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Felix Kozakevich
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
High speed synchronization of plasma source/bias power delivery
Patent number
11,935,726
Issue date
Mar 19, 2024
MKS Instruments, Inc.
Aaron T. Radomski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for cleaning an edge ring pocket
Patent number
11,935,730
Issue date
Mar 19, 2024
Lam Research Corporation
Eric Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for optimizing power delivery to an electrode o...
Patent number
11,908,660
Issue date
Feb 20, 2024
Lam Research Corporation
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic Chuck design for cooling-gas light-up prevention
Patent number
11,651,991
Issue date
May 16, 2023
Lam Research Corporation
Alexander Matyushkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for optimizing power delivery to an electrode o...
Patent number
11,335,539
Issue date
May 17, 2022
Lam Research Corporation
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for achieving a pre-determined factor associate...
Patent number
11,195,706
Issue date
Dec 7, 2021
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High speed synchronization of plasma source/bias power delivery
Patent number
11,158,488
Issue date
Oct 26, 2021
MKS Instruments, Inc.
Aaron T. Radomski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck with features for preventing electrical arcing...
Patent number
11,069,553
Issue date
Jul 20, 2021
Lam Research Corporation
Alexander Matyushkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck design for cooling-gas light-up prevention
Patent number
11,024,532
Issue date
Jun 1, 2021
Lam Research Corporation
Alexander Matyushkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Active control of radial etch uniformity
Patent number
10,916,409
Issue date
Feb 9, 2021
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Three or more states for achieving high aspect ratio dielectric etch
Patent number
10,861,708
Issue date
Dec 8, 2020
Lam Research Corporation
Takumi Yanagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for controlling directionality of ions in an ed...
Patent number
10,825,656
Issue date
Nov 3, 2020
Lam Research Corporation
Michael C. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for controlling directionality of ions in an ed...
Patent number
10,615,003
Issue date
Apr 7, 2020
Lam Research Corporation
Michael C. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Three or more states for achieving high aspect ratio dielectric etch
Patent number
10,504,744
Issue date
Dec 10, 2019
Lam Research Corporation
Takumi Yanagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi regime plasma wafer processing to increase directionality of...
Patent number
10,304,662
Issue date
May 28, 2019
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for achieving a pre-determined factor associate...
Patent number
10,283,330
Issue date
May 7, 2019
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for controlling directionality of ions in an ed...
Patent number
10,115,568
Issue date
Oct 30, 2018
Lam Research Corporation
Michael C. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Uniformity control circuit for use within an impedance matching cir...
Patent number
10,115,564
Issue date
Oct 30, 2018
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck design for cooling-gas light-up prevention
Patent number
10,083,853
Issue date
Sep 25, 2018
Lam Research Corporation
Alexander Matyushkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi regime plasma wafer processing to increase directionality of...
Patent number
10,002,746
Issue date
Jun 19, 2018
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impedance matching circuit for operation with a kilohertz RF genera...
Patent number
9,984,859
Issue date
May 29, 2018
Lam Research Corporation
Alexei Marakhtanov
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Systems and methods for controlling directionality of ions in an ed...
Patent number
9,852,889
Issue date
Dec 26, 2017
Lam Research Corporation
Michael C. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Uniformity control circuit for use within an impedance matching cir...
Patent number
9,761,414
Issue date
Sep 12, 2017
Lam Research Corporation
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impedance matching circuit for operation with a kilohertz RF genera...
Patent number
9,595,424
Issue date
Mar 14, 2017
Lam Research Corporation
Alexei Marakhtanov
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Plasma confinement rings having reduced polymer deposition characte...
Patent number
8,500,952
Issue date
Aug 6, 2013
Lam Research Corporation
Rajinder Dhindsa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Apparatus and method for controlling plasma density profile
Patent number
8,299,390
Issue date
Oct 30, 2012
Lam Research Corporation
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma confinement rings having reduced polymer deposition characte...
Patent number
8,262,922
Issue date
Sep 11, 2012
Lam Research Corporation
Rajinder Dhindsa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Selectivity control in a plasma processing system
Patent number
8,222,155
Issue date
Jul 17, 2012
Lam Research Corporation
Kenji Takeshita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck assembly with dielectric material and/or cavity...
Patent number
8,000,082
Issue date
Aug 16, 2011
Lam Research Corporation
Rajinder Dhindsa
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
High aspect ratio etch using modulation of RF powers of various fre...
Patent number
7,749,353
Issue date
Jul 6, 2010
Lam Research Corporation
Camelia Rusu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...
