Frank B.M. Van Bilsen

Person

  • Phoenix, AZ, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer support system

    • Patent number 7,655,093
    • Issue date Feb 2, 2010
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    System of controlling the temperature of a processing chamber

    • Patent number 6,703,592
    • Issue date Mar 9, 2004
    • ASM America, Inc.
    • Frank B. M. Van Bilsen
    • G01 - MEASURING TESTING
  • Information Patent Grant

    System of controlling the temperature of a processing chamber

    • Patent number 6,507,007
    • Issue date Jan 14, 2003
    • ASM America, Inc.
    • Frank B. M. Van Bilsen
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Wafer support system

    • Patent number 6,491,757
    • Issue date Dec 10, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system

    • Patent number 6,454,866
    • Issue date Sep 24, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer support system

    • Patent number 6,343,183
    • Issue date Jan 29, 2002
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Long life high temperature process chamber

    • Patent number 6,325,858
    • Issue date Dec 4, 2001
    • ASM America, Inc.
    • John F. Wengert
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    System of controlling the temperature of a processing chamber

    • Patent number 6,191,399
    • Issue date Feb 20, 2001
    • ASM America, Inc.
    • Frank B. M. Van Bilsen
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Wafer support system

    • Patent number 6,113,702
    • Issue date Sep 5, 2000
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER SUPPORT SYSTEM

    • Publication number 20070131173
    • Publication date Jun 14, 2007
    • ASM AMERICA, INC
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system

    • Publication number 20040198153
    • Publication date Oct 7, 2004
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    System of controlling the temperature of a processing chamber

    • Publication number 20030080112
    • Publication date May 1, 2003
    • Frank B. M. Van Bilsen
    • G01 - MEASURING TESTING
  • Information Patent Application

    Wafer support system

    • Publication number 20030075274
    • Publication date Apr 24, 2003
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Wafer support system

    • Publication number 20010054390
    • Publication date Dec 27, 2001
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    System of controlling the temperature of a processing chamber

    • Publication number 20010010309
    • Publication date Aug 2, 2001
    • Frank B. M. Van Bilsen
    • G01 - MEASURING TESTING