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Patents Grants
last 30 patents
Information
Patent Grant
Control circuit, pulsed power supply system, and semiconductor proc...
Patent number
11,955,313
Issue date
Apr 9, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Gang Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for pulse modulation of radio frequency power sup...
Patent number
11,749,502
Issue date
Sep 5, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Gang Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Induction coil assembly and reaction chamber
Patent number
11,626,268
Issue date
Apr 11, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Chen Niu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control method of radiofrequency source
Patent number
11,615,942
Issue date
Mar 28, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Yahui Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lower electrode mechanism and reaction chamber
Patent number
11,410,833
Issue date
Aug 9, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Yahui Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adjustable capacitor, impedance matching device and semiconductor p...
Patent number
11,189,465
Issue date
Nov 30, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Gang Wei
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Method and device for radio frequency impedance matching, and semic...
Patent number
11,114,281
Issue date
Sep 7, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Gang Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radio frequency pulse matching method and device thereof and pulsin...
Patent number
11,056,316
Issue date
Jul 6, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xiaoyang Cheng
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma processing apparatus
Patent number
10,984,993
Issue date
Apr 20, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Peng Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Impedance matching method, impedance matching device and plasma gen...
Patent number
10,886,105
Issue date
Jan 5, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Filter circuit, heating circuit, and semiconductor processing appar...
Patent number
10,879,866
Issue date
Dec 29, 2020
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xiaoyang Cheng
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Reaction chamber and plasma processing apparatus
Patent number
10,854,482
Issue date
Dec 1, 2020
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xingcun Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impedance matching system, impedance matching method, and semicondu...
Patent number
10,699,881
Issue date
Jun 30, 2020
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jing Wei
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Method of operating semiconductor manufacturing apparatus and semic...
Patent number
10,170,285
Issue date
Jan 1, 2019
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jinrong Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for inspecting and validating flight procedure
Patent number
9,902,503
Issue date
Feb 27, 2018
FLIGHT INSPECTION CENTER OF CAAC
Wei Su
B64 - AIRCRAFT AVIATION COSMONAUTICS
Information
Patent Grant
Apparatus for plasma treatment and method of operating the apparatus
Patent number
9,899,194
Issue date
Feb 20, 2018
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Jinrong Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Connection device for means of airplane
Patent number
9,481,445
Issue date
Nov 1, 2016
Airbus S.A.S.
Gang Wei
B64 - AIRCRAFT AVIATION COSMONAUTICS
Information
Patent Grant
Substrate etching method and substrate processing device
Patent number
9,187,319
Issue date
Nov 17, 2015
Beijing NMC Co., Ltd.
Gang Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Chamfered narrow side copper plate for mould with funnel-shaped cur...
Patent number
9,089,894
Issue date
Jul 28, 2015
Central Iron & Steel Research Institute
Yong Gan
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Chamfered narrow side copper plate for mould with funnel-shaped cur...
Patent number
8,776,862
Issue date
Jul 15, 2014
Central Iron & Steel Research Institute
Yong Gan
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Plasma processing apparatus
Patent number
8,547,021
Issue date
Oct 1, 2013
Beijing NMC Co. Ltd.
Gang Wei
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Terminal and method and system for automatically controlling terminal
Patent number
8,437,221
Issue date
May 7, 2013
Legend Holdings Ltd.
Cheng Chen
G11 - INFORMATION STORAGE
Information
Patent Grant
Input method for touch screen
Patent number
8,405,619
Issue date
Mar 26, 2013
Lenovo (Beijing) Limited
Gang Wei
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
COIL STRUCTURE FOR GENERATING PLASMA AND SEMICONDUCTOR EQUIPMENT
Publication number
20240339296
Publication date
Oct 10, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING EQUIPMENT AND IMPEDANCE-MATCHING METHOD
Publication number
20240249917
Publication date
Jul 25, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Wenqing LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POWER CONTROL METHOD AND DEVICE OF LOWER RADIO FREQUENCY POWER SUPP...
Publication number
20240234088
Publication date
Jul 11, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POWER ADJUSTMENT METHOD OF UPPER ELECTRODE POWER SUPPLY AND SEMICON...
Publication number
20240194441
Publication date
Jun 13, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS APPARATUS AND POWER CONTROL METHOD
Publication number
20240006170
Publication date
Jan 4, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS APPARATUS AND PLASMA IGNITION METHOD
Publication number
20230411120
Publication date
Dec 21, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE
Publication number
20230402265
Publication date
Dec 14, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yancheng LU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE-MATCHING METHOD, IMPEDANCE-MATCHING DEVICE, AND SEMICONDU...
