Fumio Satou

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Kikuchi-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,770,149
- Issue date Aug 3, 2004
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,398,879
- Issue date Jun 4, 2002
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,391,110
- Issue date May 21, 2002
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate cleaning unit and cleaning method
- Patent number 6,261,378
- Issue date Jul 17, 2001
- Tokyo Electron Limited
- Hiroshi Hashimoto
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,159,288
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for supplying process solution to surface of s...
- Patent number 5,945,161
- Issue date Aug 31, 1999
- Tokyo Electron Limited
- Hiroshi Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for cleaning treatment
- Publication number 20020162574
- Publication date Nov 7, 2002
- Fumio Satou
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC