Gen You

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Etching method and etching apparatus
- Patent number 11,764,070
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Satoshi Toda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Computer storage medium to perform a substrate treatment method usi...
- Patent number 11,574,812
- Issue date Feb 7, 2023
- Tokyo Electron Limited
- Makoto Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method using a block copolymer containing a hyd...
- Patent number 10,418,242
- Issue date Sep 17, 2019
- Tokyo Electron Limited
- Makoto Muramatsu
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Substrate treatment method, computer storage medium and substrate t...
- Patent number 10,329,144
- Issue date Jun 25, 2019
- Tokyo Electron Limited
- Makoto Muramatsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-pressure container, substrate processing apparatus, and method...
- Patent number 10,207,349
- Issue date Feb 19, 2019
- Tokyo Electron Limited
- Kazuyuki Mitsuoka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 10,199,240
- Issue date Feb 5, 2019
- TOSHIBA MEMORY CORPORATION
- Hidekazu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and storage medium
- Patent number 10,096,462
- Issue date Oct 9, 2018
- TOSHIBA MEMORY CORPORATION
- Hidekazu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, fluid...
- Patent number 10,046,370
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Gentaro Goshi
- B08 - CLEANING
Information Patent Grant
Method for processing target object
- Patent number 9,911,621
- Issue date Mar 6, 2018
- Tokyo Electron Limited
- Toshikatsu Tobana
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method, computer readable storage medium and su...
- Patent number 9,741,583
- Issue date Aug 22, 2017
- Tokyo Electron Limited
- Makoto Muramatsu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate processing apparatus, substrate processing method, fluid...
- Patent number 9,662,685
- Issue date May 30, 2017
- Tokyo Electron Limited
- Gentaro Goshi
- B08 - CLEANING
Information Patent Grant
Supercritical drying method for semiconductor substrate and supercr...
- Patent number 9,583,330
- Issue date Feb 28, 2017
- Tokyo Electron Limited
- Linan Ji
- F26 - DRYING
Information Patent Grant
Supercritical drying method for semiconductor substrate and supercr...
- Patent number 8,771,429
- Issue date Jul 8, 2014
- Kabushiki Kaisha Toshiba
- Linan Ji
- F26 - DRYING
Information Patent Grant
Supercritical drying method and apparatus for semiconductor substrates
- Patent number 8,372,212
- Issue date Feb 12, 2013
- Kabushiki Kaisha Toshiba
- Yohei Sato
- F26 - DRYING
Information Patent Grant
Substrate processing method and computer storage medium
- Patent number 8,084,372
- Issue date Dec 27, 2011
- Tokyo Electron Limited
- Gen You
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20230014819
- Publication date Jan 19, 2023
- Tokyo Electron Limited
- Satoshi TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20220384178
- Publication date Dec 1, 2022
- TOKYO ELECTRON LIMITED
- Naoki SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20220068657
- Publication date Mar 3, 2022
- Tokyo Electron Limited
- Koji TAKEYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING APPARATUS
- Publication number 20220020601
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Satoshi TODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20190341255
- Publication date Nov 7, 2019
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20180065843
- Publication date Mar 8, 2018
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...
- Publication number 20170320107
- Publication date Nov 9, 2017
- TOKYO ELECTRON LIMITED
- Gentaro GOSHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
- Publication number 20170287749
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING TARGET OBJECT
- Publication number 20170148641
- Publication date May 25, 2017
- TOKYO ELECTRON LIMITED
- Toshikatsu TOBANA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER READABLE STORAGE MEDIUM AND SU...
- Publication number 20170133235
- Publication date May 11, 2017
- TOKYO ELECTRON LIMITED
- Makoto MURAMATSU
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...
- Publication number 20140250714
- Publication date Sep 11, 2014
- Kabushiki Kaisha Toshiba
- Linan JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-PRESSURE CONTAINER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...
- Publication number 20140145390
- Publication date May 29, 2014
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...
- Publication number 20140020721
- Publication date Jan 23, 2014
- Hidekazu HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...
- Publication number 20130333726
- Publication date Dec 19, 2013
- Gentaro GOSHI
- B08 - CLEANING
Information Patent Application
SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...
- Publication number 20130019905
- Publication date Jan 24, 2013
- Linan JI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20120304485
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Hidekazu Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPERCRITICAL DRYING METHOD AND APPARATUS FOR SEMICONDUCTOR SUBSTRATES
- Publication number 20120247516
- Publication date Oct 4, 2012
- Yohei SATO
- F26 - DRYING
Information Patent Application
METHOD AND APPARATUS FOR REFORMING FILM AND CONTROLLING SLIMMING AM...
- Publication number 20100040980
- Publication date Feb 18, 2010
- TOKYO ELECTON LIMITED
- Eiichi Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
- Publication number 20090053904
- Publication date Feb 26, 2009
- TOKYO ELECTRON LIMITED
- Gen You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for reforming film and controlling slimming am...
- Publication number 20050214683
- Publication date Sep 29, 2005
- TOKYO ELECTRON LIMITED
- Eiichi Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Etching method and etching apparatus

Computer storage medium to perform a substrate treatment method usi...

Substrate treatment method using a block copolymer containing a hyd...

Substrate treatment method, computer storage medium and substrate t...

High-pressure container, substrate processing apparatus, and method...

Substrate processing method, substrate processing apparatus, and st...

Substrate processing method and storage medium

Substrate processing apparatus, substrate processing method, fluid...

Method for processing target object

Substrate treatment method, computer readable storage medium and su...

Substrate processing apparatus, substrate processing method, fluid...

Supercritical drying method for semiconductor substrate and supercr...

Supercritical drying method for semiconductor substrate and supercr...

Supercritical drying method and apparatus for semiconductor substrates

Substrate processing method and computer storage medium

Patents Applicationslast 30 patents

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

ETCHING METHOD AND ETCHING APPARATUS

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...

METHOD FOR PROCESSING TARGET OBJECT

SUBSTRATE TREATMENT METHOD, COMPUTER READABLE STORAGE MEDIUM AND SU...

SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...

HIGH-PRESSURE CONTAINER, SUBSTRATE PROCESSING APPARATUS, AND METHOD...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND STO...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, FLUID...

SUPERCRITICAL DRYING METHOD FOR SEMICONDUCTOR SUBSTRATE AND SUPERCR...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUPERCRITICAL DRYING METHOD AND APPARATUS FOR SEMICONDUCTOR SUBSTRATES

METHOD AND APPARATUS FOR REFORMING FILM AND CONTROLLING SLIMMING AM...

SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM

Method and apparatus for reforming film and controlling slimming am...