Number | Name | Date | Kind |
---|---|---|---|
4378159 | Galbraith | Mar 1983 | |
4541011 | Mayer et al. | Sep 1985 | |
4681442 | Wagner | Jul 1987 |
Entry |
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Tullis, Barclay J., "A Method of Measuring and Specifying Particle Contamination by Process Equipment", Microcontamination, Nov. 1985-Jan., 1986, three parts. |
Gise, Peter, "Applications of Laser Scanning for Wafer and Photoplate Inspection" Microcontamination, Oct./Nov., 1983, pp. 41-44 and 62. |
Gise, Peter, "Principles of Laser Scanning for Defect and Contamination Detection in Microfabrication," Solid State Technology, Nov., 1983, pp. 163-165. |