Frank SCHAEFER

Person

Tuebingen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Optical gas sensor device and method for determining the concentrat...
- Patent number 8,772,723
- Issue date Jul 8, 2014
- Robert Bosch GmbH
- Frank Schaefer
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number RE44995
- Issue date Jul 8, 2014
- Robert Bosch GmbH
- Hubert Benzel
- 216 - Etching a substrate: processes
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number 8,123,963
- Issue date Feb 28, 2012
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical semiconductor sensor
- Patent number 7,843,025
- Issue date Nov 30, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor component configured as a diaphragm sensor
- Patent number 7,755,152
- Issue date Jul 13, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical sensor element
- Patent number 7,572,661
- Issue date Aug 11, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a diaphragm sensor
- Patent number 7,569,412
- Issue date Aug 4, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a membrane sensor
- Patent number 7,494,839
- Issue date Feb 24, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number 7,479,232
- Issue date Jan 20, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing cavities having optically transparent wall
- Patent number 7,479,234
- Issue date Jan 20, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing optically transparent regions in a silicon sub...
- Patent number 7,419,581
- Issue date Sep 2, 2008
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method
- Patent number 7,404,332
- Issue date Jul 29, 2008
- Robert Bosch GmbH
- Gerhard Lammel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor element with trenched cavity
- Patent number 7,354,786
- Issue date Apr 8, 2008
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor featuring pressure loading of the fastening element
- Patent number 7,343,806
- Issue date Mar 18, 2008
- Robert Bosch GmbH
- Joerg Muchow
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing a semiconductor component having a movable mas...
- Patent number 7,300,854
- Issue date Nov 27, 2007
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor
- Patent number 7,213,465
- Issue date May 8, 2007
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor component and a method for producing the same
- Patent number 7,193,290
- Issue date Mar 20, 2007
- Robert Bosch GmbH
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Grant
Method of producing a semiconductor sensor component
- Patent number 7,160,750
- Issue date Jan 9, 2007
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing micromechanic sensors and sensors produced by...
- Patent number 7,045,382
- Issue date May 16, 2006
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for production of a semiconductor component and a semiconduc...
- Patent number 7,037,438
- Issue date May 2, 2006
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component
- Patent number 6,906,392
- Issue date Jun 14, 2005
- paragon
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and pressure sensor having a component of...
- Patent number 6,840,111
- Issue date Jan 11, 2005
- Robert Bosch GmbH
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical component and manufacturing method
- Patent number 6,832,523
- Issue date Dec 21, 2004
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component with different doping types so that one t...
- Patent number 6,803,637
- Issue date Oct 12, 2004
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical diaphragm
- Patent number 6,649,989
- Issue date Nov 18, 2003
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and appropriate manufacturing method
- Patent number 6,395,574
- Issue date May 28, 2002
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Gas sensor and method for analyzing the measured variables
- Publication number 20150192554
- Publication date Jul 9, 2015
- ROBERT BOSCH GmbH
- Paul KOOP
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL GAS SENSOR DEVICE AND METHOD FOR DETERMINING THE CONCENTRAT...
- Publication number 20140091219
- Publication date Apr 3, 2014
- ROBERT BOSCH GmbH
- Frank SCHAEFER
- G01 - MEASURING TESTING
Information Patent Application
Micromechanical sensor element and sensor device having this type o...
- Publication number 20130276537
- Publication date Oct 24, 2013
- ROBERT BOSCH GmbH
- Frank SCHAEFER
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...
- Publication number 20090256219
- Publication date Oct 15, 2009
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...
- Publication number 20090127640
- Publication date May 21, 2009
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a semiconductor component and a semiconductor...
- Publication number 20080286970
- Publication date Nov 20, 2008
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Corrosion Protection for Pressure Sensors
- Publication number 20070279845
- Publication date Dec 6, 2007
- Winfried Kuhnt
- G01 - MEASURING TESTING
Information Patent Application
Pressure sensor featuring pressure loading of the fastening element
- Publication number 20060162462
- Publication date Jul 27, 2006
- Joerg Muchow
- G01 - MEASURING TESTING
Information Patent Application
Micromechanical component and method
- Publication number 20060137460
- Publication date Jun 29, 2006
- Gerhard Lammel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical sensor element
- Publication number 20060063293
- Publication date Mar 23, 2006
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Sensor element with trenched cavity
- Publication number 20060057816
- Publication date Mar 16, 2006
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and micromechanical component
- Publication number 20060037932
- Publication date Feb 23, 2006
- Gerhard Lammel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a semiconductor component and a semiconductor...
- Publication number 20060014392
- Publication date Jan 19, 2006
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a semiconductor component, as well as a se...
- Publication number 20050181529
- Publication date Aug 18, 2005
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a semicondutor component, as well as a sem...
- Publication number 20050142687
- Publication date Jun 30, 2005
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical sensor
- Publication number 20050115321
- Publication date Jun 2, 2005
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Power supply device for a tire-pressure sensor
- Publication number 20050082912
- Publication date Apr 21, 2005
- Andreas Junger
- B60 - VEHICLES IN GENERAL
Information Patent Application
Method for producing cavities having optically transparent wall
- Publication number 20050016949
- Publication date Jan 27, 2005
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical apparatus, pressure sensor, and method
- Publication number 20050016288
- Publication date Jan 27, 2005
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semicoductor component and a method for producing the same
- Publication number 20040155751
- Publication date Aug 12, 2004
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Application
Method for producing optically transparent regions in a silicon sub...
- Publication number 20040155010
- Publication date Aug 12, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing micromechanic sensors and sensors produced by...
- Publication number 20040152228
- Publication date Aug 5, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a semiconductor component and a semiconductor...
- Publication number 20040147057
- Publication date Jul 29, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and corresponding production method
- Publication number 20040080004
- Publication date Apr 29, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a semiconductor component having a movable mas...
- Publication number 20040065931
- Publication date Apr 8, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component
- Publication number 20040021184
- Publication date Feb 5, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and corresponing production method
- Publication number 20030116813
- Publication date Jun 26, 2003
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical diaphragm
- Publication number 20030062579
- Publication date Apr 3, 2003
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component
- Publication number 20020174724
- Publication date Nov 28, 2002
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Application
Method for production of a semiconductor component and a semiconduc...
- Publication number 20020170875
- Publication date Nov 21, 2002
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Frank SCHAEFER

