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Gaku FURUTA

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  • Sunnyvale, CA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    HEAT CONDUCTIVE SPACER FOR PLASMA PROCESSING CHAMBER
    • Publication number 20200098549
    • Publication date Mar 26, 2020
    • Applied Materials, Inc.
    • Beom Soo PARK
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Silicon nitride forming precursor control
    • Publication number 20200058497
    • Publication date Feb 20, 2020
    • Applied Materials, Inc.
    • Tae Kyung Won
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CHAMBER LINER
    • Publication number 20200043706
    • Publication date Feb 6, 2020
    • Applied Materials, Inc.
    • Jianheng LI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE
    • Publication number 20190193233
    • Publication date Jun 27, 2019
    • Applied Materials, Inc.
    • Ilyoung HONG
    • B24 - GRINDING POLISHING
  • Information Patent Application

    SHADOW FRAME WITH SIDES HAVING A VARIED PROFILE FOR IMPROVED DEPOSI...
    • Publication number 20190096624
    • Publication date Mar 28, 2019
    • Applied Materials, Inc.
    • Gaku FURUTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DIFFUSER FOR UNIFORMITY IMPROVEMENT IN DISPLAY PECVD APPLICATIONS
    • Publication number 20180340257
    • Publication date Nov 29, 2018
    • Applied Materials, Inc.
    • Umesha ACHARY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Diffuser With Corner HCG
    • Publication number 20180090300
    • Publication date Mar 29, 2018
    • Applied Materials, Inc.
    • Lai ZHAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT WITH QUADRANTS
    • Publication number 20170231033
    • Publication date Aug 10, 2017
    • Applied Materials, Inc.
    • Robin L. TINER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS DIFFUSER HAVING GROOVED HOLLOW CATHODES
    • Publication number 20170178867
    • Publication date Jun 22, 2017
    • Applied Materials, Inc.
    • Jozef KUDELA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS FOR FORMING A SILICON CONTAINING DIELECTRIC FILM USING A GA...
    • Publication number 20170092492
    • Publication date Mar 30, 2017
    • Applied Materials, Inc.
    • Lai ZHAO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    GROUND RETURN FOR PLASMA PROCESSES
    • Publication number 20160305025
    • Publication date Oct 20, 2016
    • Applied Materials, Inc.
    • Soo Young CHOI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LOW TEMPERATURE MULTILAYER DIELECTRIC FILM FOR PASSIVATION AND CAPA...
    • Publication number 20160240312
    • Publication date Aug 18, 2016
    • Applied Materials, Inc.
    • Dapeng WANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TIGHTLY FITTED CERAMIC INSULATOR ON LARGE AREA ELECTRODE
    • Publication number 20150273490
    • Publication date Oct 1, 2015
    • Applied Materials, Inc.
    • Jozef KUDELA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    RUN-TO-RUN STABILITY OF FILM DEPOSITION
    • Publication number 20150270107
    • Publication date Sep 24, 2015
    • Applied Materials, Inc.
    • Lai ZHAO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CORNER SPOILER FOR IMPROVING PROFILE UNIFORMITY
    • Publication number 20150211120
    • Publication date Jul 30, 2015
    • Applied Materials, Inc.
    • Lai ZHAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    A-SI SEASONING EFFECT TO IMPROVE SIN RUN-TO-RUN UNIFORMITY
    • Publication number 20150179426
    • Publication date Jun 25, 2015
    • Applied Materials, Inc.
    • Gaku FURUTA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE SUPPORT WITH QUADRANTS
    • Publication number 20150114948
    • Publication date Apr 30, 2015
    • Applied Materials, Inc.
    • Robin L. TINER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FLIP EDGE SHADOW FRAME
    • Publication number 20140251216
    • Publication date Sep 11, 2014
    • Qunhua WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FLIP EDGE SHADOW FRAME
    • Publication number 20130263782
    • Publication date Oct 10, 2013
    • Applied Materials, Inc.
    • QUNHUA WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT WITH CERAMIC INSULATION
    • Publication number 20130228124
    • Publication date Sep 5, 2013
    • Gaku FURUTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ROBUST OUTLET PLUMBING FOR HIGH POWER FLOW REMOTE PLASMA SOURCE
    • Publication number 20130140009
    • Publication date Jun 6, 2013
    • John M. White
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    A-SI SEASONING EFFECT TO IMPROVE SIN RUN-TO-RUN UNIFORMITY
    • Publication number 20120040536
    • Publication date Feb 16, 2012
    • Applied Materials, Inc.
    • Gaku Furuta
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TIGHTLY FITTED CERAMIC INSULATOR ON LARGE AREA ELECTRODE
    • Publication number 20110284100
    • Publication date Nov 24, 2011
    • Applied Materials, Inc.
    • JOZEF KUDELA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    THIN FILM TRANSISTORS HAVING MULTIPLE DOPED SILICON LAYERS
    • Publication number 20110269274
    • Publication date Nov 3, 2011
    • Applied Materials, Inc.
    • Gaku Furuta
    • G02 - OPTICS
  • Information Patent Application

    Plasma processing including asymmetrically grounding a susceptor
    • Publication number 20110236599
    • Publication date Sep 29, 2011
    • Applied Materials, Inc.
    • Gaku FURUTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD WITH INSULATED CORNER REGIONS
    • Publication number 20110146577
    • Publication date Jun 23, 2011
    • Applied Materials, Inc.
    • SUHAIL ANWAR
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of cleaning a CVD processing chamber
    • Publication number 20110041873
    • Publication date Feb 24, 2011
    • APPLIED MATERIALS, INC.
    • Gaku Furuta
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ANODIZED SHOWERHEAD
    • Publication number 20100288197
    • Publication date Nov 18, 2010
    • Applied Materials, Inc.
    • Soo Young Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GROUND RETURN FOR PLASMA PROCESSES
    • Publication number 20100196626
    • Publication date Aug 5, 2010
    • Applied Materials, Inc.
    • Soo Young Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD TO PREVENT THIN SPOT IN LARGE SIZE SYSTEM
    • Publication number 20100151688
    • Publication date Jun 17, 2010
    • Applied Materials, Inc.
    • Young Jin Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...