Genichi Nanasaki

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and particle removal method
- Patent number 12,062,557
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Genichi Nanasaki
- B08 - CLEANING
Information Patent Grant
Conveyance robot replacement apparatus and conveyance robot replace...
- Patent number 10,133,266
- Issue date Nov 20, 2018
- Tokyo Electron Limited
- Masahiro Dogome
- G05 - CONTROLLING REGULATING
Information Patent Grant
Purging apparatus and purging method for substrate storage container
- Patent number 10,010,913
- Issue date Jul 3, 2018
- Tokyo Electron Limited
- Seiichi Kaise
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
TRANSFER SYSTEM, PROCESSING SYSTEM, AND TRANSFER METHOD
- Publication number 20240178044
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Kento TOKAIRIN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MOUNTING PAD, MOUNTING MECHANISM, AND SUBSTRATE TRANSFER MECHANISM
- Publication number 20230395421
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Masato OBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PARTICLE REMOVAL METHOD
- Publication number 20220199435
- Publication date Jun 23, 2022
- TOKYO ELECTRON LIMITED
- Genichi NANASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PURGE GAS CONTROL METHOD, AND VACUU...
- Publication number 20220080476
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- B08 - CLEANING
Information Patent Application
CONVEYANCE ROBOT REPLACEMENT APPARATUS AND CONVEYANCE ROBOT REPLACE...
- Publication number 20160011587
- Publication date Jan 14, 2016
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- G05 - CONTROLLING REGULATING
Information Patent Application
PURGING APPARATUS AND PURGING METHOD FOR SUBSTRATE STORAGE CONTAINER
- Publication number 20150040950
- Publication date Feb 12, 2015
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- B08 - CLEANING