Frantisek BALON

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Buchs, CH

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etch chamber and method of plasma etching
- Patent number 11,387,079
- Issue date Jul 12, 2022
- EVATEC AG
- Frantisek Balon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum treatment chamber and method of manufacturing a vacuum treat...
- Patent number 11,145,495
- Issue date Oct 12, 2021
- EVATEC AG
- Frantisek Balon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APARATUS FOR LOW PARTICLE PLASMA ETCHING
- Publication number 20210319984
- Publication date Oct 14, 2021
- Evatec AG
- Jürgen Weichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCH CHAMBER AND METHOD OF PLASMA ETCHING
- Publication number 20190304757
- Publication date Oct 3, 2019
- Evatec AG
- Frantisek BALON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM TREATMENT CHAMBER AND METHOD OF MANUFACTURING A VACUUM TREAT...
- Publication number 20190252160
- Publication date Aug 15, 2019
- Evatec AG
- Frantisek Balon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM STRESS UNIFORMITY CONTROL BY RF COUPLING AND WAFER MOUNT WITH...
- Publication number 20170250099
- Publication date Aug 31, 2017
- EVATEC AG
- Frantisek BALON
- H01 - BASIC ELECTRIC ELEMENTS