Membership
Tour
Register
Log in
Fumitoshi Sugimoto
Follow
Person
Kawasaki, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Exposure mask, its manufacture method, pattern transfer method, pat...
Patent number
7,887,977
Issue date
Feb 15, 2011
Fujitsu Semiconductor Limited
Fumitoshi Sugimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor device manufacturing method, mask manufacturing metho...
Patent number
7,820,364
Issue date
Oct 26, 2010
Fujitsu Semiconductor Limited
Fumitoshi Sugimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for fabricating semiconductor device and exposure mask
Patent number
7,741,016
Issue date
Jun 22, 2010
Fujitsu Semiconductor Limited
Fumitoshi Sugimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method for upper layer of hole of semiconductor device
Patent number
7,678,693
Issue date
Mar 16, 2010
Fujitsu Microelectronics Limited
Fumitoshi Sugimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for uniformly polishing a wafer
Patent number
5,562,529
Issue date
Oct 8, 1996
Fujitsu Limited
Sadahiro Kishii
B24 - GRINDING POLISHING
Information
Patent Grant
Composite semiconductor substrate having a single crystal substrate...
Patent number
5,506,433
Issue date
Apr 9, 1996
Fujitsu Limited
Tatsuya Ohori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Composite semiconductor substrate and a fabrication process thereof
Patent number
5,413,951
Issue date
May 9, 1995
Fujitsu Limited
Tatsuya Ohori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device using SOI substrate
Patent number
5,017,998
Issue date
May 21, 1991
Fujitsu Limited
Takao Miura
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Exposure mask, its manufacture method, pattern transfer method, pat...
Publication number
20080138722
Publication date
Jun 12, 2008
Fujitsu Limited
Fumitoshi Sugimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure method for upper layer of hole of semiconductor device
Publication number
20080032437
Publication date
Feb 7, 2008
FUJITSU LIMITED
Fumitoshi Sugimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for fabricating semiconductor device and exposure mask
Publication number
20080020329
Publication date
Jan 24, 2008
FUJITSU LIMITED
Fumitoshi Sugimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor device manufacturing method, mask manufacturing metho...
Publication number
20070166627
Publication date
Jul 19, 2007
FUJITSU LIMITED
Fumitoshi Sugimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor manufacturing method and an exposure mask
Publication number
20060003235
Publication date
Jan 5, 2006
FUJITSU LIMITED
Fumitoshi Sugimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY