Gary Bridger Lind

Person

Nevada City, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor accumulator for corrosive gases with purging
- Patent number 12,227,842
- Issue date Feb 18, 2025
- Lam Research Corporation
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal thermal profile tuning using multiple heated zones and the...
- Patent number 12,215,420
- Issue date Feb 4, 2025
- Lam Research Corporation
- Gary B. Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal for a substrate processing system
- Patent number D1057675
- Issue date Jan 14, 2025
- Lam Research Corporation
- Gary B. Lind
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Pedestal polishing apparatus
- Patent number 12,162,117
- Issue date Dec 10, 2024
- Lam Research Corporation
- Robert McKinney
- B24 - GRINDING POLISHING
Information Patent Grant
Preventing deposition on pedestal in semiconductor substrate proces...
- Patent number 11,725,285
- Issue date Aug 15, 2023
- Lam Research Corporation
- Vinayakaraddy Gulabal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ chamber clean end point detection systems and methods using...
- Patent number 10,895,539
- Issue date Jan 19, 2021
- Lam Research Corporation
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lift pin holder with spring retention for substrate processing systems
- Patent number 10,460,977
- Issue date Oct 29, 2019
- Lam Research Corporation
- Andrew H. Breninger
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Gas inlet valve with incompatible materials isolation
- Patent number 10,132,413
- Issue date Nov 20, 2018
- Lam Research Corporation
- Gary Bridger Lind
- G05 - CONTROLLING REGULATING
Information Patent Grant
Systems and methods for bulk vaporization of precursor
- Patent number 9,964,332
- Issue date May 8, 2018
- Lam Research Corporation
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inlet for effective mixing and purging
- Patent number 9,951,421
- Issue date Apr 24, 2018
- Lam Research Corporation
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature electrode connections
- Patent number 9,088,085
- Issue date Jul 21, 2015
- Novellus Systems, Inc.
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat shield for heater in semiconductor processing apparatus
- Patent number 8,753,447
- Issue date Jun 17, 2014
- Novellus Systems, Inc.
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual seal deposition process chamber and process
- Patent number 7,737,035
- Issue date Jun 15, 2010
- Novellus Systems, Inc.
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlled-angle wafer positioning
- Patent number 7,686,927
- Issue date Mar 30, 2010
- Novellus Systems, Inc.
- Jonathan D. Reid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlled-angle wafer positioning
- Patent number 7,097,410
- Issue date Aug 29, 2006
- Novellus Systems, Inc.
- Jonathan D. Reid
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tapered post, showerhead design to improve mixing on dual plenum sh...
- Patent number 6,883,733
- Issue date Apr 26, 2005
- Novellus Systems, Inc.
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for controlled-angle wafer immersion
- Patent number 6,551,487
- Issue date Apr 22, 2003
- Novellus Systems, Inc.
- Jonathan D. Reid
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PEDESTAL POLISHING APPARATUS
- Publication number 20250041990
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Robert McKinney
- B24 - GRINDING POLISHING
Information Patent Application
PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCES...
- Publication number 20250019830
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Vinayakaraddy GULABAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID SHOWERHEAD WITH SEPARATE FACEPLATE FOR HIGH TEMPERATURE PROCESS
- Publication number 20240295026
- Publication date Sep 5, 2024
- LAM RESEARCH CORPORATION
- Lipyeow YAP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHADOW RING ALIGNMENT FOR SUBSTRATE SUPPORT
- Publication number 20240203703
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Vinayakaraddy GULABAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIG...
- Publication number 20240175134
- Publication date May 30, 2024
- LAM RESEARCH CORPORATION
- Gary B. LIND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AXIALLY COOLED METAL SHOWERHEADS FOR HIGH TEMPERATURE PROCESSES
- Publication number 20230383406
- Publication date Nov 30, 2023
- LAM RESEARCH CORPORATION
- Lipyeow YAP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL THERMAL PROFILE TUNING USING MULTIPLE HEATED ZONES AND THE...
- Publication number 20230272529
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Gary B. LIND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RING STRUCTURE WITH COMPLIANT CENTERING FINGERS
- Publication number 20230126459
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL POLISHING APPARATUS
- Publication number 20230016450
- Publication date Jan 19, 2023
- LAM RESEARCH CORPORATION
- Robert McKinney
- B24 - GRINDING POLISHING
Information Patent Application
VAPOR ACCUMULATOR FOR CORROSIVE GASES WITH PURGING
- Publication number 20220213599
- Publication date Jul 7, 2022
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCES...
- Publication number 20210230749
- Publication date Jul 29, 2021
- LAM RESEARCH CORPORATION
- Vinayakaraddy GULABAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU CHAMBER CLEAN END POINT DETECTION SYSTEMS AND METHODS USING...
- Publication number 20190120775
- Publication date Apr 25, 2019
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G01 - MEASURING TESTING
Information Patent Application
LIFT PIN HOLDER WITH SPRING RETENTION FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20180090363
- Publication date Mar 29, 2018
- LAM RESEARCH CORPORATION
- Andrew H. Breninger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
VAPOR MANIFOLD WITH INTEGRATED VAPOR CONCENTRATION SENSOR
- Publication number 20170342562
- Publication date Nov 30, 2017
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION RESISTANT GAS DISTRIBUTION MANIFOLD WITH THERMALLY CONTRO...
- Publication number 20160343595
- Publication date Nov 24, 2016
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INLET VALVE WITH INCOMPATIBLE MATERIALS ISOLATION
- Publication number 20160319938
- Publication date Nov 3, 2016
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
INLET FOR EFFECTIVE MIXING AND PURGING
- Publication number 20160168705
- Publication date Jun 16, 2016
- LAM RESEARCH CORPORATION
- Gary Bridger Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR BULK VAPORIZATION OF PRECURSOR
- Publication number 20150276264
- Publication date Oct 1, 2015
- LAM RESEARCH CORPORATION
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL BOTTOM CLEAN FOR IMPROVED FLUORINE UTILIZATION AND INTEGRA...
- Publication number 20150030766
- Publication date Jan 29, 2015
- Novellus Systems, Inc.
- Gary B. Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Temperature Electrode Connections
- Publication number 20140087587
- Publication date Mar 27, 2014
- Novellus Systems, Inc.
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL WITH EDGE GAS DEFLECTOR FOR EDGE PROFILE CONTROL
- Publication number 20130000848
- Publication date Jan 3, 2013
- NOVELLUS SYSTEMS INC.
- Panya Wongsenakhum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat Shield for Heater in Semiconductor Processing Apparatus
- Publication number 20100317197
- Publication date Dec 16, 2010
- Novellus Systems, Inc.
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for delivering uniform fluid flow in a chemica...
- Publication number 20080081114
- Publication date Apr 3, 2008
- Novellus Systems, Inc.
- William Johanson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Gary Bridger Lind

Person

Patents Grantslast 30 patents

Vapor accumulator for corrosive gases with purging

Pedestal thermal profile tuning using multiple heated zones and the...

Pedestal for a substrate processing system

Pedestal polishing apparatus

Preventing deposition on pedestal in semiconductor substrate proces...

In-situ chamber clean end point detection systems and methods using...

Lift pin holder with spring retention for substrate processing systems

Gas inlet valve with incompatible materials isolation

Systems and methods for bulk vaporization of precursor

Inlet for effective mixing and purging

High temperature electrode connections

Heat shield for heater in semiconductor processing apparatus

Dual seal deposition process chamber and process

Methods and apparatus for controlled-angle wafer positioning

Methods and apparatus for controlled-angle wafer positioning

Tapered post, showerhead design to improve mixing on dual plenum sh...

Methods and apparatus for controlled-angle wafer immersion

Patents Applicationslast 30 patents

PEDESTAL POLISHING APPARATUS

PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCES...

HYBRID SHOWERHEAD WITH SEPARATE FACEPLATE FOR HIGH TEMPERATURE PROCESS

SHADOW RING ALIGNMENT FOR SUBSTRATE SUPPORT

CONDUCTIVE COOLING OF A LOW TEMPERATURE PEDESTAL OPERATING IN A HIG...

AXIALLY COOLED METAL SHOWERHEADS FOR HIGH TEMPERATURE PROCESSES

PEDESTAL THERMAL PROFILE TUNING USING MULTIPLE HEATED ZONES AND THE...

RING STRUCTURE WITH COMPLIANT CENTERING FINGERS

PEDESTAL POLISHING APPARATUS

VAPOR ACCUMULATOR FOR CORROSIVE GASES WITH PURGING

PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCES...

IN-SITU CHAMBER CLEAN END POINT DETECTION SYSTEMS AND METHODS USING...

LIFT PIN HOLDER WITH SPRING RETENTION FOR SUBSTRATE PROCESSING SYSTEMS

VAPOR MANIFOLD WITH INTEGRATED VAPOR CONCENTRATION SENSOR

CORROSION RESISTANT GAS DISTRIBUTION MANIFOLD WITH THERMALLY CONTRO...

GAS INLET VALVE WITH INCOMPATIBLE MATERIALS ISOLATION

INLET FOR EFFECTIVE MIXING AND PURGING

SYSTEMS AND METHODS FOR BULK VAPORIZATION OF PRECURSOR

PEDESTAL BOTTOM CLEAN FOR IMPROVED FLUORINE UTILIZATION AND INTEGRA...

High Temperature Electrode Connections

PEDESTAL WITH EDGE GAS DEFLECTOR FOR EDGE PROFILE CONTROL

Heat Shield for Heater in Semiconductor Processing Apparatus

Apparatus and method for delivering uniform fluid flow in a chemica...