Frank Melzer

Person

Utzmemmingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical system for semiconductor lithography
- Patent number 9,383,544
- Issue date Jul 5, 2016
- Carl Zeiss SMT GmbH
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Method and system for indirect determination of local irradiance in...
- Patent number 8,454,230
- Issue date Jun 4, 2013
- Carl Zeiss SMT GmbH
- Frank Melzer
- G01 - MEASURING TESTING
Information Patent Grant
Optical system for semiconductor lithography
- Patent number 8,269,947
- Issue date Sep 18, 2012
- Carl Zeiss SMT GmbH
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Focusing-device for the radiation from a light source
- Patent number 7,871,171
- Issue date Jan 18, 2011
- Carl Zeiss SMT AG
- Martin Antoni
- G02 - OPTICS
Information Patent Grant
Optical apparatus comprising an optical component and an adjustment...
- Patent number 7,580,207
- Issue date Aug 25, 2009
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Collector configured of mirror shells
- Patent number 7,460,212
- Issue date Dec 2, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Focusing-device for the radiation from a light source
- Patent number 7,410,265
- Issue date Aug 12, 2008
- Carl Zeiss SMT AG
- Martin Antoni
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Facet mirror having a number of mirror facets
- Patent number 7,354,168
- Issue date Apr 8, 2008
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Collector with fastening devices for fastening mirror shells
- Patent number 7,321,126
- Issue date Jan 22, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Collector having unused region for illumination systems using a wav...
- Patent number 7,244,954
- Issue date Jul 17, 2007
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Lighting system, particularly for use in extreme ultraviolet (EUV)...
- Patent number 7,196,841
- Issue date Mar 27, 2007
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Facet mirror having a number of mirror facets
- Patent number 7,090,362
- Issue date Aug 15, 2006
- Carl Zeiss SMT AG
- Hubert Holderer
- G02 - OPTICS
Information Patent Grant
Collector with fastening devices for fastening mirror shells
- Patent number 7,091,505
- Issue date Aug 15, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of connecting a multiplicity of optical elements to a basic...
- Patent number 7,034,998
- Issue date Apr 25, 2006
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Collector having unused region for illumination systems using a wav...
- Patent number 7,015,489
- Issue date Mar 21, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
System for damping oscillations
- Patent number 6,897,599
- Issue date May 24, 2005
- Carl Zeiss SMT AG
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Optical element deformation system
- Patent number 6,844,994
- Issue date Jan 18, 2005
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Grant
Illumination system with a plurality of individual gratings
- Patent number 6,836,530
- Issue date Dec 28, 2004
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Oscillation damping system
- Patent number 6,700,715
- Issue date Mar 2, 2004
- Carl Zeiss SMT AG
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Focusing-device for the radiation from a light source
- Patent number 6,655,808
- Issue date Dec 2, 2003
- Carl Zeiss SMT AG
- Martin Antoni
- G02 - OPTICS
Information Patent Grant
Precision positioning apparatus for positioning a component especia...
- Patent number 6,603,615
- Issue date Aug 5, 2003
- Carl-Zeiss-Stiftung
- Frank Melzer
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20120327385
- Publication date Dec 27, 2012
- Carl Zeiss SMT GMBH
- Frank Melzer
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20090207396
- Publication date Aug 20, 2009
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Application
OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20090135395
- Publication date May 28, 2009
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Application
Apparatus for the manipulation and/or adjustment of an optical element
- Publication number 20090002670
- Publication date Jan 1, 2009
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Application
Focusing-device for the radiation from a light source
- Publication number 20080297755
- Publication date Dec 4, 2008
- Carl Zeiss SMT AG
- Martin Antoni
- G02 - OPTICS
Information Patent Application
Collector with fastening devices for fastening mirror shells
- Publication number 20080042079
- Publication date Feb 21, 2008
- Carl Zeiss SMT
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Collector configured of mirror shells
- Publication number 20080013680
- Publication date Jan 17, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Facet mirrors and a method for producing mirror facets
- Publication number 20070019310
- Publication date Jan 25, 2007
- Carl Zeiss SMT AG
- Andreas Seifert
- G02 - OPTICS
Information Patent Application
Collector with fastening devices for fastening mirror shells
- Publication number 20060291062
- Publication date Dec 28, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
OPTICAL APPARATUS COMPRISING AN OPTICAL COMPONENT AND AN ADJUSTMENT...
- Publication number 20060279856
- Publication date Dec 14, 2006
- Carl Zeiss SMT AG
- Frank Melzer
- G02 - OPTICS
Information Patent Application
Method and system for indirect determination of local irradiance in...
- Publication number 20060222044
- Publication date Oct 5, 2006
- Carl Zeiss SMT AG
- Frank Melzer
- G01 - MEASURING TESTING
Information Patent Application
Collector having unused region for illumination systems using a wav...
- Publication number 20060097202
- Publication date May 11, 2006
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Lighting system, particularly for use in extreme ultraviolet (euv)...
- Publication number 20050174650
- Publication date Aug 11, 2005
- Frank Melzer
- G02 - OPTICS
Information Patent Application
Facet mirror having a number of mirror facets
- Publication number 20050030653
- Publication date Feb 10, 2005
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
Facet mirror having a number of mirror facets
- Publication number 20050030656
- Publication date Feb 10, 2005
- Hubert Holderer
- G02 - OPTICS
Information Patent Application
Collector with fastening devices for fastening mirror shells
- Publication number 20040227103
- Publication date Nov 18, 2004
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Focusing-device for the radiation from a light source
- Publication number 20040130809
- Publication date Jul 8, 2004
- Carl Zeiss SMT AG
- Martin Antoni
- G02 - OPTICS
Information Patent Application
Collector having unused region for illumination systems using a wav...
- Publication number 20040065817
- Publication date Apr 8, 2004
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Application
Illumination system with a plurality of individual gratings
- Publication number 20030099040
- Publication date May 29, 2003
- Carl Zeiss Cemiconductor Manufacturing Technologies AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Focusing-device for the radiation from a light source
- Publication number 20020113954
- Publication date Aug 22, 2002
- Martin Antoni
- G02 - OPTICS
Information Patent Application
System for damping oscillations
- Publication number 20020109437
- Publication date Aug 15, 2002
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Oscillation damping system
- Publication number 20020075574
- Publication date Jun 20, 2002
- Franz Sorg
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Optical element deformation system
- Publication number 20020048096
- Publication date Apr 25, 2002
- Frank Melzer
- G02 - OPTICS
Information Patent Application
Precision positioning apparatus for positioning a component especia...
- Publication number 20020021504
- Publication date Feb 21, 2002
- Martin Bayer
- G02 - OPTICS
Information Patent Application
Method of connecting a multiplicity of optical elements to a basic...
- Publication number 20020021507
- Publication date Feb 21, 2002
- Frank Melzer
- G02 - OPTICS