Person

Patents Grantslast 30 patents

Optical gas sensor device and method for determining the concentrat...

Method for producing a semiconductor component and a semiconductor...

Method for producing a semiconductor component and a semiconductor...

Micromechanical semiconductor sensor

Semiconductor component configured as a diaphragm sensor

Method for manufacturing a micromechanical sensor element

Method for manufacturing a diaphragm sensor

Method for manufacturing a membrane sensor

Method for producing a semiconductor component and a semiconductor...

Method for producing cavities having optically transparent wall

Method for producing optically transparent regions in a silicon sub...

Micromechanical component and method

Sensor element with trenched cavity

Pressure sensor featuring pressure loading of the fastening element

Method for producing a semiconductor component having a movable mas...

Micromechanical sensor

Semiconductor component and a method for producing the same

Method of producing a semiconductor sensor component

Method for producing micromechanic sensors and sensors produced by...

Method for production of a semiconductor component and a semiconduc...

Micromechanical component

Micromechanical component and pressure sensor having a component of...

Micromechanical component and manufacturing method

Micromechanical component with different doping types so that one t...

Micromechanical diaphragm

Micromechanical component and appropriate manufacturing method

Patents Applicationslast 30 patents

Gas sensor and method for analyzing the measured variables

OPTICAL GAS SENSOR DEVICE AND METHOD FOR DETERMINING THE CONCENTRAT...

Micromechanical sensor element and sensor device having this type o...

METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...

METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...

Method for producing a semiconductor component and a semiconductor...

Corrosion Protection for Pressure Sensors

Pressure sensor featuring pressure loading of the fastening element

Micromechanical component and method

Micromechanical sensor element

Sensor element with trenched cavity

Method and micromechanical component

Method for producing a semiconductor component and a semiconductor...

Method for manufacturing a semiconductor component, as well as a se...

Method for manufacturing a semicondutor component, as well as a sem...

Micromechanical sensor

Power supply device for a tire-pressure sensor

Method for producing cavities having optically transparent wall

Micromechanical apparatus, pressure sensor, and method

Semicoductor component and a method for producing the same

Method for producing optically transparent regions in a silicon sub...

Method for producing micromechanic sensors and sensors produced by...

Method for producing a semiconductor component and a semiconductor...

Micromechanical component and corresponding production method

Method for producing a semiconductor component having a movable mas...

Micromechanical component

Micromechanical component and corresponing production method

Micromechanical diaphragm

Micromechanical component

Method for production of a semiconductor component and a semiconduc...