Franciscus Van De Mast

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,620,553
- Issue date Apr 14, 2020
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,216,102
- Issue date Feb 26, 2019
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,891,542
- Issue date Feb 13, 2018
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,529,277
- Issue date Dec 27, 2016
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,988,650
- Issue date Mar 24, 2015
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of updating calibration data and a device manufacturing method
- Patent number 8,903,156
- Issue date Dec 2, 2014
- ASML Netherlands B.V.
- Franciscus Van De Mast
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, method of calibrating a lithographic appara...
- Patent number 7,804,582
- Issue date Sep 28, 2010
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system, control system and device manufacturing method
- Patent number 7,511,797
- Issue date Mar 31, 2009
- ASML Netherlands B.V.
- Franciscus Van De Mast
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system, control system and device manufacturing method
- Patent number 7,352,439
- Issue date Apr 1, 2008
- ASML Netherlands B.V.
- Franciscus Van De Mast
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190235398
- Publication date Aug 1, 2019
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS TO MONITOR A PROCESS APPARATUS
- Publication number 20190214318
- Publication date Jul 11, 2019
- ASML NETHERLANDS B.V.
- Mark John MASLOW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180164705
- Publication date Jun 14, 2018
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170242349
- Publication date Aug 24, 2017
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150185624
- Publication date Jul 2, 2015
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF UPDATING CALIBRATION DATA AND A DEVICE MANUFACTURING METHOD
- Publication number 20120156807
- Publication date Jun 21, 2012
- ASML NETHERLANDS B.V.
- Franciscus VAN DE MAST
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120052447
- Publication date Mar 1, 2012
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan WESTERLAKEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, method of calibrating a lithographic appara...
- Publication number 20080024748
- Publication date Jan 31, 2008
- ASML NETHERLANDS B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Franciscus Van De Mast

Person

Patents Grantslast 30 patents

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Method of updating calibration data and a device manufacturing method

Lithographic apparatus, method of calibrating a lithographic appara...

Lithography system, control system and device manufacturing method

Lithography system, control system and device manufacturing method

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

METHOD AND APPARATUS TO MONITOR A PROCESS APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

METHOD OF UPDATING CALIBRATION DATA AND A DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Lithographic apparatus, method of calibrating a lithographic appara...