Feng Liu

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,946,135
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for selective dry etching gallium oxide
- Patent number 11,942,330
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molybdenum thin films by oxidation-reduction
- Patent number 11,891,690
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic device having an oxygen free platinum group metal film
- Patent number 11,894,233
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Yixiong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical mechanical polishing with applied magnetic field
- Patent number 11,787,008
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Xingfeng Wang
- B24 - GRINDING POLISHING
Information Patent Grant
Molybdenum(0) precursors for deposition of molybdenum films
- Patent number 11,760,768
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Chandan Kr Barik
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Methods for depositing blocking layers on conductive surfaces
- Patent number 11,702,733
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,643,721
- Issue date May 9, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxygen free deposition of platinum group metal films
- Patent number 11,488,830
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Yixiong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective aluminum oxide film deposition
- Patent number 11,450,525
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Liqi Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ALD process for NiO film with tunable carbon content
- Patent number 11,396,698
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for selective dry etching gallium oxide
- Patent number 11,398,388
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molybdenum(VI) precursors for deposition of molybdenum films
- Patent number 11,390,638
- Issue date Jul 19, 2022
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Water assisted highly pure ruthenium thin film deposition
- Patent number 11,293,093
- Issue date Apr 5, 2022
- Applied Materials Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing metallic iridium and iridium silicide
- Patent number 11,124,874
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Hua Chung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integration of ALD copper with high temperature PVD copper depositi...
- Patent number 10,892,186
- Issue date Jan 12, 2021
- Applied Materials, Inc.
- Ben-Li Sheu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alcohol assisted ALD film deposition
- Patent number 10,724,135
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Acetylide-based silicon precursors and their use as ALD/CVD precursors
- Patent number 10,699,897
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Mark Saly
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for pre-cleaning conductive materials on a substrate
- Patent number 10,283,345
- Issue date May 7, 2019
- Applied Materials, Inc.
- Xiangjin Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors of manganese and manganese-based compounds for copper di...
- Patent number 10,283,352
- Issue date May 7, 2019
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for thermally forming a selective cobalt layer
- Patent number 10,043,709
- Issue date Aug 7, 2018
- Applied Materials, Inc.
- Hua Ai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin-film semiconductor optoelectronic device with textured front a...
- Patent number 10,008,628
- Issue date Jun 26, 2018
- Alta Devices, Inc.
- I-Kang Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alcohol assisted ALD film deposition
- Patent number 9,914,995
- Issue date Mar 13, 2018
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors of manganese and manganese-based compounds for copper di...
- Patent number 9,916,975
- Issue date Mar 13, 2018
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluorogenic calcium ion indicators and methods of using the same
- Patent number 9,810,700
- Issue date Nov 7, 2017
- AAT Bioquest, Inc.
- Zhenjun Diwu
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Thin-film semiconductor optoelectronic device with textured front a...
- Patent number 9,502,594
- Issue date Nov 22, 2016
- Alta Devices, Inc.
- I-Kang Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feedback of layer thickness timing and clearance timing for polishi...
- Patent number 9,496,190
- Issue date Nov 15, 2016
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for pre-cleaning conductive interconnect structures
- Patent number 9,460,959
- Issue date Oct 4, 2016
- Applied Materials, Inc.
- Xiangjin Xie
- B08 - CLEANING
Information Patent Grant
Thin-film semiconductor optoelectronic device with textured front a...
- Patent number 9,269,843
- Issue date Feb 23, 2016
- Alta Devices, Inc.
- I-Kang Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feedback control of polishing using optical detection of clearance
- Patent number 9,073,169
- Issue date Jul 7, 2015
- Applied Materials, Inc.
- Kun Xu
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
BOTTOM-UP GAP FILL PROCESSES FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20250006552
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Liqi Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE DEPOSITION PROCESSES ON SEMICONDUCTOR SUBSTRATES
- Publication number 20250006485
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Mark Saly
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLEXIBLE MONOMER FOR SMOOTH POLYMER SURFACE
- Publication number 20250006555
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HALOGEN-FREE MOLYBDENUM-CONTAINING PRECURSORS FOR DEPOSITION OF MOL...
- Publication number 20240425536
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COPPER REFLOW BY SURFACE MODIFICATION
- Publication number 20240420966
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Zhiyuan Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON NITRIDE DAMAGE-FREE DRY ETCH METHOD FOR TUNGSTEN REMOVAL IN...
- Publication number 20240371654
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Qihao ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW-TEMPERATURE DEPOSITION PROCESSES TO FORM MOLYBDENUM-BASED MATER...
- Publication number 20240360549
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE VIA-FILL WITH CONFORMAL SIDEWALL COVERAGE
- Publication number 20240290655
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Zheng JU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET PELLICLES AND METHOD OF MANUFACTURING
- Publication number 20240248391
- Publication date Jul 25, 2024
- Applied Mateials, Inc.
- Thomas Joseph Knisley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20240200188
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method to Deposit Metal Cap for Interconnect
- Publication number 20240186181
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Ge QU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...
- Publication number 20240145232
- Publication date May 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
- Publication number 20230382933
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Chandan Kr Barik
- C07 - ORGANIC CHEMISTRY
Information Patent Application
SELECTIVE METAL REMOVAL WITH FLOWABLE POLYMER
- Publication number 20230386833
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Liqi Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metal Surface Blocking Molecules for Selective Deposition
- Publication number 20230317516
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Muthukumar Kaliappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING BLOCKING LAYERS ON CONDUCTIVE SURFACES
- Publication number 20230295794
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20230227968
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING METAL FILMS
- Publication number 20230227975
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oxygen Free Deposition Of Platinum Group Metal Films
- Publication number 20230025937
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Yixiong Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING METAL FILMS
- Publication number 20230002888
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING BLOCKING LAYERS ON CONDUCTIVE SURFACES
- Publication number 20220372616
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
- Publication number 20220356197
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Chandan Kr Barik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE
- Publication number 20220301883
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLYBDENUM(VI) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
- Publication number 20220220137
- Publication date Jul 14, 2022
- Applied Materials, Inc.
- Andrea Leoncini
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL MECHANICAL POLISHING WITH APPLIED MAGNETIC FIELD
- Publication number 20220193859
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Xingfeng WANG
- B24 - GRINDING POLISHING
Information Patent Application
METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE
- Publication number 20220076960
- Publication date Mar 10, 2022
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition Of Metal-Organic Oxide Films
- Publication number 20210066592
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Molybdenum Thin Films By Oxidation-Reduction
- Publication number 20210047726
- Publication date Feb 18, 2021
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reverse Selective Deposition
- Publication number 20200347493
- Publication date Nov 5, 2020
- Applied Materials, Inc.
- FENG Q. LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANNEALING PROCESSES TO STABILIZE NICKEL-CONTAINING FILMS
- Publication number 20200335329
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Jeffery W. Anthis
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Low temperature deposition of iridium containing films

