Fu Tang

Person

Gilbert, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
- Patent number 12,094,936
- Issue date Sep 17, 2024
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing an oxide film on a substrate by a cyclical d...
- Patent number 11,923,192
- Issue date Mar 5, 2024
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
- Patent number 11,798,999
- Issue date Oct 24, 2023
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing an oxide film on a substrate by a cyclical d...
- Patent number 11,469,098
- Issue date Oct 11, 2022
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
- Patent number 11,411,088
- Issue date Aug 9, 2022
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a germanium oxynitride film
- Patent number 11,101,370
- Issue date Aug 24, 2021
- ASM IP Holding B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sulfur-containing thin films
- Patent number 10,854,444
- Issue date Dec 1, 2020
- ASM IP Holding B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
- Patent number 10,818,758
- Issue date Oct 27, 2020
- ASM IP Holding B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sulfur-containing thin films
- Patent number 10,553,424
- Issue date Feb 4, 2020
- ASM IP Holding B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for semiconductor passivation by nitridation after oxide re...
- Patent number 10,490,475
- Issue date Nov 26, 2019
- ASM IP Holding B.V.
- Qi Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for passivating a surface of a semiconductor and related sys...
- Patent number 10,410,943
- Issue date Sep 10, 2019
- ASM IP Holding B.V.
- Xiaoqiang Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a germanium oxynitride film
- Patent number 10,367,080
- Issue date Jul 30, 2019
- ASM IP Holding B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sulfur-containing thin films
- Patent number 10,199,213
- Issue date Feb 5, 2019
- ASM IP Holding B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for gas-phase passivation of a semiconductor surface
- Patent number 9,911,676
- Issue date Mar 6, 2018
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for gas-phase passivation of a semiconductor surface
- Patent number 9,905,492
- Issue date Feb 27, 2018
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal selenide and metal telluride thin films for semiconductor dev...
- Patent number 9,741,815
- Issue date Aug 22, 2017
- ASM IP Holding B.V.
- Qi Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sulfur-containing thin films
- Patent number 9,721,786
- Issue date Aug 1, 2017
- ASM IP Holding B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for semiconductor passivation by nitridation
- Patent number 9,711,350
- Issue date Jul 18, 2017
- ASM IP Holding B.V.
- Qi Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming metal chalcogenide thin films on a semiconductor...
- Patent number 9,711,396
- Issue date Jul 18, 2017
- ASM IP Holding B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for gas-phase sulfur passivation of a semiconduct...
- Patent number 9,558,931
- Issue date Jan 31, 2017
- ASM IP Holding B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sulfur-containing thin films
- Patent number 9,478,419
- Issue date Oct 25, 2016
- ASM IP Holding B.V.
- Suvi P. Haukka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming source/drain contact structure with chalcogen pa...
- Patent number 9,461,134
- Issue date Oct 4, 2016
- ASM IP Holding B.V.
- Qi Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sulfur-containing thin films
- Patent number 9,245,742
- Issue date Jan 26, 2016
- ASM IP Holding B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE
- Publication number 20250043422
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD, SYSTEM AND APPARATUS FOR FORMING METAL OXIDE LAYERS
- Publication number 20250034701
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Bo Yin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...
- Publication number 20240234129
- Publication date Jul 11, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAYER DEPOSITION WITH POST-DEPOSITION AGGLOMERATION MITIGATION
- Publication number 20240229233
- Publication date Jul 11, 2024
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING AN OXIDE FILM ON A SUBSTRATE BY A CYCLICAL D...
- Publication number 20240186138
- Publication date Jun 6, 2024
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEMS FOR FORMING DEVICE STRUCTURES INCLUDING HIGH-K D...
- Publication number 20240072104
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...
- Publication number 20240030296
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF GATE STACKS COMPRISING A THRESHOLD VOLTAGE TUNING LAYER
- Publication number 20230197796
- Publication date Jun 22, 2023
- ASM IP HOLDING B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR FORMING DOPED SILICON NITRIDE FILMS
- Publication number 20230126516
- Publication date Apr 27, 2023
- ASM IP HOLDING B.V.
- Xingye Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING AN OXIDE FILM ON A SUBSTRATE BY A CYCLICAL D...
- Publication number 20230015724
- Publication date Jan 19, 2023
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...
- Publication number 20220367647
- Publication date Nov 17, 2022
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...
- Publication number 20210005723
- Publication date Jan 7, 2021
- ASM IP HOLDING B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SULFUR-CONTAINING THIN FILMS
- Publication number 20200266054
- Publication date Aug 20, 2020
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A STRUCTURE INCLUDING SILICON NITRIDE ON TITANIUM...
- Publication number 20200181770
- Publication date Jun 11, 2020
- ASM IP HOLDING B.V.
- Delphine Longrie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...
- Publication number 20200161438
- Publication date May 21, 2020
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A GERMANIUM OXYNITRIDE FILM
- Publication number 20190378916
- Publication date Dec 12, 2019
- ASM IP HOLDING B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING AN OXIDE FILM ON A SUBSTRATE BY A CYCLICAL D...
- Publication number 20190348273
- Publication date Nov 14, 2019
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SULFUR-CONTAINING THIN FILMS
- Publication number 20190259605
- Publication date Aug 22, 2019
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PASSIVATING A SURFACE OF A SEMICONDUCTOR AND RELATED SYS...
- Publication number 20180108587
- Publication date Apr 19, 2018
- ASM IP HOLDING B.V.
- Xiaoqiang Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SULFUR-CONTAINING THIN FILMS
- Publication number 20180068846
- Publication date Mar 8, 2018
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A GERMANIUM OXYNITRIDE FILM
- Publication number 20170317194
- Publication date Nov 2, 2017
- ASM IP HOLDING B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GAS-PHASE PASSIVATION OF A SEMICONDUCTOR SURFACE
- Publication number 20170117202
- Publication date Apr 27, 2017
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR GAS-PHASE PASSIVATION OF A SEMICONDUCTOR SURFACE
- Publication number 20170117203
- Publication date Apr 27, 2017
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPLEMENTING ATOMIC LAYER DEPOSITION FOR GATE DIELECTRICS
- Publication number 20170110313
- Publication date Apr 20, 2017
- ASM IP HOLDING B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING METAL CHALCOGENIDE THIN FILMS ON A SEMICONDUCTOR...
- Publication number 20160372365
- Publication date Dec 22, 2016
- ASM IP HOLDING B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL SELENIDE AND METAL TELLURIDE THIN FILMS FOR SEMICONDUCTOR DEV...
- Publication number 20160372543
- Publication date Dec 22, 2016
- ASM IP HOLDING B.V.
- Qi Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SEMICONDUCTOR PASSIVATION BY NITRIDATION
- Publication number 20160358772
- Publication date Dec 8, 2016
- ASM IP HOLDING B.V.
- Qi Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SEMICONDUCTOR PASSIVATION BY NITRIDATION AFTER OXIDE RE...
- Publication number 20160358835
- Publication date Dec 8, 2016
- ASM IP HOLDING B.V.
- Qi Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING OXIDE LAYER BY OXIDIZING SEMICONDUCTOR SUBSTRATE...
- Publication number 20160240373
- Publication date Aug 18, 2016
- ASM IP HOLDING B.V.
- Fu Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SULFUR-CONTAINING THIN FILMS
- Publication number 20160203974
- Publication date Jul 14, 2016
- ASM IP HOLDING B.V.
- Suvi P. Haukka
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Methods for forming a metal silicate film on a substrate in a react...

