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Francimar Campana
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Milipitas, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of depositing low dielectric constant silicon carbide layers
Patent number
7,200,460
Issue date
Apr 3, 2007
Applied Materials, Inc.
Francimar Campana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing low dielectric constant silicon carbide layers
Patent number
6,855,484
Issue date
Feb 15, 2005
Applied Materials, Inc.
Francimar Campana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for forming a dielectric film using helium as...
Patent number
6,599,574
Issue date
Jul 29, 2003
Applied Materials Inc.
Ellie Yieh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for processing semiconductor substrates with h...
Patent number
6,596,343
Issue date
Jul 22, 2003
Applied Materials, Inc.
Himanshu Pokharna
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing low dielectric constant silicon carbide layers
Patent number
6,537,733
Issue date
Mar 25, 2003
Applied Materials, Inc.
Francimar Campana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of reducing undesired etching of insulation due to elevated...
Patent number
6,426,015
Issue date
Jul 30, 2002
Applied Materials, Inc.
Li-Qun Xia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing and planarizing fluorinated BPSG films
Patent number
6,261,975
Issue date
Jul 17, 2001
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Two-step borophosphosilicate glass deposition process and related d...
Patent number
6,218,268
Issue date
Apr 17, 2001
Applied Materials, Inc.
Li-Qun Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming phosphosilicate glass having a high wet-etch rate
Patent number
6,153,540
Issue date
Nov 28, 2000
Applied Materials, Inc.
Ishing Lou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Throttle valve providing enhanced cleaning
Patent number
6,090,206
Issue date
Jul 18, 2000
Applied Materials, Inc.
Won B. Bang
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
Information
Patent Application
Method and apparatus for processing semiconductor substrates with h...
Publication number
20030221621
Publication date
Dec 4, 2003
Applied Materials Inc.
Himanshu Pokharna
C30 - CRYSTAL GROWTH
Information
Patent Application
Method of depositing low dielectric constant silicon carbide layers
Publication number
20030148223
Publication date
Aug 7, 2003
APPLIED MATERIALS, INC.
Francimar Campana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of depositing low dielectric constant silicon carbide layers
Publication number
20030148020
Publication date
Aug 7, 2003
APPLIED MATERIALS, INC.
Francimar Campana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Two-step flourinated-borophosophosilicate glass deposition process
Publication number
20020173169
Publication date
Nov 21, 2002
APPLIED MATERIALS, INC.
Francimar Campana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of depositing low dielectric constant silicon carbide layers
Publication number
20020119250
Publication date
Aug 29, 2002
APPLIED MATERIALS, INC.
Francimar Campana
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...