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Fernando Silveira
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Livermore, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
In-situ electric field detection method and apparatus
Patent number
12,111,341
Issue date
Oct 8, 2024
Applied Materials, Inc.
Yue Guo
G01 - MEASURING TESTING
Information
Patent Grant
Pulsed voltage source for plasma processing applications
Patent number
11,972,924
Issue date
Apr 30, 2024
Applied Materials, Inc.
A N M Wasekul Azad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Advanced temperature control for wafer carrier in plasma processing...
Patent number
11,837,479
Issue date
Dec 5, 2023
Applied Materials, Inc.
Fernando M. Silveira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual zone common catch heat exchanger/chiller
Patent number
10,928,145
Issue date
Feb 23, 2021
Applied Materials, Inc.
Fernando Silveira
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Feedforward temperature control for plasma processing apparatus
Patent number
10,854,425
Issue date
Dec 1, 2020
Applied Materials, Inc.
Chetan Mahadeswaraswamy
G05 - CONTROLLING REGULATING
Information
Patent Grant
Distributed electro-static chuck cooling
Patent number
10,537,013
Issue date
Jan 14, 2020
Applied Materials, Inc.
Fernando Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods for electrical and magnetic uniformity and skew...
Patent number
10,410,889
Issue date
Sep 10, 2019
Applied Materials, Inc.
S. M. Reza Sadjadi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual zone common catch heat exchanger/chiller
Patent number
10,274,270
Issue date
Apr 30, 2019
Applied Materials, Inc.
Fernando Silveira
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Particle reduction via throttle gate valve purge
Patent number
10,010,912
Issue date
Jul 3, 2018
Applied Materials, Inc.
Jared Ahmad Lee
B08 - CLEANING
Information
Patent Grant
Feedforward temperature control for plasma processing apparatus
Patent number
9,338,871
Issue date
May 10, 2016
Applied Materials, Inc.
Chetan Mahadeswaraswamy
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
9,214,315
Issue date
Dec 15, 2015
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
8,916,793
Issue date
Dec 23, 2014
Applied Materials, Inc.
Fernando M. Silveira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-frequency electrostatically shielded toroidal plasma and radic...
Patent number
6,634,313
Issue date
Oct 21, 2003
Applied Materials, Inc.
Hiroji Hanawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PULSED VOLTAGE SOURCE FOR PLASMA PROCESSING APPLICATIONS
Publication number
20240234087
Publication date
Jul 11, 2024
Applied Materials, Inc.
A N M Wasekul AZAD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLID-STATE SWITCH BASED HIGH-SPEED PULSER WITH PLASMA IEDF MODIFIC...
Publication number
20240177969
Publication date
May 30, 2024
Applied Materials, Inc.
Kartik RAMASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU ELECTRIC FIELD DETECTION METHOD AND APPARATUS
Publication number
20240118328
Publication date
Apr 11, 2024
Applied Materials, Inc.
Yue GUO
G01 - MEASURING TESTING
Information
Patent Application
METHODS AND APPARATUS FOR TOROIDAL PLASMA GENERATION
Publication number
20240087859
Publication date
Mar 14, 2024
Kartik RAMASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING...
Publication number
20240047246
Publication date
Feb 8, 2024
Applied Materials, Inc.
Fernando M. Silveira
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PULSED VOLTAGE SOURCE FOR PLASMA PROCESSING APPLICATIONS
Publication number
20230402254
Publication date
Dec 14, 2023
Applied Materials, Inc.
A N M Wasekul AZAD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOTE SURFACE WAVE PROPAGATION FOR SEMICONDUCTOR CHAMBERS
Publication number
20230335376
Publication date
Oct 19, 2023
Yang YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUXILIARY PLASMA SOURCE FOR ROBUST IGNITION AND RESTRIKES IN A PLAS...
Publication number
20230187176
Publication date
Jun 15, 2023
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20210351021
Publication date
Nov 11, 2021
Applied Materials, Inc.
Fernando SILVEIRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL ZONE COMMON CATCH HEAT EXCHANGER/CHILLER
Publication number
20190204032
Publication date
Jul 4, 2019
Applied Materials, Inc.
Fernando Silveira
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
MULTI CHAMBER PROCESSING SYSTEM WITH SHARED VACUUM SYSTEM
Publication number
20180061679
Publication date
Mar 1, 2018
Applied Materials, Inc.
Fernando M. SILVEIRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADVANCED TEMPERATURE CONTROL FOR WAFER CARRIER IN PLASMA PROCESSING...
Publication number
20170323813
Publication date
Nov 9, 2017
Fernando M. Silveira
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20160155612
Publication date
Jun 2, 2016
Chetan MAHADESWARASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM PLASMA SOURCE WITH ROTATING CATHODE, BACKSIDE HELIUM...
Publication number
20160042961
Publication date
Feb 11, 2016
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR ELECTRICAL AND MAGNETIC UNIFORMITY AND SKEW...
Publication number
20160027667
Publication date
Jan 28, 2016
Applied Materials, Inc.
S. M. REZA SADJADI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20150316941
Publication date
Nov 5, 2015
Applied Materials, Inc.
Fernando M. SILVEIRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE REDUCTION VIA THROTTLE GATE VALVE PURGE
Publication number
20140366953
Publication date
Dec 18, 2014
Applied Materials, Inc.
JARED AHMAD LEE
B08 - CLEANING
Information
Patent Application
DISTRIBUTED ELECTRO-STATIC CHUCK COOLING
Publication number
20130276981
Publication date
Oct 24, 2013
Fernando Silveira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL ZONE COMMON CATCH HEAT EXCHANGER/CHILLER
Publication number
20130105081
Publication date
May 2, 2013
Fernando SILVEIRA
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20120132397
Publication date
May 31, 2012
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20110186545
Publication date
Aug 4, 2011
Applied Materials, Inc.
Chetan MAHADESWARASWAMY
G05 - CONTROLLING REGULATING
Information
Patent Application
High-Frequency electrostatically shielded toroidal plasma and radic...
Publication number
20040237897
Publication date
Dec 2, 2004
Hiroji Hanawa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
High-frequency electrostatically shielded toroidal plasma and radic...
Publication number
20020108713
Publication date
Aug 15, 2002
APPLIED MATERIALS, INC.
Hiroji Hanawa
H01 - BASIC ELECTRIC ELEMENTS