Franz Dieterich

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Zurich, CH

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Patents Grantslast 30 patents

Information Patent Grant
Optical collector for collecting extreme ultraviolet radiation, met...
- Patent number 9,513,569
- Issue date Dec 6, 2016
- ETH Zurich
- Franz Dieterich
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
BEAM LINE FOR A SOURCE OF EXTREME ULTRAVIOLET (EUV) RADIATION
- Publication number 20130134318
- Publication date May 30, 2013
- Reza Abhari
- G02 - OPTICS
Information Patent Application
OPTICAL COLLECTOR COLLECTING EXTREME ULTRAVIOLET RADIATION, METHOD...
- Publication number 20130003167
- Publication date Jan 3, 2013
- Franz Dieterich
- B82 - NANO-TECHNOLOGY