Publication number
20240186112
Publication date
Jun 6, 2024
LAM RESEARCH CORPORATION
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
Publication number
20240162015
Publication date
May 16, 2024
LAM RESEARCH CORPORATION
Michael C. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Use of Low Frequency Harmonics in Bias Radi...
Publication number
20230317414
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Extracting Process Control Information from...
Publication number
20230298857
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW FREQUENCY RF GENERATOR AND ASSOCIATED ELECTROSTATIC CHUCK
Publication number
20230274914
Publication date
Aug 31, 2023
LAM RESEARCH CORPORATION
Alexei M. Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH
Publication number
20230253184
Publication date
Aug 10, 2023
LAM RESEARCH CORPORATION
Alexei M. Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Radiofrequency Signal Generator-Based Contr...
Publication number
20230253185
Publication date
Aug 10, 2023
LAM RESEARCH CORPORATION
Bradford J. Lyndaker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC
Publication number
20230245874
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Alexei M. Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CONTROL FOR ION ENERGY DELIVERY USING MULTIPLE GENERATORS A...
Publication number
20230230804
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY
Publication number
20230215694
Publication date
Jul 6, 2023
LAM RESEARCH CORPORATION
Alexei M. Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF MAGNETIC FIELD SENSOR FOR HARMONIC MEASUREMENTS AND UNIFORMITY C...
Publication number
20230178337
Publication date
Jun 8, 2023
LAM RESEARCH CORPORATION
Felix Leib Kozakevich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MINIMIZING REFLECTED POWER IN A TUNABLE EDGE SHEATH SYSTEM
Publication number
20230102487
Publication date
Mar 30, 2023
LAM RESEARCH CORPORATION
David Hopkins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNING VOLTAGE SETPOINT IN A PULSED RF SIGNAL FOR A TUNABLE EDGE SH...
Publication number
20230092887
Publication date
Mar 23, 2023
LAM RESEARCH CORPORATION
David Hopkins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE MATCH WITH AN ELONGATED RF STRAP
Publication number
20230081542
Publication date
Mar 16, 2023
LAM RESEARCH CORPORATION
Felix Leib Kozakevich
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING
Publication number
20230075462
Publication date
Mar 9, 2023
LAM RESEARCH CORPORATION
Alexander MATYUSHKIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Radiofrequency Signal Filter Arrangement for Plasma Processing System
Publication number
20230054699
Publication date
Feb 23, 2023
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Optimization of Radiofrequency Signal Ground Return in Plasma Proce...
Publication number
20230059495
Publication date
Feb 23, 2023
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR USING BINNING TO INCREASE POWER DURING A LO...
Publication number
20230007885
Publication date
Jan 12, 2023
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET
Publication number
20220254616
Publication date
Aug 11, 2022
LAM RESEARCH CORPORATION
Eric Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...
Publication number
20220199366
Publication date
Jun 23, 2022
LAM RESEARCH CORPORATION
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High Speed Synchronization Of Plasma Source/Bias Power Delivery
Publication number
20220005674
Publication date
Jan 6, 2022
MKS Instruments, Inc.
Aaron T. RADOMSKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...
Publication number
20210319980
Publication date
Oct 14, 2021
LAM RESEARCH CORPORATION
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION
Publication number
20210296099
Publication date
Sep 23, 2021
LAM RESEARCH CORPORATION
Alexander Matyushkin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High Speed Synchronization Of Plasma Source/Bias Power Delivery
Publication number
20200411289
Publication date
Dec 31, 2020
MKS Instruments, Inc.
Aaron T. RADOMSKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ring Structures and Systems for Use in a Plasma Chamber
Publication number
20200365378
Publication date
Nov 19, 2020
LAM RESEARCH CORPORATION
Michael C. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems And Methods For Controlling Directionality Of Ions In An Ed...
Publication number
20200227238
Publication date
Jul 16, 2020
LAM RESEARCH CORPORATION
Michael C. Kellogg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THREE OR MORE STATES FOR ACHIEVING HIGH ASPECT RATIO DIELECTRIC ETCH
Publication number
20200090948
Publication date
Mar 19, 2020
LAM RESEARCH CORPORATION
Takumi Yanagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACTIVE CONTROL OF RADIAL ETCH UNIFORMITY
Publication number
20190385822
Publication date
Dec 19, 2019
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR ACHIEVING A PRE-DETERMINED FACTOR ASSOCIATE...
Publication number
20190244788
Publication date
Aug 8, 2019
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi Regime Plasma Wafer Processing to Increase Directionality of...
Publication number
20190080885
Publication date
Mar 14, 2019
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS