George Kren

Person

Los Alto Hills, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination energy management in surface inspection
- Patent number 9,194,812
- Issue date Nov 24, 2015
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Bright-field differential interference contrast system with scannin...
- Patent number 9,052,190
- Issue date Jun 9, 2015
- KLA-Tencor Corporation
- Ali Salehpour
- G01 - MEASURING TESTING
Information Patent Grant
Illumination energy management in surface inspection
- Patent number 8,786,850
- Issue date Jul 22, 2014
- KLA-Tencor Corporation
- Christian Wolters
- F21 - LIGHTING
Information Patent Grant
Computer-implemented methods, computer-readable media, and systems...
- Patent number 8,494,802
- Issue date Jul 23, 2013
- KLA-Tencor Corp.
- Haiguang Chen
- G01 - MEASURING TESTING
Information Patent Grant
Extending the lifetime of a deep UV laser in a wafer inspection tool
- Patent number 8,432,944
- Issue date Apr 30, 2013
- KLA-Technor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Fast laser power control with improved reliability for surface insp...
- Patent number 8,294,887
- Issue date Oct 23, 2012
- KLA-Tencor Corporation
- Stephen Biellak
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring shape or thickness information o...
- Patent number 8,068,234
- Issue date Nov 29, 2011
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Grant
Copper CMP flatness monitor using grazing incidence interferometry
- Patent number 7,505,144
- Issue date Mar 17, 2009
- KLA-Tencor Technologies Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Process and assembly for non-destructive surface inspections
- Patent number 7,477,371
- Issue date Jan 13, 2009
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching, and damping measureme...
- Patent number 7,436,506
- Issue date Oct 14, 2008
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection systems and methods for analyzing inspection data
- Patent number 7,417,724
- Issue date Aug 26, 2008
- KLA-Tencor Technologies Corp.
- Paul Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection systems and methods for analyzing inspection data
- Patent number 7,227,628
- Issue date Jun 5, 2007
- KLA-Tencor Technologies Corp.
- Paul Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Darkfield inspection system having a programmable light selection a...
- Patent number 7,199,874
- Issue date Apr 3, 2007
- KLA-Tencor Technologies Corporation
- Christopher F. Bevis
- G01 - MEASURING TESTING
Information Patent Grant
Process and assembly for non-destructive surface inspections
- Patent number 7,102,744
- Issue date Sep 5, 2006
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching, and damping measureme...
- Patent number 7,009,696
- Issue date Mar 7, 2006
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Darkfield inspection system having a programmable light selection a...
- Patent number 7,002,677
- Issue date Feb 21, 2006
- KLA-Tencor Technologies Corporation
- Christopher F. Bevis
- G01 - MEASURING TESTING
Information Patent Grant
Copper CMP flatness monitor using grazing incidence interferometry
- Patent number 6,806,966
- Issue date Oct 19, 2004
- KLA-Tencor Techologies Corporation
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Grant
Process for identifying defects in a substrate having non-uniform s...
- Patent number 6,781,688
- Issue date Aug 24, 2004
- KLA-Tencor Technologies Corporation
- George J. Kren
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching, and damping measureme...
- Patent number 6,686,996
- Issue date Feb 3, 2004
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Process and assembly for non-destructive surface inspections
- Patent number 6,606,153
- Issue date Aug 12, 2003
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for scanning, stitching, and damping measureme...
- Patent number 6,414,752
- Issue date Jul 2, 2002
- KLA-Tencor Technologies Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Process and assembly for non-destructive surface inspections
- Patent number 6,271,916
- Issue date Aug 7, 2001
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Grant
Surface scanner with thin film gauge
- Patent number 5,416,594
- Issue date May 16, 1995
- Tencor Instruments
- Kenneth P. Gross
- G01 - MEASURING TESTING
Information Patent Grant
Position location in surface scanning using interval timing between...
- Patent number 5,083,035
- Issue date Jan 21, 1992
- Tencor Instruments
- Jiri Pecen
- G02 - OPTICS
Information Patent Grant
Particle detection method including comparison between sequential s...
- Patent number 4,766,324
- Issue date Aug 23, 1988
- Tencor Instruments
- Soheil Saadat
- G01 - MEASURING TESTING
Information Patent Grant
Wafer handling apparatus
- Patent number 4,597,708
- Issue date Jul 1, 1986
- Tencor Instruments
- William R. Wheeler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer orientation system
- Patent number 4,376,482
- Issue date Mar 15, 1983
- Tencor Instruments
- William R. Wheeler
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Non-contacting resistivity instrument with structurally related con...
- Patent number 4,302,721
- Issue date Nov 24, 1981
- Tencor Instruments
- Karel Urbanek
- G01 - MEASURING TESTING
Information Patent Grant
Acoustic method and apparatus for measuring micron and submicron di...
- Patent number 4,285,053
- Issue date Aug 18, 1981
- Tencor Instruments
- George J. Kren
- G01 - MEASURING TESTING
Information Patent Grant
Probe for determining p or n-type conductivity of semiconductor mat...
- Patent number 4,282,483
- Issue date Aug 4, 1981
- Tencor Instruments
- George J. Kren
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140328043
- Publication date Nov 6, 2014
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
Enhanced Inspection and Metrology Techniques And Systems Using Brig...
- Publication number 20140268172
- Publication date Sep 18, 2014
- Ali Salehpour
- G01 - MEASURING TESTING
Information Patent Application
Illumination Energy Management in Surface Inspection
- Publication number 20140118729
- Publication date May 1, 2014
- KLA-Tencor Corporation
- Christian Wolters
- G01 - MEASURING TESTING
Information Patent Application
AIR FLOW MANAGEMENT IN A SYSTEM WITH HIGH SPEED SPINNING CHUCK
- Publication number 20130038866
- Publication date Feb 14, 2013
- KLA-Tencor Corporation
- George J. Kren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extending the lifetime of a Deep UV laser in a Wafer Inspection tool
- Publication number 20110315897
- Publication date Dec 29, 2011
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G02 - OPTICS
Information Patent Application
COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS...
- Publication number 20110196639
- Publication date Aug 11, 2011
- Kla-Tencor Corporation
- Haiguang Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING SHAPE OR THICKNESS INFORMATION O...
- Publication number 20100208272
- Publication date Aug 19, 2010
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching and damping measuremen...
- Publication number 20090040514
- Publication date Feb 12, 2009
- KLA-Tencor Technologies Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Process and Assembly for Non-Destructive Surface Inspections
- Publication number 20070103676
- Publication date May 10, 2007
- KLA-Tencor Corporation
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching, and damping measureme...
- Publication number 20060232770
- Publication date Oct 19, 2006
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Darkfield inspection system having a programmable light selection a...
- Publication number 20060082767
- Publication date Apr 20, 2006
- KLA-Tencor Technologies Corporation
- Christopher F. Bevis
- G01 - MEASURING TESTING
Information Patent Application
Copper CMP flatness monitor using grazing incidence interferometry
- Publication number 20050078320
- Publication date Apr 14, 2005
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Application
Darkfield inspection system having a programmable light selection a...
- Publication number 20050018179
- Publication date Jan 27, 2005
- KLA-Tencor Technologies Corporation
- Christopher F. Bevis
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching, and damping measureme...
- Publication number 20040145733
- Publication date Jul 29, 2004
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Process and assembly for non-destructive surface inspections
- Publication number 20040080741
- Publication date Apr 29, 2004
- Norbert Marxer
- G01 - MEASURING TESTING
Information Patent Application
Process for identifying defects in a substrate having non-uniform s...
- Publication number 20040066507
- Publication date Apr 8, 2004
- KLA-Tencor Technologies Corporation
- George J. Kren
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning, stitching, and damping measureme...
- Publication number 20020154296
- Publication date Oct 24, 2002
- KLA-Tencor Corporation
- Paul J. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Process and assembly for non-destructive surface inspections
- Publication number 20020051130
- Publication date May 2, 2002
- Norbert Marxer
- G01 - MEASURING TESTING

George Kren

Person

Patents Grantslast 30 patents

Illumination energy management in surface inspection

Bright-field differential interference contrast system with scannin...

Illumination energy management in surface inspection

Computer-implemented methods, computer-readable media, and systems...

Extending the lifetime of a deep UV laser in a wafer inspection tool

Fast laser power control with improved reliability for surface insp...

Method and apparatus for measuring shape or thickness information o...

Copper CMP flatness monitor using grazing incidence interferometry

Process and assembly for non-destructive surface inspections

Method and apparatus for scanning, stitching, and damping measureme...

Wafer inspection systems and methods for analyzing inspection data

Wafer inspection systems and methods for analyzing inspection data

Darkfield inspection system having a programmable light selection a...

Process and assembly for non-destructive surface inspections

Method and apparatus for scanning, stitching, and damping measureme...

Darkfield inspection system having a programmable light selection a...

Copper CMP flatness monitor using grazing incidence interferometry

Process for identifying defects in a substrate having non-uniform s...

Method and apparatus for scanning, stitching, and damping measureme...

Process and assembly for non-destructive surface inspections

Method and apparatus for scanning, stitching, and damping measureme...

Process and assembly for non-destructive surface inspections

Surface scanner with thin film gauge

Position location in surface scanning using interval timing between...

Particle detection method including comparison between sequential s...

Wafer handling apparatus

Wafer orientation system

Non-contacting resistivity instrument with structurally related con...

Acoustic method and apparatus for measuring micron and submicron di...

Probe for determining p or n-type conductivity of semiconductor mat...

Patents Applicationslast 30 patents

Illumination Energy Management in Surface Inspection

Enhanced Inspection and Metrology Techniques And Systems Using Brig...

Illumination Energy Management in Surface Inspection

AIR FLOW MANAGEMENT IN A SYSTEM WITH HIGH SPEED SPINNING CHUCK

Extending the lifetime of a Deep UV laser in a Wafer Inspection tool

COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS...

METHOD AND APPARATUS FOR MEASURING SHAPE OR THICKNESS INFORMATION O...

Method and apparatus for scanning, stitching and damping measuremen...

Process and Assembly for Non-Destructive Surface Inspections

Method and apparatus for scanning, stitching, and damping measureme...

Darkfield inspection system having a programmable light selection a...

Copper CMP flatness monitor using grazing incidence interferometry

Darkfield inspection system having a programmable light selection a...

Method and apparatus for scanning, stitching, and damping measureme...

Process and assembly for non-destructive surface inspections

Process for identifying defects in a substrate having non-uniform s...

Method and apparatus for scanning, stitching, and damping measureme...

Process and assembly for non-destructive surface inspections