue date Apr 19, 2022
- FemtoTools AG
- David Beyeler
- G01 - MEASURING TESTING
Information Patent Grant
System for the combined, probe-based mechanical and electrical test...
- Patent number 9,575,093
- Issue date Feb 21, 2017
- FemtoTools AG
- Felix Beyeler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Interface of a microfabricated scanning force sensor for combined f...
- Patent number 9,535,086
- Issue date Jan 3, 2017
- FemtoTools AG
- Felix Beyeler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System for mechanical characterization of materials and biological...
- Patent number 9,046,548
- Issue date Jun 2, 2015
- Femtotools AG
- Felix Beyeler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sub-millinewton capacitive MEMS force sensor for mechanical testing...
- Patent number 8,984,966
- Issue date Mar 24, 2015
- Femtotools AG
- Felix Beyeler
- G01 - MEASURING TESTING
Information Patent Grant
Multi-axis capacitive transducer and manufacturing method for produ...
- Patent number 7,712,366
- Issue date May 11, 2010
- Eth Zuerich
- Felix Beyeler
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEMS-BASED NANOINDENTATION FORCE SENSOR WITH ELECTRO-THERMAL TIP HE...
- Publication number 20200249254
- Publication date Aug 6, 2020
- FEMTO TOOLS AG
- FELIX BEYELER
- G01 - MEASURING TESTING
Information Patent Application
MEMS NANOINDENTER CHIP WITH INDENTER PROBE AND REFERENCE PROBE
- Publication number 20190154556
- Publication date May 23, 2019
- FEMTOTOOLS AG
- DAVID BEYELER
- G01 - MEASURING TESTING
Information Patent Application
DESIGN AND INTERFACE OF A MICROFABRICATED SCANNING FORCE SENSOR FOR...
- Publication number 20150369839
- Publication date Dec 24, 2015
- FEMTOTOOLS AG
- FELIX BEYELER
- G01 - MEASURING TESTING
Information Patent Application
System for the Combined, Probe-Based Mechanical and Electrical Test...
- Publication number 20150204904
- Publication date Jul 23, 2015
- FEMTOTOOLS AG
- FELIX BEYELER
- G01 - MEASURING TESTING
Information Patent Application
Sub-Millinewton Capacitive Mems Force Sensor for Mechanical Testing...
- Publication number 20140230576
- Publication date Aug 21, 2014
- Femtotools AG
- Felix Beyeler
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR MECHANICAL CHARACTERIZATION OF MATERIALS AND BIOLOGICAL...
- Publication number 20120186365
- Publication date Jul 26, 2012
- FEMTOTOOLS GMBH
- Felix Beyeler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO FORCE SENSOR PACKAGE FOR SUB-MILLINEWTON ELECTROMECHANICAL ME...
- Publication number 20120018821
- Publication date Jan 26, 2012
- FEMTO TOOLS GMBH
- Felix Beyeler
- G01 - MEASURING TESTING
Information Patent Application
Multi-axis capacitive transducer and manufacturing method for produ...
- Publication number 20090007668
- Publication date Jan 8, 2009
- ETH ZUERICH
- Felix Beyeler
- G01 - MEASURING TESTING

Felix Beyeler

Person

Patents Grantslast 30 patents

MEMS-based nanoindentation force sensor with electro-thermal tip he...

MEMS nanoindenter chip with indenter probe and reference probe

System for the combined, probe-based mechanical and electrical test...

Interface of a microfabricated scanning force sensor for combined f...

System for mechanical characterization of materials and biological...

Sub-millinewton capacitive MEMS force sensor for mechanical testing...

Multi-axis capacitive transducer and manufacturing method for produ...

Patents Applicationslast 30 patents

MEMS-BASED NANOINDENTATION FORCE SENSOR WITH ELECTRO-THERMAL TIP HE...

MEMS NANOINDENTER CHIP WITH INDENTER PROBE AND REFERENCE PROBE

DESIGN AND INTERFACE OF A MICROFABRICATED SCANNING FORCE SENSOR FOR...

System for the Combined, Probe-Based Mechanical and Electrical Test...

Sub-Millinewton Capacitive Mems Force Sensor for Mechanical Testing...

SYSTEM FOR MECHANICAL CHARACTERIZATION OF MATERIALS AND BIOLOGICAL...

MICRO FORCE SENSOR PACKAGE FOR SUB-MILLINEWTON ELECTROMECHANICAL ME...

Multi-axis capacitive transducer and manufacturing method for produ...