Publication number
20230386790
Publication date
Nov 30, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COIL STRUCTURE AND PLASMA PROCESSING APPARATUS
Publication number
20230260751
Publication date
Aug 17, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR REACTION CHAMBER
Publication number
20230230803
Publication date
Jul 20, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xingfei MAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UPPER ELECTRODE MECHANISM, CURRENT CONTROL METHOD FOR RADIO FREQUEN...
Publication number
20230197407
Publication date
Jun 22, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR REACTION CHAMBER AND ATOMIC LAYER PLASMA ETCHING APPA...
Publication number
20230187173
Publication date
Jun 15, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xingfei MAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL CIRCUIT, PULSED POWER SUPPLY SYSTEM, AND SEMICONDUCTOR PROC...
Publication number
20230023621
Publication date
Jan 26, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Gang WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF RADIOFREQUENCY SOURCE
Publication number
20210398776
Publication date
Dec 23, 2021
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yahui HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INDUCTION COIL ASSEMBLY AND REACTION CHAMBER
Publication number
20210375587
Publication date
Dec 2, 2021
Beijing NAURA Microelectronics Equipment Co., Ltd.
Chen NIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIO FREQUENCY PULSE MATCHING METHOD AND DEVICE THEREOF AND PULSIN...
Publication number
20210118651
Publication date
Apr 22, 2021
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xiaoyang CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR RADIO FREQUENCY IMPEDANCE MATCHING, AND SEMIC...
Publication number
20210098235
Publication date
Apr 1, 2021
Beijing NAURA Microelectronics Equipment Co., Ltd.
Gang WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR PULSE MODULATION OF RADIO FREQUENCY POWER SUP...
Publication number
20210066041
Publication date
Mar 4, 2021
Beijing NAURA Microelectronics Equipment Co., Ltd.
Gang WEI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LOWER ELECTRODE MECHANISM AND REACTION CHAMBER
Publication number
20200321198
Publication date
Oct 8, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yahui HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADJUSTABLE CAPACITOR, IMPEDANCE MATCHING DEVICE AND SEMICONDUCTOR P...
Publication number
20200321194
Publication date
Oct 8, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Gang WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE MATCHING METHOD, IMPEDANCE MATCHING DEVICE AND PLASMA GEN...
Publication number
20200126762
Publication date
Apr 23, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing YANG
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
FILTER CIRCUIT, HEATING CIRCUIT, AND SEMICONDUCTOR PROCESSING APPAR...
Publication number
20190245505
Publication date
Aug 8, 2019
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xiaoyang CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE MATCHING SYSTEM, IMPEDANCE MATCHING METHOD, AND SEMICONDU...
Publication number
20190108977
Publication date
Apr 11, 2019
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
METHOD OF OPERATING SEMICONDUCTOR MANUFACTURING APPARATUS AND SEMIC...
Publication number
20180158656
Publication date
Jun 7, 2018
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR PLASMA TREATMENT AND METHOD OF OPERATING THE APPARATUS
Publication number
20170301523
Publication date
Oct 19, 2017
BEIJING NMC CO., LTD
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTION CHAMBER AND PLASMA PROCESSING APPARATUS
Publication number
20170011938
Publication date
Jan 12, 2017
Beijing NMC Co., Ltd.
Xingcun LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR INSPECTING AND VALIDATING FLIGHT PROCEDURE
Publication number
20160144979
Publication date
May 26, 2016
Flight Inspection Center of CAAC
WEI SU
B64 - AIRCRAFT AVIATION COSMONAUTICS
Information
Patent Application
CONNECTION DEVICE FOR MEANS OF AIRPLANE
Publication number
20150129714
Publication date
May 14, 2015
AIRBUS OPERATIONS S.A.S.
Gang Wei
B64 - AIRCRAFT AVIATION COSMONAUTICS
Information
Patent Application
SUBSTRATE ETCHING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20140363975
Publication date
Dec 11, 2014
Beijing NMC Co., Ltd.
Gang Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Chamfered narrow side copper plate for mould with funnel-shaped cur...
Publication number
20140284018
Publication date
Sep 25, 2014
Yong GAN
B22 - CASTING POWDER METALLURGY