Fufa Chen

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Coater with automatic cleaning function and coater automatic cleani...
- Patent number 12,111,575
- Issue date Oct 8, 2024
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for cleaning semiconductor wafers
- Patent number 11,967,497
- Issue date Apr 23, 2024
- ACM Research (Shanghai) Inc.
- Jun Wang
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning substrates
- Patent number 11,911,807
- Issue date Feb 27, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and system for cleaning semiconductor wafers
- Patent number 11,581,205
- Issue date Feb 14, 2023
- ACM Research, Inc.
- Hui Wang
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for cleaning semiconductor wafers
- Patent number 11,257,667
- Issue date Feb 22, 2022
- ACM Research (Shanghai) Inc.
- Jun Wang
- B08 - CLEANING
Information Patent Grant
Methods and system for cleaning semiconductor wafers
- Patent number 10,910,244
- Issue date Feb 2, 2021
- ACM Research, Inc.
- Hui Wang
- B08 - CLEANING
Information Patent Grant
Coater with automatic cleaning function and coater automatic cleani...
- Patent number 10,816,901
- Issue date Oct 27, 2020
- ACM Research (Shanghai) Inc.
- Hui Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate supporting apparatus
- Patent number 10,770,335
- Issue date Sep 8, 2020
- ACM Research (Shanghai) Inc.
- Fufa Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for cleaning semiconductor wafers
- Patent number 8,671,961
- Issue date Mar 18, 2014
- ACM Research (Shanghai) Inc.
- Voha Nuch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for cleaning semiconductor wafers
- Patent number 8,580,042
- Issue date Nov 12, 2013
- ACM Research (Shanghai) Inc.
- Voha Nuch
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
- Publication number 20220139697
- Publication date May 5, 2022
- ACM Research (Shanghai) Inc.
- Jun Wang
- B08 - CLEANING
Information Patent Application
METHOD AND APPARATUS FOR CLEANING SUBSTRATES
- Publication number 20210394239
- Publication date Dec 23, 2021
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEM FOR CLEANING SEMICONDUCTOR WAFERS
- Publication number 20210125848
- Publication date Apr 29, 2021
- ACM Research (Shanghai) Inc.
- Hui Wang
- B08 - CLEANING
Information Patent Application
COATER WITH AUTOMATIC CLEANING FUNCTION AND COATER AUTOMATIC CLEANI...
- Publication number 20210072645
- Publication date Mar 11, 2021
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CLEANING SUBSTRATES
- Publication number 20210035821
- Publication date Feb 4, 2021
- ACM Research (Shanghai) Inc.
- Hui Wang
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR CLEANING SUBSTRATES
- Publication number 20210031243
- Publication date Feb 4, 2021
- ACM Research (Shanghai) Inc.
- Hui Wang
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
- Publication number 20200335325
- Publication date Oct 22, 2020
- ACM Research (Shanghai) Inc.
- Jun Wang
- B08 - CLEANING
Information Patent Application
SUBSTRATE SUPPORTING APPARATUS
- Publication number 20190311938
- Publication date Oct 10, 2019
- ACM Research (Shanghai) Inc.
- Fufa Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
- Publication number 20180151398
- Publication date May 31, 2018
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATER WITH AUTOMATIC CLEANING FUNCTION AND COATER AUTOMATIC CLEANI...
- Publication number 20170248848
- Publication date Aug 31, 2017
- ACM Research (Shanghai) Inc.
- Hui Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Methods and Apparatus for Cleaning Semiconductor Wafers
- Publication number 20140034094
- Publication date Feb 6, 2014
- ACM Research (Shanghai) Inc.
- Voha Nuch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS
- Publication number 20110114120
- Publication date May 19, 2011
- Voha Nuch
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Coater with automatic cleaning function and coater automatic cleani...

Methods and apparatus for cleaning semiconductor wafers

Method and apparatus for cleaning substrates

Methods and system for cleaning semiconductor wafers

Methods and apparatus for cleaning semiconductor wafers

Methods and system for cleaning semiconductor wafers

Coater with automatic cleaning function and coater automatic cleani...

Substrate supporting apparatus

Methods and apparatus for cleaning semiconductor wafers

Methods and apparatus for cleaning semiconductor wafers

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS

METHOD AND APPARATUS FOR CLEANING SUBSTRATES

METHODS AND SYSTEM FOR CLEANING SEMICONDUCTOR WAFERS

COATER WITH AUTOMATIC CLEANING FUNCTION AND COATER AUTOMATIC CLEANI...

METHODS AND APPARATUS FOR CLEANING SUBSTRATES

METHODS AND APPARATUS FOR CLEANING SUBSTRATES

METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS

SUBSTRATE SUPPORTING APPARATUS

METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS

COATER WITH AUTOMATIC CLEANING FUNCTION AND COATER AUTOMATIC CLEANI...

Methods and Apparatus for Cleaning Semiconductor Wafers

METHODS AND APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS