Georg Soumagne

Person

Oyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Tin trap device, extreme ultraviolet light generation apparatus, an...
- Patent number 11,337,292
- Issue date May 17, 2022
- Gigaphoton Inc.
- Gouta Niimi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet chamber apparatus, extreme ultraviolet light ge...
- Patent number 11,145,429
- Issue date Oct 12, 2021
- Gigaphoton Inc.
- Atsushi Ueda
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 10,455,679
- Issue date Oct 22, 2019
- Gigaphoton Inc.
- Takashi Saito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 10,136,510
- Issue date Nov 20, 2018
- Gigaphoton Inc.
- Shinji Nagai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus with a gas supply to...
- Patent number 9,661,730
- Issue date May 23, 2017
- Gigaphoton, Inc.
- Atsushi Ueda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Mirror for extreme ultra violet, manufacturing method for mirror fo...
- Patent number 8,592,787
- Issue date Nov 26, 2013
- Gigaphoton Inc.
- Masato Moriya
- G02 - OPTICS
Information Patent Grant
Extreme ultra violet light source device
- Patent number 8,586,953
- Issue date Nov 19, 2013
- Gigaphoton Inc.
- Hiroshi Komori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,513,630
- Issue date Aug 20, 2013
- Gigaphoton Inc.
- Yoshifumi Ueno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor exposure device using extreme ultra violet radiation
- Patent number 8,507,885
- Issue date Aug 13, 2013
- Gigaphoton Inc.
- Masato Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus for and method of withdrawing ions in EUV light productio...
- Patent number 8,492,738
- Issue date Jul 23, 2013
- Gigaphoton, Inc.
- Yoshifumi Ueno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,354,657
- Issue date Jan 15, 2013
- Gigaphoton Inc.
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for and method of withdrawing ions in EUV light productio...
- Patent number 8,288,743
- Issue date Oct 16, 2012
- Gigaphoton, Inc.
- Yoshifumi Ueno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor exposure device using extreme ultra violet radiation
- Patent number 8,227,778
- Issue date Jul 24, 2012
- Komatsu Ltd.
- Masato Moriya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mirror for extreme ultra violet, manufacturing method for mirror fo...
- Patent number 8,198,613
- Issue date Jun 12, 2012
- Komatsu Ltd.
- Masato Moriya
- G02 - OPTICS
Information Patent Grant
Extreme ultra violet light source device
- Patent number 8,143,606
- Issue date Mar 27, 2012
- Komatsu Ltd.
- Hiroshi Komori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,067,756
- Issue date Nov 29, 2011
- Gigaphoton, Inc.
- Yoshifumi Ueno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,928,418
- Issue date Apr 19, 2011
- Gigahoton Inc.
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,915,600
- Issue date Mar 29, 2011
- Komatsu Ltd.
- Yoshifumi Ueno
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Prism unit and laser device
- Patent number 7,006,309
- Issue date Feb 28, 2006
- Gigaphoton, Inc.
- Osamu Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...
- Publication number 20240422889
- Publication date Dec 19, 2024
- Gigaphoton Inc.
- Takayuki SUZUKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TIN TRAP DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AN...
- Publication number 20220141945
- Publication date May 5, 2022
- Gigaphoton Inc.
- Gouta NIIMI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET CHAMBER APPARATUS, EXTREME ULTRAVIOLET LIGHT GE...
- Publication number 20200312479
- Publication date Oct 1, 2020
- Gigaphoton Inc.
- Atsushi UEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20180103534
- Publication date Apr 12, 2018
- Gigaphoton Inc.
- Takashi SAITO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SPHEROIDAL MIRROR REFLECTIVITY MEASURING APPARATUS FOR EXTREME ULTR...
- Publication number 20170336282
- Publication date Nov 23, 2017
- THE UNIVERSITY OF TOKYO
- Yohei KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20170238407
- Publication date Aug 17, 2017
- Gigaphoton Inc.
- Shinji NAGAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET...
- Publication number 20170127505
- Publication date May 4, 2017
- Institute for Laser Technology
- Atsushi SUNAHARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160255707
- Publication date Sep 1, 2016
- Gigaphoton Inc.
- Atsushi UEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE
- Publication number 20120261596
- Publication date Oct 18, 2012
- Komatsu Ltd./Gigaphoton Inc.
- Hiroshi KOMORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR EXPOSURE DEVICE USING EXTREME ULTRA VIOLET RADIATION
- Publication number 20120256105
- Publication date Oct 11, 2012
- Komatsu Ltd./Gigaphoton, Inc.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MIRROR FOR EXTREME ULTRA VIOLET, MANUFACTURING METHOD FOR MIRROR FO...
- Publication number 20120248342
- Publication date Oct 4, 2012
- GIGAPHOTON INC.
- Masato Moriya
- G02 - OPTICS
Information Patent Application
APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...
- Publication number 20120217414
- Publication date Aug 30, 2012
- GIGAPHOTON INC.
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20120097869
- Publication date Apr 26, 2012
- Gigaphoton, Inc.
- Yoshifumi Ueno
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20110163247
- Publication date Jul 7, 2011
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20100213395
- Publication date Aug 26, 2010
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20100176312
- Publication date Jul 15, 2010
- Hiroshi Komori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MIRROR FOR EXTREME ULTRA VIOLET, MANUFACTURING METHOD FOR MIRROR FO...
- Publication number 20090289205
- Publication date Nov 26, 2009
- Komatsu Ltd.
- Masato Moriya
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR EXPOSURE DEVICE USING EXTREME ULTRA VIOLET RADIATION
- Publication number 20090267003
- Publication date Oct 29, 2009
- Komatsu Ltd.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...
- Publication number 20090261242
- Publication date Oct 22, 2009
- GIGAPHOTON INC.
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20090261277
- Publication date Oct 22, 2009
- Georg Soumagne
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20080087840
- Publication date Apr 17, 2008
- Komatsu Ltd.
- Yoshifumi UENO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source device
- Publication number 20070228298
- Publication date Oct 4, 2007
- Hiroshi Komori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Prism unit and laser device
- Publication number 20030103280
- Publication date Jun 5, 2003
- GIGAPHOTON INC.
- Osamu Wakabayashi
- G02 - OPTICS

