Gerd Furter

Person

Ellwangen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Catadioptric objective comprising two intermediate images
- Patent number 6,600,608
- Issue date Jul 29, 2003
- Carl-Zeiss-Stiftung
- David R. Shafer
- G02 - OPTICS
Information Patent Grant
Projection exposure system having a reflective reticle
- Patent number 6,590,718
- Issue date Jul 8, 2003
- Carl-Zeiss-Stiftung
- Gerd Fürter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and exposure method
- Patent number 6,512,573
- Issue date Jan 28, 2003
- Carl-Zeiss-Stiftung
- Gerd Fürter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
REMA objective for microlithographic projection exposure systems
- Patent number 5,982,558
- Issue date Nov 9, 1999
- Carl-Zeiss-Stiftung
- Gerd Furter
- G02 - OPTICS
Information Patent Grant
High-resolution high-apertured objective
- Patent number 5,880,891
- Issue date Mar 9, 1999
- Carl-Zeiss-Stiftung
- Gerd Furter
- G02 - OPTICS
Information Patent Grant
Maximum aperture catadioptric reduction objective for microlithography
- Patent number 5,742,436
- Issue date Apr 21, 1998
- Carl-Zeiss-Stiftung
- Gerd Furter
- G02 - OPTICS
Information Patent Grant
Catadioptric reduction objective
- Patent number 5,402,267
- Issue date Mar 28, 1995
- Carl-Zeiss-Stiftung
- Gerd Furter
- G02 - OPTICS
Information Patent Grant
Measuring objective
- Patent number 5,289,316
- Issue date Feb 22, 1994
- Carl-Zeiss-Stiftung
- Gerd Furter
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
Projection exposure apparatus and exposure method
- Publication number 20020039180
- Publication date Apr 4, 2002
- Carl-Zeiss-Stiftung
- Gerd Furter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure system having a reflective reticle
- Publication number 20010022691
- Publication date Sep 20, 2001
- Gerd Furter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Gerd Furter

Person

Patents Grantslast 30 patents

Catadioptric objective comprising two intermediate images

Projection exposure system having a reflective reticle

Projection exposure apparatus and exposure method

REMA objective for microlithographic projection exposure systems

High-resolution high-apertured objective

Maximum aperture catadioptric reduction objective for microlithography

Catadioptric reduction objective

Measuring objective

Patents Applicationslast 30 patents

Projection exposure apparatus and exposure method

Projection exposure system having a reflective reticle