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Firas F. Putris
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La Mesa, CA, US
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last 30 patents
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Patent Grant
DUV light source optical element improvements
Patent number
7,346,093
Issue date
Mar 18, 2008
Cymer, Inc.
Richard L. Sandstrom
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
DUV light source optical element improvements
Publication number
20040240506
Publication date
Dec 2, 2004
Richard L. Sandstrom
G01 - MEASURING TESTING