Georg Soumagne

Person

Patents Grantslast 30 patents

Tin trap device, extreme ultraviolet light generation apparatus, an...

Extreme ultraviolet chamber apparatus, extreme ultraviolet light ge...

Extreme ultraviolet light generation device

Extreme ultraviolet light generation device

Extreme ultraviolet light generation apparatus with a gas supply to...

Mirror for extreme ultra violet, manufacturing method for mirror fo...

Extreme ultra violet light source device

Extreme ultraviolet light source apparatus

Semiconductor exposure device using extreme ultra violet radiation

Apparatus for and method of withdrawing ions in EUV light productio...

Extreme ultra violet light source apparatus

Apparatus for and method of withdrawing ions in EUV light productio...

Semiconductor exposure device using extreme ultra violet radiation

Mirror for extreme ultra violet, manufacturing method for mirror fo...

Extreme ultra violet light source device

Extreme ultraviolet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Prism unit and laser device

Patents Applicationslast 30 patents

EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC...

TIN TRAP DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, AN...

EXTREME ULTRAVIOLET CHAMBER APPARATUS, EXTREME ULTRAVIOLET LIGHT GE...

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

SPHEROIDAL MIRROR REFLECTIVITY MEASURING APPARATUS FOR EXTREME ULTR...

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET...

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

EXTREME ULTRA VIOLET LIGHT SOURCE DEVICE

SEMICONDUCTOR EXPOSURE DEVICE USING EXTREME ULTRA VIOLET RADIATION

MIRROR FOR EXTREME ULTRA VIOLET, MANUFACTURING METHOD FOR MIRROR FO...

APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

MIRROR FOR EXTREME ULTRA VIOLET, MANUFACTURING METHOD FOR MIRROR FO...

SEMICONDUCTOR EXPOSURE DEVICE USING EXTREME ULTRA VIOLET RADIATION

APPARATUS FOR AND METHOD OF WITHDRAWING IONS IN EUV LIGHT PRODUCTIO...

Extreme ultra violet light source apparatus

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

Extreme ultra violet light source device

Prism unit and laser device