Methods for depositing an oxide film on a substrate by a cyclical d...

Methods for forming a metal silicate film on a substrate in a react...

Methods for depositing an oxide film on a substrate by a cyclical d...

Methods for forming a metal silicate film on a substrate in a react...

Method of forming a germanium oxynitride film

Sulfur-containing thin films

Methods for forming a metal silicate film on a substrate in a react...

Sulfur-containing thin films

Methods for semiconductor passivation by nitridation after oxide re...

Method for passivating a surface of a semiconductor and related sys...

Method of forming a germanium oxynitride film

Sulfur-containing thin films

System and method for gas-phase passivation of a semiconductor surface

System and method for gas-phase passivation of a semiconductor surface

Metal selenide and metal telluride thin films for semiconductor dev...

Sulfur-containing thin films

Methods for semiconductor passivation by nitridation

Method for forming metal chalcogenide thin films on a semiconductor...

System and method for gas-phase sulfur passivation of a semiconduct...

Sulfur-containing thin films

Method for forming source/drain contact structure with chalcogen pa...

Sulfur-containing thin films

Patents Applicationslast 30 patents

METHOD, SYSTEM AND APPARATUS FOR TREATING SUBSTRATE SURFACE

METHOD, SYSTEM AND APPARATUS FOR FORMING METAL OXIDE LAYERS

METHODS AND SYSTEMS FOR FORMING STRUCTURES COMPRISING A THRESHOLD V...

LAYER DEPOSITION WITH POST-DEPOSITION AGGLOMERATION MITIGATION

METHODS FOR DEPOSITING AN OXIDE FILM ON A SUBSTRATE BY A CYCLICAL D...

METHOD AND SYSTEMS FOR FORMING DEVICE STRUCTURES INCLUDING HIGH-K D...

METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...

FORMATION OF GATE STACKS COMPRISING A THRESHOLD VOLTAGE TUNING LAYER

METHODS AND SYSTEMS FOR FORMING DOPED SILICON NITRIDE FILMS

METHODS FOR DEPOSITING AN OXIDE FILM ON A SUBSTRATE BY A CYCLICAL D...

METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...

METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...

SULFUR-CONTAINING THIN FILMS

METHOD OF FORMING A STRUCTURE INCLUDING SILICON NITRIDE ON TITANIUM...

METHODS FOR FORMING A METAL SILICATE FILM ON A SUBSTRATE IN A REACT...

METHOD OF FORMING A GERMANIUM OXYNITRIDE FILM

METHODS FOR DEPOSITING AN OXIDE FILM ON A SUBSTRATE BY A CYCLICAL D...

SULFUR-CONTAINING THIN FILMS

METHOD FOR PASSIVATING A SURFACE OF A SEMICONDUCTOR AND RELATED SYS...

SULFUR-CONTAINING THIN FILMS

METHOD OF FORMING A GERMANIUM OXYNITRIDE FILM

SYSTEM AND METHOD FOR GAS-PHASE PASSIVATION OF A SEMICONDUCTOR SURFACE

SYSTEM AND METHOD FOR GAS-PHASE PASSIVATION OF A SEMICONDUCTOR SURFACE

IMPLEMENTING ATOMIC LAYER DEPOSITION FOR GATE DIELECTRICS

METHOD FOR FORMING METAL CHALCOGENIDE THIN FILMS ON A SEMICONDUCTOR...

METAL SELENIDE AND METAL TELLURIDE THIN FILMS FOR SEMICONDUCTOR DEV...

METHODS FOR SEMICONDUCTOR PASSIVATION BY NITRIDATION

METHODS FOR SEMICONDUCTOR PASSIVATION BY NITRIDATION AFTER OXIDE RE...

METHOD FOR FORMING OXIDE LAYER BY OXIDIZING SEMICONDUCTOR SUBSTRATE...

SULFUR-CONTAINING THIN FILMS