Francois Max d'Heurle

Person

Ossining, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low temperature formation of low resistivity titanium silicide
- Patent number 6,187,679
- Issue date Feb 13, 2001
- International Business Machines Corporation
- Cyril Cabral
- C30 - CRYSTAL GROWTH
Information Patent Grant
Low temperature formation of low resistivity titanium silicide
- Patent number 5,828,131
- Issue date Oct 27, 1998
- International Business Machines Corporation
- Cyril Cabral
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of forming a film for a multilayer Semiconductor device for...
- Patent number 5,624,869
- Issue date Apr 29, 1997
- International Business Machines Corporation
- Paul D. Agnello
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film for a multilayer semiconductor device for improving therm...
- Patent number 5,608,266
- Issue date Mar 4, 1997
- International Business Machines Corporation
- Paul D. Agnello
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for lowering the phase transformation temperature of a metal...
- Patent number 5,510,295
- Issue date Apr 23, 1996
- International Business Machines Corporation
- Cyril Cabral
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for depositing interconnection metallurgy using low temperat...
- Patent number 5,143,867
- Issue date Sep 1, 1992
- International Business Machines Corporation
- Francois M. d'Heurle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inhibiting hillock formation in films and film thereby an...
- Patent number 4,012,756
- Issue date Mar 15, 1977
- International Business Machines Corporation
- Praveen Chaudhari
- H01 - BASIC ELECTRIC ELEMENTS

Francois Max d'Heurle

Person

Patents Grantslast 30 patents

Low temperature formation of low resistivity titanium silicide

Low temperature formation of low resistivity titanium silicide

Method of forming a film for a multilayer Semiconductor device for...

Thin film for a multilayer semiconductor device for improving therm...

Method for lowering the phase transformation temperature of a metal...

Method for depositing interconnection metallurgy using low temperat...

Method of inhibiting hillock formation in films and film thereby an...