Fumio Mizuno

Person

Tokorozawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Microstructured pattern inspection method
- Patent number 8,304,724
- Issue date Nov 6, 2012
- Hitachi, Ltd.
- Fumihiro Sasajima
- G01 - MEASURING TESTING
Information Patent Grant
Microstructured pattern inspection method
- Patent number 7,791,021
- Issue date Sep 7, 2010
- Hitachi, Ltd.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,642,514
- Issue date Jan 5, 2010
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Microstructured pattern inspection method
- Patent number 7,435,959
- Issue date Oct 14, 2008
- Hitachi, Ltd.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,329,868
- Issue date Feb 12, 2008
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Microstructured pattern inspection method
- Patent number 7,217,923
- Issue date May 15, 2007
- Hitachi, Ltd.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,109,485
- Issue date Sep 19, 2006
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 6,936,818
- Issue date Aug 30, 2005
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Microstructured pattern inspection method
- Patent number 6,936,819
- Issue date Aug 30, 2005
- Hitachi, Ltd.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Microstructured pattern inspection method
- Patent number 6,765,204
- Issue date Jul 20, 2004
- Hitachi, Ltd.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process management system
- Patent number 6,757,621
- Issue date Jun 29, 2004
- Hitachi, Ltd.
- Fumio Mizuno
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 6,653,633
- Issue date Nov 25, 2003
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Microstructured pattern inspection method
- Patent number 6,573,499
- Issue date Jun 3, 2003
- Hitachi, Ltd.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process control system
- Patent number 6,542,830
- Issue date Apr 1, 2003
- Hitachi, Ltd.
- Fumio Mizuno
- G01 - MEASURING TESTING
Information Patent Grant
Image-formation apparatus using charged particle beams under variou...
- Patent number 6,538,249
- Issue date Mar 25, 2003
- Hitachi, Ltd.
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Manufacturing method or an exposing method for a semiconductor devi...
- Patent number RE37996
- Issue date Feb 18, 2003
- Hitachi, Ltd.
- Fumio Mizuno
- 430 - Radiation imagery chemistry: process, composition, or product thereof
Information Patent Grant
Sample CD measurement system
- Patent number 6,157,451
- Issue date Dec 5, 2000
- Hitachi, Ltd.
- Fumio Mizuno
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope and method for dimension measuring by...
- Patent number 6,114,695
- Issue date Sep 5, 2000
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Sample analyzing apparatus
- Patent number 6,072,178
- Issue date Jun 6, 2000
- Hitachi, Ltd.
- Fumio Mizuno
- G01 - MEASURING TESTING
Information Patent Grant
Pattern defect inspecting apparatus
- Patent number 6,067,153
- Issue date May 23, 2000
- Hitachi, Ltd.
- Fumio Mizuno
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of and apparatus for pattern inspection
- Patent number 6,047,083
- Issue date Apr 4, 2000
- Hitachi, Ltd.
- Fumio Mizuno
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope and method for dimension measuring by...
- Patent number 5,969,357
- Issue date Oct 19, 1999
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Resist removing method, and curable pressure-sensitive adhesive, ad...
- Patent number 5,959,011
- Issue date Sep 28, 1999
- Nitto Denko Corporation
- Fumio Mizuno
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Scanning electron microscope and method for dimension measuring by...
- Patent number 5,866,904
- Issue date Feb 2, 1999
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Pattern shape inspection apparatus for forming specimen image on di...
- Patent number 5,777,327
- Issue date Jul 7, 1998
- Hitachi, Ltd.
- Fumio Mizuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring critical dimension of pattern on sample
- Patent number 5,750,990
- Issue date May 12, 1998
- Hitachi, Ltd.
- Fumio Mizuno
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Manufacturing method or an exposing method for a semiconductor devi...
- Patent number 5,736,300
- Issue date Apr 7, 1998
- Hitachi, Ltd.
- Fumio Mizuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning electron microscope and method for dimension measuring by...
- Patent number 5,594,245
- Issue date Jan 14, 1997
- Hitachi, Ltd.
- Hideo Todokoro
- G01 - MEASURING TESTING
Information Patent Grant
Manufacturing method or an exposing method for a semiconductor devi...
- Patent number 5,578,422
- Issue date Nov 26, 1996
- Hitachi, Ltd.
- Fumio Mizuno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist removing method, and curable pressure-sensitive adhesive, ad...
- Patent number 5,466,325
- Issue date Nov 14, 1995
- Nitto Denko Corporation
- Fumio Mizuno
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
MICROSTRUCTURED PATTERN INSPECTION METHOD
- Publication number 20100314541
- Publication date Dec 16, 2010
- HITACHI, LTD.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MICROSTRUCTURED PATTERN INSPECTION METHOD
- Publication number 20090020699
- Publication date Jan 22, 2009
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20080116376
- Publication date May 22, 2008
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Microstructured pattern inspection method
- Publication number 20070290697
- Publication date Dec 20, 2007
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20070023657
- Publication date Feb 1, 2007
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Microstructured pattern inspection method
- Publication number 20050277029
- Publication date Dec 15, 2005
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20050184237
- Publication date Aug 25, 2005
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Microstructured pattern inspection method
- Publication number 20040217288
- Publication date Nov 4, 2004
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20040069956
- Publication date Apr 15, 2004
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Microstructured pattern inspection method
- Publication number 20030168596
- Publication date Sep 11, 2003
- Hitachi, Ltd
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20030136907
- Publication date Jul 24, 2003
- Hitachi, Ltd
- Atsushi Takane
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Process management system
- Publication number 20030130806
- Publication date Jul 10, 2003
- Hitachi, Ltd
- Fumio Mizuno
- G01 - MEASURING TESTING

Fumio Mizuno

Person

Patents Grantslast 30 patents

Microstructured pattern inspection method

Microstructured pattern inspection method

Charged particle beam apparatus

Microstructured pattern inspection method

Charged particle beam apparatus

Microstructured pattern inspection method

Charged particle beam apparatus

Charged particle beam apparatus

Microstructured pattern inspection method

Microstructured pattern inspection method

Process management system

Charged particle beam apparatus

Microstructured pattern inspection method

Process control system

Image-formation apparatus using charged particle beams under variou...

Manufacturing method or an exposing method for a semiconductor devi...

Sample CD measurement system

Scanning electron microscope and method for dimension measuring by...

Sample analyzing apparatus

Pattern defect inspecting apparatus

Method of and apparatus for pattern inspection

Scanning electron microscope and method for dimension measuring by...

Resist removing method, and curable pressure-sensitive adhesive, ad...

Scanning electron microscope and method for dimension measuring by...

Pattern shape inspection apparatus for forming specimen image on di...

Method for measuring critical dimension of pattern on sample

Manufacturing method or an exposing method for a semiconductor devi...

Scanning electron microscope and method for dimension measuring by...

Manufacturing method or an exposing method for a semiconductor devi...

Resist removing method, and curable pressure-sensitive adhesive, ad...

Patents Applicationslast 30 patents

MICROSTRUCTURED PATTERN INSPECTION METHOD

MICROSTRUCTURED PATTERN INSPECTION METHOD

Charged particle beam apparatus

Microstructured pattern inspection method

Charged particle beam apparatus

Microstructured pattern inspection method

Charged particle beam apparatus

Microstructured pattern inspection method

Charged particle beam apparatus

Microstructured pattern inspection method

Charged particle beam apparatus

Process management system