Frank Melzer

Person

Patents Grantslast 30 patents

Optical system for semiconductor lithography

Method and system for indirect determination of local irradiance in...

Optical system for semiconductor lithography

Focusing-device for the radiation from a light source

Optical apparatus comprising an optical component and an adjustment...

Collector configured of mirror shells

Focusing-device for the radiation from a light source

Facet mirror having a number of mirror facets

Collector with fastening devices for fastening mirror shells

Collector having unused region for illumination systems using a wav...

Lighting system, particularly for use in extreme ultraviolet (EUV)...

Facet mirror having a number of mirror facets

Collector with fastening devices for fastening mirror shells

Method of connecting a multiplicity of optical elements to a basic...

Collector having unused region for illumination systems using a wav...

System for damping oscillations

Optical element deformation system

Illumination system with a plurality of individual gratings

Oscillation damping system

Focusing-device for the radiation from a light source

Precision positioning apparatus for positioning a component especia...

Patents Applicationslast 30 patents

OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY

OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY

OPTICAL SYSTEM FOR SEMICONDUCTOR LITHOGRAPHY

Apparatus for the manipulation and/or adjustment of an optical element

Focusing-device for the radiation from a light source

Collector with fastening devices for fastening mirror shells

Collector configured of mirror shells

Facet mirrors and a method for producing mirror facets

Collector with fastening devices for fastening mirror shells

OPTICAL APPARATUS COMPRISING AN OPTICAL COMPONENT AND AN ADJUSTMENT...

Method and system for indirect determination of local irradiance in...

Collector having unused region for illumination systems using a wav...

Lighting system, particularly for use in extreme ultraviolet (euv)...

Facet mirror having a number of mirror facets

Facet mirror having a number of mirror facets

Collector with fastening devices for fastening mirror shells

Focusing-device for the radiation from a light source

Collector having unused region for illumination systems using a wav...

Illumination system with a plurality of individual gratings

Focusing-device for the radiation from a light source

System for damping oscillations

Oscillation damping system

Optical element deformation system

Precision positioning apparatus for positioning a component especia...

Method of connecting a multiplicity of optical elements to a basic...