Felix Kozakevich

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for use of low frequency harmonics in bias radi...
- Patent number 12,308,211
- Issue date May 20, 2025
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for using binning to increase power during a lo...
- Patent number 12,266,505
- Issue date Apr 1, 2025
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process control for ion energy delivery using multiple generators a...
- Patent number 12,255,052
- Issue date Mar 18, 2025
- Lam Research Corporation
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tuning voltage setpoint in a pulsed RF signal for a tunable edge sh...
- Patent number 12,183,544
- Issue date Dec 31, 2024
- Lam Research Corporation
- David Hopkins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniformity control circuit for impedance match
- Patent number 12,165,844
- Issue date Dec 10, 2024
- Lam Research Corporation
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for extracting process control information from...
- Patent number 12,131,886
- Issue date Oct 29, 2024
- Lam Research Corporation
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impedance match with an elongated RF strap
- Patent number 12,080,518
- Issue date Sep 3, 2024
- Lam Research Corporation
- Felix Leib Kozakevich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High speed synchronization of plasma source/bias power delivery
- Patent number 11,935,726
- Issue date Mar 19, 2024
- MKS Instruments, Inc.
- Aaron T. Radomski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for cleaning an edge ring pocket
- Patent number 11,935,730
- Issue date Mar 19, 2024
- Lam Research Corporation
- Eric Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for optimizing power delivery to an electrode o...
- Patent number 11,908,660
- Issue date Feb 20, 2024
- Lam Research Corporation
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic Chuck design for cooling-gas light-up prevention
- Patent number 11,651,991
- Issue date May 16, 2023
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for optimizing power delivery to an electrode o...
- Patent number 11,335,539
- Issue date May 17, 2022
- Lam Research Corporation
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving a pre-determined factor associate...
- Patent number 11,195,706
- Issue date Dec 7, 2021
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High speed synchronization of plasma source/bias power delivery
- Patent number 11,158,488
- Issue date Oct 26, 2021
- MKS Instruments, Inc.
- Aaron T. Radomski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with features for preventing electrical arcing...
- Patent number 11,069,553
- Issue date Jul 20, 2021
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck design for cooling-gas light-up prevention
- Patent number 11,024,532
- Issue date Jun 1, 2021
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active control of radial etch uniformity
- Patent number 10,916,409
- Issue date Feb 9, 2021
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three or more states for achieving high aspect ratio dielectric etch
- Patent number 10,861,708
- Issue date Dec 8, 2020
- Lam Research Corporation
- Takumi Yanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 10,825,656
- Issue date Nov 3, 2020
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 10,615,003
- Issue date Apr 7, 2020
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three or more states for achieving high aspect ratio dielectric etch
- Patent number 10,504,744
- Issue date Dec 10, 2019
- Lam Research Corporation
- Takumi Yanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi regime plasma wafer processing to increase directionality of...
- Patent number 10,304,662
- Issue date May 28, 2019
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving a pre-determined factor associate...
- Patent number 10,283,330
- Issue date May 7, 2019
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 10,115,568
- Issue date Oct 30, 2018
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniformity control circuit for use within an impedance matching cir...
- Patent number 10,115,564
- Issue date Oct 30, 2018
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck design for cooling-gas light-up prevention
- Patent number 10,083,853
- Issue date Sep 25, 2018
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi regime plasma wafer processing to increase directionality of...
- Patent number 10,002,746
- Issue date Jun 19, 2018
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impedance matching circuit for operation with a kilohertz RF genera...
- Patent number 9,984,859
- Issue date May 29, 2018
- Lam Research Corporation
- Alexei Marakhtanov
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 9,852,889
- Issue date Dec 26, 2017
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniformity control circuit for use within an impedance matching cir...
- Patent number 9,761,414
- Issue date Sep 12, 2017
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR REDUCING REFLECTED POWER ASSOCIATED WITH AN...
- Publication number 20250140526
- Publication date May 1, 2025
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING VOLTAGE SETPOINT IN A PULSED RF SIGNAL FOR A TUNABLE EDGE SH...
- Publication number 20250087458
- Publication date Mar 13, 2025
- LAM RESEARCH CORPORATION
- David Hopkins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH
- Publication number 20250062102
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Extracting Process Control Information from...
- Publication number 20250054730
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DETERMINING A PHASE DIFFERENCE BETWEEN RF S...
- Publication number 20240404789
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPEDANCE MATCH WITH AN ELONGATED RF STRAP
- Publication number 20240395504
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Felix Leib Kozakevich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
- Publication number 20240266151
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...
- Publication number 20240186112
- Publication date Jun 6, 2024
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
- Publication number 20240162015
- Publication date May 16, 2024
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Use of Low Frequency Harmonics in Bias Radi...
- Publication number 20230317414
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Extracting Process Control Information from...
- Publication number 20230298857
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW FREQUENCY RF GENERATOR AND ASSOCIATED ELECTROSTATIC CHUCK
- Publication number 20230274914
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH
- Publication number 20230253184
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Radiofrequency Signal Generator-Based Contr...
- Publication number 20230253185
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Bradford J. Lyndaker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC
- Publication number 20230245874
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CONTROL FOR ION ENERGY DELIVERY USING MULTIPLE GENERATORS A...
- Publication number 20230230804
- Publication date Jul 20, 2023
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY
- Publication number 20230215694
- Publication date Jul 6, 2023
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF MAGNETIC FIELD SENSOR FOR HARMONIC MEASUREMENTS AND UNIFORMITY C...
- Publication number 20230178337
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Felix Leib Kozakevich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MINIMIZING REFLECTED POWER IN A TUNABLE EDGE SHEATH SYSTEM
- Publication number 20230102487
- Publication date Mar 30, 2023
- LAM RESEARCH CORPORATION
- David Hopkins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING VOLTAGE SETPOINT IN A PULSED RF SIGNAL FOR A TUNABLE EDGE SH...
- Publication number 20230092887
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- David Hopkins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPEDANCE MATCH WITH AN ELONGATED RF STRAP
- Publication number 20230081542
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Felix Leib Kozakevich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING
- Publication number 20230075462
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radiofrequency Signal Filter Arrangement for Plasma Processing System
- Publication number 20230054699
- Publication date Feb 23, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optimization of Radiofrequency Signal Ground Return in Plasma Proce...
- Publication number 20230059495
- Publication date Feb 23, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR USING BINNING TO INCREASE POWER DURING A LO...
- Publication number 20230007885
- Publication date Jan 12, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET
- Publication number 20220254616
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Eric Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...
- Publication number 20220199366
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Speed Synchronization Of Plasma Source/Bias Power Delivery
- Publication number 20220005674
- Publication date Jan 6, 2022
- MKS Instruments, Inc.
- Aaron T. RADOMSKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...
- Publication number 20210319980
- Publication date Oct 14, 2021
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION
- Publication number 20210296099
- Publication date Sep 23, 2021
- LAM RESEARCH CORPORATION
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS

