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Frank B.M. Van Bilsen
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Phoenix, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer support system
Patent number
7,655,093
Issue date
Feb 2, 2010
ASM America, Inc.
Michael W. Halpin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System of controlling the temperature of a processing chamber
Patent number
6,703,592
Issue date
Mar 9, 2004
ASM America, Inc.
Frank B. M. Van Bilsen
G01 - MEASURING TESTING
Information
Patent Grant
System of controlling the temperature of a processing chamber
Patent number
6,507,007
Issue date
Jan 14, 2003
ASM America, Inc.
Frank B. M. Van Bilsen
G01 - MEASURING TESTING
Information
Patent Grant
Wafer support system
Patent number
6,491,757
Issue date
Dec 10, 2002
ASM America, Inc.
Michael W. Halpin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer support system
Patent number
6,454,866
Issue date
Sep 24, 2002
ASM America, Inc.
Michael W. Halpin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer support system
Patent number
6,343,183
Issue date
Jan 29, 2002
ASM America, Inc.
Michael W. Halpin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Long life high temperature process chamber
Patent number
6,325,858
Issue date
Dec 4, 2001
ASM America, Inc.
John F. Wengert
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System of controlling the temperature of a processing chamber
Patent number
6,191,399
Issue date
Feb 20, 2001
ASM America, Inc.
Frank B. M. Van Bilsen
G01 - MEASURING TESTING
Information
Patent Grant
Wafer support system
Patent number
6,113,702
Issue date
Sep 5, 2000
ASM America, Inc.
Michael W. Halpin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
WAFER SUPPORT SYSTEM
Publication number
20070131173
Publication date
Jun 14, 2007
ASM AMERICA, INC
Michael W. Halpin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Wafer support system
Publication number
20040198153
Publication date
Oct 7, 2004
Michael W. Halpin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
System of controlling the temperature of a processing chamber
Publication number
20030080112
Publication date
May 1, 2003
Frank B. M. Van Bilsen
G01 - MEASURING TESTING
Information
Patent Application
Wafer support system
Publication number
20030075274
Publication date
Apr 24, 2003
Michael W. Halpin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Wafer support system
Publication number
20010054390
Publication date
Dec 27, 2001
Michael W. Halpin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
System of controlling the temperature of a processing chamber
Publication number
20010010309
Publication date
Aug 2, 2001
Frank B. M. Van Bilsen
G01 - MEASURING TESTING