Gaku Furuta

Follow

Person

Osaka, JP

People

Patents Applicationslast 30 patents

Information Patent Application
GAS DISTRIBUTION UNIFORMITY IMPROVEMENT BY BAFFLE PLATE WITH MULTI-...
- Publication number 20080178807
- Publication date Jul 31, 2008
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas distribution uniformity improvement by baffle plate with multi-...
- Publication number 20060228490
- Publication date Oct 12, 2006
- APPLIED MATERIALS, INC.
- Qunhua Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...