Frank Voss

Person

Bad Gandersheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Energy monitor for molecular fluorine laser
- Patent number 6,907,058
- Issue date Jun 14, 2005
- Lambda Physik AG
- Klaus Vogler
- G01 - MEASURING TESTING
Information Patent Grant
Molecular fluorine laser with intracavity polarization enhancer
- Patent number 6,834,069
- Issue date Dec 21, 2004
- Lambda Physik AG
- Elko Bergmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molecular fluorine laser system
- Patent number 6,690,703
- Issue date Feb 10, 2004
- Lambda Physik AG
- Klaus Wolfgang Vogler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
F2-laser with line selection
- Patent number 6,556,613
- Issue date Apr 29, 2003
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam parameter monitoring unit for a molecular fluorine (F2) laser
- Patent number 6,529,533
- Issue date Mar 4, 2003
- Lambda Physik AG
- Frank Voss
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection of F2-concentration for power stabilization of an F2-157...
- Patent number 6,526,084
- Issue date Feb 25, 2003
- Lambda Physik AG
- Frank Voss
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam delivery system for molecular fluorine (F2) laser
- Patent number 6,490,305
- Issue date Dec 3, 2002
- Lambda Physik AG
- Sergei V. Govorkov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Beam delivery system for molecular fluorine (F2) laser
- Patent number 6,487,229
- Issue date Nov 26, 2002
- Lambda Physik AG
- Sergei V. Govorkov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
F2-laser with line selection
- Patent number 6,477,187
- Issue date Nov 5, 2002
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
F2-laser with line selection
- Patent number 6,466,598
- Issue date Oct 15, 2002
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser
- Patent number 6,459,720
- Issue date Oct 1, 2002
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
F2-laser with line selection
- Patent number 6,345,065
- Issue date Feb 5, 2002
- Lambda Physik AG
- Jürgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam delivery system for molecular fluorine (F2) laser
- Patent number 6,327,290
- Issue date Dec 4, 2001
- Lambda Physik AG
- Sergei V. Govorkov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Very stable excimer or molecular fluorine laser
- Patent number 6,243,405
- Issue date Jun 5, 2001
- Lambda Physik AG
- Stefan Borneis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
F.sub.2 (157nm) laser employing neon as the buffer gas
- Patent number 6,157,662
- Issue date Dec 5, 2000
- Lambda Physik GmbH
- Michael Scaggs
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Gas purification in an excimer laser using a stirling cycle cooler
- Publication number 20070268944
- Publication date Nov 22, 2007
- Frank Voss
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
Beam delivery system for lithographic exposure radiation source
- Publication number 20030095580
- Publication date May 22, 2003
- Sergei V. Govorkov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Beam delivery system for molecular fluorine (F2) laser
- Publication number 20020041614
- Publication date Apr 11, 2002
- Lambda Physik AG
- Sergei V. Govorkov
- G01 - MEASURING TESTING
Information Patent Application
F2-laser with line selection
- Publication number 20020041616
- Publication date Apr 11, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
F2-laser with line selection
- Publication number 20020034206
- Publication date Mar 21, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam delivery system for molecular fluorine (F2) laser
- Publication number 20020034207
- Publication date Mar 21, 2002
- Lambda Physik AG
- Sergei V. Govorkov
- G01 - MEASURING TESTING
Information Patent Application
F2-laser with line selection
- Publication number 20020015431
- Publication date Feb 7, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Excimer laser
- Publication number 20020015432
- Publication date Feb 7, 2002
- Lambda Physik AG
- Jurgen Kleinschmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Energy monitor for molecular fluorine laser
- Publication number 20010028664
- Publication date Oct 11, 2001
- Klaus Vogler
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Energy monitor for molecular fluorine laser

Molecular fluorine laser with intracavity polarization enhancer

Molecular fluorine laser system

F2-laser with line selection

Beam parameter monitoring unit for a molecular fluorine (F2) laser

Detection of F2-concentration for power stabilization of an F2-157...

Beam delivery system for molecular fluorine (F2) laser

Beam delivery system for molecular fluorine (F2) laser

F2-laser with line selection

F2-laser with line selection

Excimer laser

F2-laser with line selection

Beam delivery system for molecular fluorine (F2) laser

Very stable excimer or molecular fluorine laser

F.sub.2 (157nm) laser employing neon as the buffer gas

Patents Applicationslast 30 patents

Gas purification in an excimer laser using a stirling cycle cooler

Beam delivery system for lithographic exposure radiation source

Beam delivery system for molecular fluorine (F2) laser

F2-laser with line selection

F2-laser with line selection

Beam delivery system for molecular fluorine (F2) laser

F2-laser with line selection

Excimer laser

Energy monitor for molecular fluorine laser