Methods for selective dry etching gallium oxide

Molybdenum thin films by oxidation-reduction

Electronic device having an oxygen free platinum group metal film

Chemical mechanical polishing with applied magnetic field

Molybdenum(0) precursors for deposition of molybdenum films

Methods for depositing blocking layers on conductive surfaces

Low temperature deposition of iridium containing films

Oxygen free deposition of platinum group metal films

Selective aluminum oxide film deposition

ALD process for NiO film with tunable carbon content

Methods for selective dry etching gallium oxide

Molybdenum(VI) precursors for deposition of molybdenum films

Water assisted highly pure ruthenium thin film deposition

Methods for depositing metallic iridium and iridium silicide

Integration of ALD copper with high temperature PVD copper depositi...

Alcohol assisted ALD film deposition

Acetylide-based silicon precursors and their use as ALD/CVD precursors

Methods for pre-cleaning conductive materials on a substrate

Precursors of manganese and manganese-based compounds for copper di...

Methods for thermally forming a selective cobalt layer

Thin-film semiconductor optoelectronic device with textured front a...

Alcohol assisted ALD film deposition

Precursors of manganese and manganese-based compounds for copper di...

Fluorogenic calcium ion indicators and methods of using the same

Thin-film semiconductor optoelectronic device with textured front a...

Feedback of layer thickness timing and clearance timing for polishi...

Methods for pre-cleaning conductive interconnect structures

Thin-film semiconductor optoelectronic device with textured front a...

Feedback control of polishing using optical detection of clearance

Patents Applicationslast 30 patents

BOTTOM-UP GAP FILL PROCESSES FOR SEMICONDUCTOR SUBSTRATES

SELECTIVE DEPOSITION PROCESSES ON SEMICONDUCTOR SUBSTRATES

FLEXIBLE MONOMER FOR SMOOTH POLYMER SURFACE

HALOGEN-FREE MOLYBDENUM-CONTAINING PRECURSORS FOR DEPOSITION OF MOL...

COPPER REFLOW BY SURFACE MODIFICATION

SILICON NITRIDE DAMAGE-FREE DRY ETCH METHOD FOR TUNGSTEN REMOVAL IN...

LOW-TEMPERATURE DEPOSITION PROCESSES TO FORM MOLYBDENUM-BASED MATER...

SELECTIVE VIA-FILL WITH CONFORMAL SIDEWALL COVERAGE

EXTREME ULTRAVIOLET PELLICLES AND METHOD OF MANUFACTURING

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

Method to Deposit Metal Cap for Interconnect

BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE...

MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS

SELECTIVE METAL REMOVAL WITH FLOWABLE POLYMER

Metal Surface Blocking Molecules for Selective Deposition

METHODS FOR DEPOSITING BLOCKING LAYERS ON CONDUCTIVE SURFACES

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

METHOD OF DEPOSITING METAL FILMS

Oxygen Free Deposition Of Platinum Group Metal Films

METHOD OF DEPOSITING METAL FILMS

METHODS FOR DEPOSITING BLOCKING LAYERS ON CONDUCTIVE SURFACES

MOLYBDENUM(0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS

METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE

MOLYBDENUM(VI) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS

CHEMICAL MECHANICAL POLISHING WITH APPLIED MAGNETIC FIELD

METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE

Deposition Of Metal-Organic Oxide Films

Molybdenum Thin Films By Oxidation-Reduction

Reverse Selective Deposition

ANNEALING PROCESSES TO STABILIZE NICKEL-CONTAINING FILMS