Felix Kozakevich

Person

Patents Grantslast 30 patents

Systems and methods for use of low frequency harmonics in bias radi...

Systems and methods for using binning to increase power during a lo...

Process control for ion energy delivery using multiple generators a...

Tuning voltage setpoint in a pulsed RF signal for a tunable edge sh...

Uniformity control circuit for impedance match

Systems and methods for extracting process control information from...

Impedance match with an elongated RF strap

High speed synchronization of plasma source/bias power delivery

Systems and methods for cleaning an edge ring pocket

Systems and methods for optimizing power delivery to an electrode o...

Electrostatic Chuck design for cooling-gas light-up prevention

Systems and methods for optimizing power delivery to an electrode o...

Systems and methods for achieving a pre-determined factor associate...

High speed synchronization of plasma source/bias power delivery

Electrostatic chuck with features for preventing electrical arcing...

Electrostatic chuck design for cooling-gas light-up prevention

Active control of radial etch uniformity

Three or more states for achieving high aspect ratio dielectric etch

Systems and methods for controlling directionality of ions in an ed...

Systems and methods for controlling directionality of ions in an ed...

Three or more states for achieving high aspect ratio dielectric etch

Multi regime plasma wafer processing to increase directionality of...

Systems and methods for achieving a pre-determined factor associate...

Systems and methods for controlling directionality of ions in an ed...

Uniformity control circuit for use within an impedance matching cir...

Electrostatic chuck design for cooling-gas light-up prevention

Multi regime plasma wafer processing to increase directionality of...

Impedance matching circuit for operation with a kilohertz RF genera...

Systems and methods for controlling directionality of ions in an ed...

Uniformity control circuit for use within an impedance matching cir...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR REDUCING REFLECTED POWER ASSOCIATED WITH AN...

TUNING VOLTAGE SETPOINT IN A PULSED RF SIGNAL FOR A TUNABLE EDGE SH...

UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH

Systems and Methods for Extracting Process Control Information from...

SYSTEMS AND METHODS FOR DETERMINING A PHASE DIFFERENCE BETWEEN RF S...

IMPEDANCE MATCH WITH AN ELONGATED RF STRAP

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

Systems and Methods for Use of Low Frequency Harmonics in Bias Radi...

Systems and Methods for Extracting Process Control Information from...

LOW FREQUENCY RF GENERATOR AND ASSOCIATED ELECTROSTATIC CHUCK

UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH

Systems and Methods for Radiofrequency Signal Generator-Based Contr...

SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC

PROCESS CONTROL FOR ION ENERGY DELIVERY USING MULTIPLE GENERATORS A...

DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY

RF MAGNETIC FIELD SENSOR FOR HARMONIC MEASUREMENTS AND UNIFORMITY C...

MINIMIZING REFLECTED POWER IN A TUNABLE EDGE SHEATH SYSTEM

TUNING VOLTAGE SETPOINT IN A PULSED RF SIGNAL FOR A TUNABLE EDGE SH...

IMPEDANCE MATCH WITH AN ELONGATED RF STRAP

ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING

Radiofrequency Signal Filter Arrangement for Plasma Processing System

Optimization of Radiofrequency Signal Ground Return in Plasma Proce...

SYSTEMS AND METHODS FOR USING BINNING TO INCREASE POWER DURING A LO...

SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET

SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...

High Speed Synchronization Of Plasma Source/Bias Power Delivery

SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...

ELECTROSTATIC CHUCK DESIGN FOR COOLING-GAS LIGHT-UP PREVENTION