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Frank Laske
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Weilburg, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-stage, multi-zone substrate positioning systems
Patent number
11,637,030
Issue date
Apr 25, 2023
KLA Corporation
Yoram Uziel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology and control of overlay and edge placement errors
Patent number
10,533,848
Issue date
Jan 14, 2020
KLA-Tencor Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for device-correlated overlay metrology
Patent number
10,474,040
Issue date
Nov 12, 2019
KLA-Tencor Corporation
Frank Laske
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay measurements of overlapping target structures based on symm...
Patent number
10,473,460
Issue date
Nov 12, 2019
KLA-Tencor Corporation
Nadav Gutman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for measuring positions of structures on a substrate and com...
Patent number
10,337,852
Issue date
Jul 2, 2019
KLA-Tencor Corporation
Oliver Ache
G01 - MEASURING TESTING
Information
Patent Grant
Method and computer program product for controlling the positioning...
Patent number
10,303,153
Issue date
May 28, 2019
KLA-Tencor Corporation
Slawomir Czerkas
G05 - CONTROLLING REGULATING
Information
Patent Grant
Apparatus and method for the measurement of pattern placement and s...
Patent number
10,185,800
Issue date
Jan 22, 2019
KLA-Tencor Corporation
Stefan Eyring
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measurement of overlay and edge placement errors with an electron b...
Patent number
10,141,156
Issue date
Nov 27, 2018
KLA-Tencor Corporation
Mark Allen Neil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for drift compensation on an electron beam based...
Patent number
9,892,885
Issue date
Feb 13, 2018
KLA-Tencor Corporation
Frank Laske
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for correcting position measurements for optical errors and...
Patent number
9,704,238
Issue date
Jul 11, 2017
KLA-Tencor Corporation
Stefan Eyring
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for measuring positions of structures on a mask and thereby...
Patent number
9,424,636
Issue date
Aug 23, 2016
KLA-Tencor Corporation
Frank Laske
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for correcting position measurements for optical errors and...
Patent number
9,201,312
Issue date
Dec 1, 2015
KLA-Tencor Corporation
Stefan Eyring
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Unique mark and method to determine critical dimension uniformity a...
Patent number
8,804,137
Issue date
Aug 12, 2014
KLA-Tencor Corporation
DongSub Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for the reproducible determination of the position of struct...
Patent number
8,352,886
Issue date
Jan 8, 2013
KLA-Tencor MIE GmbH
Frank Laske
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device and method for determining an optical property of a mask
Patent number
7,864,319
Issue date
Jan 4, 2011
Vistec Semiconductor System GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
DEVICE FEATURE SPECIFIC EDGE PLACEMENT ERROR (EPE)
Publication number
20240168391
Publication date
May 23, 2024
KLA Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Application
HIGH-RESOLUTION EVALUATION OF OPTICAL METROLOGY TARGETS FOR PROCESS...
Publication number
20240094639
Publication date
Mar 21, 2024
KLA Corporation
Nadav Gutman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR ACQUIRING ALIGNMENT MEASUREMENTS OF STRUCTURE...
Publication number
20240093985
Publication date
Mar 21, 2024
KLA Corporation
Nimrod Shuall
G01 - MEASURING TESTING
Information
Patent Application
Image Modeling-Assisted Contour Extraction
Publication number
20230420278
Publication date
Dec 28, 2023
KLA Corporation
Stefan Eyring
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DESIGN-ASSISTED LARGE FIELD OF VIEW METROLOGY
Publication number
20230108539
Publication date
Apr 6, 2023
Stefan Eyring
G01 - MEASURING TESTING
Information
Patent Application
Multi-Stage, Multi-Zone Substrate Positioning Systems
Publication number
20200402827
Publication date
Dec 24, 2020
KLA Corporation
Yoram Uziel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metrology and Control of Overlay and Edge Placement Errors
Publication number
20190271542
Publication date
Sep 5, 2019
KLA-Tencor Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MEASURING POSITIONS OF STRUCTURES ON A SUBSTRATE AND COM...
Publication number
20190186893
Publication date
Jun 20, 2019
KLA-Tencor Corporation
Oliver Ache
G01 - MEASURING TESTING
Information
Patent Application
Overlay Measurements of Overlapping Target Structures Based on Symm...
Publication number
20190178639
Publication date
Jun 13, 2019
KLA-Tencor Corporation
Nadav Gutman
G01 - MEASURING TESTING
Information
Patent Application
SYSTEMS AND METHODS FOR DEVICE-CORRELATED OVERLAY METROLOGY
Publication number
20190179231
Publication date
Jun 13, 2019
KLA-Tencor Corporation
Frank Laske
G01 - MEASURING TESTING
Information
Patent Application
Apparatus and Method for the Measurement of Pattern Placement and S...
Publication number
20180165404
Publication date
Jun 14, 2018
KLA-Tencor Corporation
Stefan Eyring
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and Computer Program Product for Controlling the Positioning...
Publication number
20180120807
Publication date
May 3, 2018
KLA-Tencor Corporation
Slawomir Czerkas
G05 - CONTROLLING REGULATING
Information
Patent Application
Measurement of Overlay and Edge Placement Errors With an Electron B...
Publication number
20180090296
Publication date
Mar 29, 2018
KLA-Tencor Corporation
Mark Allen Neil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Drift Compensation on an Electron Beam Based...
Publication number
20170278666
Publication date
Sep 28, 2017
KLA-Tencor Corporation
Frank Laske
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CORRECTING POSITION MEASUREMENTS FOR OPTICAL ERRORS AND...
Publication number
20160078609
Publication date
Mar 17, 2016
KLA-Tencor Corporation
Stefan Eyring
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD, SYSTEM AND COMPUTER PROGRAM PRODUCT FOR GENERATING HIGH DEN...
Publication number
20150310160
Publication date
Oct 29, 2015
KLA-Tencor Corporation
Frank LASKE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR MEASURING POSITIONS OF STRUCTURES ON A MASK AND THEREBY...
Publication number
20150248756
Publication date
Sep 3, 2015
KLA-Tencor Corporation
Frank LASKE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR CORRECTING POSITION MEASUREMENTS FOR OPTICAL ERRORS AND...
Publication number
20140307949
Publication date
Oct 16, 2014
Stefan Eyring
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method for the Reproducible Determination of the Position of Struct...
Publication number
20110225554
Publication date
Sep 15, 2011
KLA-TENCOR MIE GMBH
Frank Laske
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UNIQUE MARK AND METHOD TO DETERMINE CRITICAL DIMENSION UNIFORMITY A...
Publication number
20110051150
Publication date
Mar 3, 2011
KLA-Tencor Corporation
DongSub Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device and method for determining an optical property of a mask
Publication number
20090066955
Publication date
Mar 12, 2009
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING